Integration of ferroelectric and piezoelectric thin films: concepts and applications for microsystems
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: London ISTE 2011
Series:ISTE
Subjects:
Online Access:FRO01
UBG01
Volltext
Item Description:Includes bibliographical references and index
This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films
Physical Description:1 Online-Ressource
ISBN:9781118616635
1118616634
9781118616758
1118616758

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