Kääriäinen, T. (2013). Atomic layer deposition: Principles, characteristics, and nanotechnology applications (2nd Edition.). Scrivener Publishing, LLC.
Chicago Style (17th ed.) CitationKääriäinen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd Edition. Salem, Massachusetts: Scrivener Publishing, LLC, 2013.
MLA (9th ed.) CitationKääriäinen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd Edition. Scrivener Publishing, LLC, 2013.
Warning: These citations may not always be 100% accurate.