Atomic layer deposition: principles, characteristics, and nanotechnology applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Salem, Massachusetts
Scrivener Publishing, LLC
[2013]
|
| Edition: | 2nd Edition |
| Subjects: | |
| Online Access: | FRO01 UBG01 Volltext |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 1 Online-Ressource |
| ISBN: | 9781118747384 1118747380 9781118747421 1118747429 9781118747346 1118747348 9781118747407 1118747402 9781299619128 1299619126 |
Staff View
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| 245 | 1 | 0 | |a Atomic layer deposition |b principles, characteristics, and nanotechnology applications |c Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman |
| 250 | |a 2nd Edition | ||
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| id | DE-604.BV043395788 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:24:50Z |
| institution | BVB |
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| language | English |
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| publishDate | 2013 |
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| publisher | Scrivener Publishing, LLC |
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| spelling | Kääriäinen, Tommi Verfasser aut Atomic layer deposition principles, characteristics, and nanotechnology applications Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman 2nd Edition Salem, Massachusetts Scrivener Publishing, LLC [2013] 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index SCIENCE / Nanoscience bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS bisacsh Nanotechnologie gnd Atomlagenabscheidung gnd Chemical vapor deposition fast Epitaxy fast Microelectronics fast Nanotechnology fast Chemical vapor deposition Epitaxy Microelectronics Nanotechnology Cameron, David Sonstige oth Kääriäinen, Marja-Leena Sonstige oth Sherman, Arthur Sonstige oth Erscheint auch als Druck-Ausgabe, Hardcover 978-1-118-06277-7 Erscheint auch als Druck-Ausgabe, Hardcover 1-118-06277-9 https://onlinelibrary.wiley.com/doi/book/10.1002/9781118747407 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Kääriäinen, Tommi Atomic layer deposition principles, characteristics, and nanotechnology applications SCIENCE / Nanoscience bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS bisacsh Nanotechnologie gnd Atomlagenabscheidung gnd Chemical vapor deposition fast Epitaxy fast Microelectronics fast Nanotechnology fast Chemical vapor deposition Epitaxy Microelectronics Nanotechnology |
| title | Atomic layer deposition principles, characteristics, and nanotechnology applications |
| title_auth | Atomic layer deposition principles, characteristics, and nanotechnology applications |
| title_exact_search | Atomic layer deposition principles, characteristics, and nanotechnology applications |
| title_full | Atomic layer deposition principles, characteristics, and nanotechnology applications Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman |
| title_fullStr | Atomic layer deposition principles, characteristics, and nanotechnology applications Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman |
| title_full_unstemmed | Atomic layer deposition principles, characteristics, and nanotechnology applications Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman |
| title_short | Atomic layer deposition |
| title_sort | atomic layer deposition principles characteristics and nanotechnology applications |
| title_sub | principles, characteristics, and nanotechnology applications |
| topic | SCIENCE / Nanoscience bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS bisacsh Nanotechnologie gnd Atomlagenabscheidung gnd Chemical vapor deposition fast Epitaxy fast Microelectronics fast Nanotechnology fast Chemical vapor deposition Epitaxy Microelectronics Nanotechnology |
| topic_facet | SCIENCE / Nanoscience TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS Nanotechnologie Atomlagenabscheidung Chemical vapor deposition Epitaxy Microelectronics Nanotechnology |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9781118747407 |
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