Integration of ferroelectric and piezoelectric thin films: concepts and applications for microsystems
Gespeichert in:
Bibliographische Detailangaben
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: London ISTE 2011
Schriftenreihe:ISTE
Schlagworte:
Online-Zugang:FRO01
UBG01
Volltext
Beschreibung:Includes bibliographical references and index
This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films
Beschreibung:1 Online-Ressource
ISBN:9781118616635
1118616634
9781118616758
1118616758

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