Verfügbarkeit: Chemical mechanical planarization of microelectronic materials

Chemical mechanical planarization of microelectronic materials:

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Bibliographische Detailangaben
1. Verfasser:	Steigerwald, Joseph M. (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	New York J. Wiley ©1997
Schlagworte:	Chemical mechanical planarization Grinding and polishing Microelectronics / Materials Materiais e dispositivos semicondutores Planartechnik Mikroelektronik
Online-Zugang:	FRO01 UBG01 Volltext
Beschreibung:	Includes bibliographical references and index
Beschreibung:	1 Online-Ressource (xiii, 324 pages) 24 cm
ISBN:	9783527617746 3527617744

Internformat

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700	1		\|a Gutmann, Ronald J. \|e Sonstige \|4 oth
776	0	8	\|i Reproduktion von \|a Steigerwald, Joseph M. \|t Chemical mechanical planarization of microelectronic materials \|d ©1997
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Datensatz im Suchindex

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discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
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indexdate	2024-07-10T07:24:33Z
institution	BVB
isbn	9783527617746 3527617744
language	English
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physical	1 Online-Ressource (xiii, 324 pages) 24 cm
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record_format	marc
spelling	Steigerwald, Joseph M. Verfasser aut Chemical mechanical planarization of microelectronic materials Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann New York J. Wiley ©1997 1 Online-Ressource (xiii, 324 pages) 24 cm txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Online-Ausgabe Mode of access: World Wide Web Chemical mechanical planarization fast Grinding and polishing fast Microelectronics / Materials fast Materiais e dispositivos semicondutores larpcal Microelectronics / Materials Grinding and polishing Chemical mechanical planarization Planartechnik (DE-588)4174785-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 s Planartechnik (DE-588)4174785-9 s 1\p DE-604 Murarka, S. P. Sonstige oth Gutmann, Ronald J. Sonstige oth Reproduktion von Steigerwald, Joseph M. Chemical mechanical planarization of microelectronic materials ©1997 https://onlinelibrary.wiley.com/doi/book/10.1002/9783527617746 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Steigerwald, Joseph M. Chemical mechanical planarization of microelectronic materials Chemical mechanical planarization fast Grinding and polishing fast Microelectronics / Materials fast Materiais e dispositivos semicondutores larpcal Microelectronics / Materials Grinding and polishing Chemical mechanical planarization Planartechnik (DE-588)4174785-9 gnd Mikroelektronik (DE-588)4039207-7 gnd
subject_GND	(DE-588)4174785-9 (DE-588)4039207-7
title	Chemical mechanical planarization of microelectronic materials
title_auth	Chemical mechanical planarization of microelectronic materials
title_exact_search	Chemical mechanical planarization of microelectronic materials
title_full	Chemical mechanical planarization of microelectronic materials Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
title_fullStr	Chemical mechanical planarization of microelectronic materials Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
title_full_unstemmed	Chemical mechanical planarization of microelectronic materials Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
title_short	Chemical mechanical planarization of microelectronic materials
title_sort	chemical mechanical planarization of microelectronic materials
topic	Chemical mechanical planarization fast Grinding and polishing fast Microelectronics / Materials fast Materiais e dispositivos semicondutores larpcal Microelectronics / Materials Grinding and polishing Chemical mechanical planarization Planartechnik (DE-588)4174785-9 gnd Mikroelektronik (DE-588)4039207-7 gnd
topic_facet	Chemical mechanical planarization Grinding and polishing Microelectronics / Materials Materiais e dispositivos semicondutores Planartechnik Mikroelektronik
url	https://onlinelibrary.wiley.com/doi/book/10.1002/9783527617746
work_keys_str_mv	AT steigerwaldjosephm chemicalmechanicalplanarizationofmicroelectronicmaterials AT murarkasp chemicalmechanicalplanarizationofmicroelectronicmaterials AT gutmannronaldj chemicalmechanicalplanarizationofmicroelectronicmaterials

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