Nano-lithography:
Gespeichert in:
Bibliographische Detailangaben
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: London Wiley 2013
Schriftenreihe:ISTE
Schlagworte:
Online-Zugang:DE-M347
DE-861
DE-473
Volltext
Beschreibung:3.4.2. Comparison with competing advanced lithography techniques
Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams - in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics
Includes bibliographical references and index
Beschreibung:1 Online-Ressource (353 pages)
ISBN:9781118622582
1118622588
9781118621622
111862162X

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