Principles of MEMS:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Hoboken, N.J.
WILEY
©2010
|
| Schlagworte: | |
| Online-Zugang: | FRO01 UBG01 FHI01 FHN01 Volltext |
| Beschreibung: | Title from title screen (viewed Feb. 10, 2011) Includes bibliographical references (pages 657-659) and index "The building blocks of MEMS design through closed-form solutions. Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes: *Statics/force and moment acting on mechanical structures in static equilibrium *Static behaviors of structures consisting of mechanical elements *Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations *Fluid flow in MEMS and the evaluation of damping force acting on the moving structures *Basic equations of electromagnetics that govern the electrical behavior of MEMS *Combining the MEMS building blocks to form actuators and sensors for a specific purpose. All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis."--Publisher's description |
| Beschreibung: | 1 Online-Ressource (xii, 667 pages) |
| ISBN: | 9780470649671 0470649674 9780470649664 0470649666 9781118102244 111810224X 9780470466346 0470466340 |
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| 500 | |a From there, coverage includes: *Statics/force and moment acting on mechanical structures in static equilibrium *Static behaviors of structures consisting of mechanical elements *Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations *Fluid flow in MEMS and the evaluation of damping force acting on the moving structures *Basic equations of electromagnetics that govern the electrical behavior of MEMS *Combining the MEMS building blocks to form actuators and sensors for a specific purpose. All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. | ||
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Lee, Ki Bang |
| author_facet | Lee, Ki Bang |
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| author_sort | Lee, Ki Bang |
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| building | Verbundindex |
| bvnumber | BV043392773 |
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| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:24:44Z |
| institution | BVB |
| isbn | 9780470649671 0470649674 9780470649664 0470649666 9781118102244 111810224X 9780470466346 0470466340 |
| language | English |
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| physical | 1 Online-Ressource (xii, 667 pages) |
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| spelling | Lee, Ki Bang Verfasser aut Principles of MEMS Ki Bang Lee Principles of microelectromechanical systems Hoboken, N.J. WILEY ©2010 1 Online-Ressource (xii, 667 pages) txt rdacontent c rdamedia cr rdacarrier Title from title screen (viewed Feb. 10, 2011) Includes bibliographical references (pages 657-659) and index "The building blocks of MEMS design through closed-form solutions. Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes: *Statics/force and moment acting on mechanical structures in static equilibrium *Static behaviors of structures consisting of mechanical elements *Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations *Fluid flow in MEMS and the evaluation of damping force acting on the moving structures *Basic equations of electromagnetics that govern the electrical behavior of MEMS *Combining the MEMS building blocks to form actuators and sensors for a specific purpose. All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis."--Publisher's description Microelectromechanical systems TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems fast MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s DE-604 https://onlinelibrary.wiley.com/doi/book/10.1002/9780470649671 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Lee, Ki Bang Principles of MEMS Microelectromechanical systems TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems fast MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | Principles of MEMS |
| title_alt | Principles of microelectromechanical systems |
| title_auth | Principles of MEMS |
| title_exact_search | Principles of MEMS |
| title_full | Principles of MEMS Ki Bang Lee |
| title_fullStr | Principles of MEMS Ki Bang Lee |
| title_full_unstemmed | Principles of MEMS Ki Bang Lee |
| title_short | Principles of MEMS |
| title_sort | principles of mems |
| topic | Microelectromechanical systems TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems fast MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital MEMS |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9780470649671 |
| work_keys_str_mv | AT leekibang principlesofmems AT leekibang principlesofmicroelectromechanicalsystems |