Fundamental principles of optical lithography: the science of microfabrication
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hoboken, N.J.
Wiley
2007
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| Subjects: | |
| Online Access: | FRO01 UBG01 Volltext |
| Physical Description: | 1 Online-Ressource (pages cm) |
| ISBN: | 9780470723876 0470723874 1282348817 9781282348813 |
Staff View
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Record in the Search Index
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| author | Mack, Chris A. |
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| dewey-full | 621.381531 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381531 |
| dewey-search | 621.381531 |
| dewey-sort | 3621.381531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043386873 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:24:32Z |
| institution | BVB |
| isbn | 9780470723876 0470723874 1282348817 9781282348813 |
| language | English |
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| physical | 1 Online-Ressource (pages cm) |
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| publishDate | 2007 |
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| publisher | Wiley |
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| spelling | Mack, Chris A. Verfasser aut Fundamental principles of optical lithography the science of microfabrication Chris Mack Hoboken, N.J. Wiley 2007 1 Online-Ressource (pages cm) txt rdacontent c rdamedia cr rdacarrier Online-Ausgabe Mode of access: World Wide Web Integrated circuits / Design and construction fast Microlithography / Industrial applications fast Integrated circuits / Design and construction Microlithography / Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s 1\p DE-604 Reproduktion von Mack, Chris A. Fundamental principles of optical lithography 2007 https://onlinelibrary.wiley.com/doi/book/10.1002/9780470723876 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Mack, Chris A. Fundamental principles of optical lithography the science of microfabrication Integrated circuits / Design and construction fast Microlithography / Industrial applications fast Integrated circuits / Design and construction Microlithography / Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4174516-4 |
| title | Fundamental principles of optical lithography the science of microfabrication |
| title_auth | Fundamental principles of optical lithography the science of microfabrication |
| title_exact_search | Fundamental principles of optical lithography the science of microfabrication |
| title_full | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_fullStr | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_full_unstemmed | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_short | Fundamental principles of optical lithography |
| title_sort | fundamental principles of optical lithography the science of microfabrication |
| title_sub | the science of microfabrication |
| topic | Integrated circuits / Design and construction fast Microlithography / Industrial applications fast Integrated circuits / Design and construction Microlithography / Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Integrated circuits / Design and construction Microlithography / Industrial applications Fotolithografie Halbleitertechnologie |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9780470723876 |
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