Handbook of cleaning in semiconductor manufacturing: fundamentals and applications
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Salem
John Wiley & Sons, Inc.
© 2011
|
| Schlagworte: | |
| Online-Zugang: | FRO01 UBG01 Volltext |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 Online-Ressource (xxii, 592 pages) |
| ISBN: | 9781118071748 1118071743 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV043392876 | ||
| 003 | DE-604 | ||
| 005 | 20180103 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 160222s2011 |||| o||u| ||||||eng d | ||
| 020 | |a 9781118071748 |c electronic bk. |9 978-1-118-07174-8 | ||
| 020 | |a 1118071743 |c electronic bk. |9 1-118-07174-3 | ||
| 024 | 7 | |a 10.1002/9781118071748 |2 doi | |
| 035 | |a (ZDB-35-WIC)ocn705355215 | ||
| 035 | |a (OCoLC)705355215 | ||
| 035 | |a (DE-599)BVBBV043392876 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-861 | ||
| 082 | 0 | |a 621.3815/2 |2 22 | |
| 100 | 1 | |a Reinhardt, Karen A. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Handbook of cleaning in semiconductor manufacturing |b fundamentals and applications |c Karen A. Reinhardt, Richard F. Reidy |
| 264 | 1 | |a Salem |b John Wiley & Sons, Inc. |c © 2011 | |
| 300 | |a 1 Online-Ressource (xxii, 592 pages) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 533 | |a Online-Ausgabe |n Mode of access: World Wide Web | ||
| 650 | 4 | |a Semiconductors / Surfaces / Cleaning | |
| 700 | 1 | |a Reidy, Richard F. |e Sonstige |4 oth | |
| 776 | 0 | 8 | |i Reproduktion von |a Reinhardt, Karen A. |t Handbook of cleaning in semiconductor manufacturing |d © 2011 |
| 856 | 4 | 0 | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9781118071748 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-35-WIC | ||
| 940 | 1 | |q UBG_PDA_WIC | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028811460 | ||
| 966 | e | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9781118071748 |l FRO01 |p ZDB-35-WIC |q FRO_PDA_WIC |x Verlag |3 Volltext | |
| 966 | e | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9781118071748 |l UBG01 |p ZDB-35-WIC |q UBG_PDA_WIC |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804175969780498432 |
|---|---|
| any_adam_object | |
| author | Reinhardt, Karen A. |
| author_facet | Reinhardt, Karen A. |
| author_role | aut |
| author_sort | Reinhardt, Karen A. |
| author_variant | k a r ka kar |
| building | Verbundindex |
| bvnumber | BV043392876 |
| collection | ZDB-35-WIC |
| ctrlnum | (ZDB-35-WIC)ocn705355215 (OCoLC)705355215 (DE-599)BVBBV043392876 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01791nmm a2200421zc 4500</leader><controlfield tag="001">BV043392876</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20180103 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">160222s2011 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781118071748</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-118-07174-8</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1118071743</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-118-07174-3</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1002/9781118071748</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-35-WIC)ocn705355215</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)705355215</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043392876</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-861</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">22</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Reinhardt, Karen A.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of cleaning in semiconductor manufacturing</subfield><subfield code="b">fundamentals and applications</subfield><subfield code="c">Karen A. Reinhardt, Richard F. Reidy</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Salem</subfield><subfield code="b">John Wiley & Sons, Inc.</subfield><subfield code="c">© 2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xxii, 592 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="a">Online-Ausgabe</subfield><subfield code="n">Mode of access: World Wide Web</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors / Surfaces / Cleaning</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Reidy, Richard F.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Reproduktion von</subfield><subfield code="a">Reinhardt, Karen A.</subfield><subfield code="t">Handbook of cleaning in semiconductor manufacturing</subfield><subfield code="d">© 2011</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9781118071748</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-35-WIC</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">UBG_PDA_WIC</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028811460</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9781118071748</subfield><subfield code="l">FRO01</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">FRO_PDA_WIC</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9781118071748</subfield><subfield code="l">UBG01</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">UBG_PDA_WIC</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV043392876 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:24:44Z |
| institution | BVB |
| isbn | 9781118071748 1118071743 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028811460 |
| oclc_num | 705355215 |
| open_access_boolean | |
| owner | DE-861 |
| owner_facet | DE-861 |
| physical | 1 Online-Ressource (xxii, 592 pages) |
| psigel | ZDB-35-WIC UBG_PDA_WIC ZDB-35-WIC FRO_PDA_WIC ZDB-35-WIC UBG_PDA_WIC |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | John Wiley & Sons, Inc. |
| record_format | marc |
| spelling | Reinhardt, Karen A. Verfasser aut Handbook of cleaning in semiconductor manufacturing fundamentals and applications Karen A. Reinhardt, Richard F. Reidy Salem John Wiley & Sons, Inc. © 2011 1 Online-Ressource (xxii, 592 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Online-Ausgabe Mode of access: World Wide Web Semiconductors / Surfaces / Cleaning Reidy, Richard F. Sonstige oth Reproduktion von Reinhardt, Karen A. Handbook of cleaning in semiconductor manufacturing © 2011 https://onlinelibrary.wiley.com/doi/book/10.1002/9781118071748 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Reinhardt, Karen A. Handbook of cleaning in semiconductor manufacturing fundamentals and applications Semiconductors / Surfaces / Cleaning |
| title | Handbook of cleaning in semiconductor manufacturing fundamentals and applications |
| title_auth | Handbook of cleaning in semiconductor manufacturing fundamentals and applications |
| title_exact_search | Handbook of cleaning in semiconductor manufacturing fundamentals and applications |
| title_full | Handbook of cleaning in semiconductor manufacturing fundamentals and applications Karen A. Reinhardt, Richard F. Reidy |
| title_fullStr | Handbook of cleaning in semiconductor manufacturing fundamentals and applications Karen A. Reinhardt, Richard F. Reidy |
| title_full_unstemmed | Handbook of cleaning in semiconductor manufacturing fundamentals and applications Karen A. Reinhardt, Richard F. Reidy |
| title_short | Handbook of cleaning in semiconductor manufacturing |
| title_sort | handbook of cleaning in semiconductor manufacturing fundamentals and applications |
| title_sub | fundamentals and applications |
| topic | Semiconductors / Surfaces / Cleaning |
| topic_facet | Semiconductors / Surfaces / Cleaning |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9781118071748 |
| work_keys_str_mv | AT reinhardtkarena handbookofcleaninginsemiconductormanufacturingfundamentalsandapplications AT reidyrichardf handbookofcleaninginsemiconductormanufacturingfundamentalsandapplications |