Dielectric films for advanced microelectronics:
Gespeichert in:
Format: | Elektronisch E-Book |
---|---|
Sprache: | English |
Veröffentlicht: |
Chichester, England
John Wiley & Sons
©2007
|
Schriftenreihe: | Wiley series in materials for electronic and optoelectronic applications
|
Schlagworte: | |
Online-Zugang: | FRO01 UBG01 URL des Erstveröffentlichers |
Beschreibung: | Includes bibliographical references and index The topic of thin films is an area of increasing¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices |
Beschreibung: | 1 Online-Ressource (xxii, 486 pages) |
ISBN: | 9780470017944 0470017945 9780470065419 0470065419 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV043386169 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | cr|uuu---uuuuu | ||
008 | 160222s2007 |||| o||u| ||||||eng d | ||
020 | |a 9780470017944 |9 978-0-470-01794-4 | ||
020 | |a 0470017945 |9 0-470-01794-5 | ||
020 | |a 9780470065419 |c electronic bk. |9 978-0-470-06541-9 | ||
020 | |a 0470065419 |c electronic bk. |9 0-470-06541-9 | ||
024 | 7 | |a 10.1002/9780470017944 |2 doi | |
035 | |a (ZDB-35-WIC)ocn123519025 | ||
035 | |a (OCoLC)123519025 | ||
035 | |a (DE-599)BVBBV043386169 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-861 | ||
082 | 0 | |a 621.381 |2 22 | |
084 | |a ZN 3490 |0 (DE-625)157325: |2 rvk | ||
245 | 1 | 0 | |a Dielectric films for advanced microelectronics |c edited by Mikhail Baklanov, Martin Green, and Karen Maex |
264 | 1 | |a Chichester, England |b John Wiley & Sons |c ©2007 | |
300 | |a 1 Online-Ressource (xxii, 486 pages) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 0 | |a Wiley series in materials for electronic and optoelectronic applications | |
500 | |a Includes bibliographical references and index | ||
500 | |a The topic of thin films is an area of increasing¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices | ||
650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics |2 bisacsh | |
650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Digital |2 bisacsh | |
650 | 7 | |a Dielectric films |2 fast | |
650 | 7 | |a Microelectronics / Materials |2 fast | |
650 | 4 | |a Dielectric films | |
650 | 4 | |a Microelectronics | |
650 | 4 | |a Dielectric films | |
650 | 4 | |a Microelectronics / Materials | |
650 | 0 | 7 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |2 gnd |9 rswk-swf |
653 | |a Electronic books | ||
655 | 7 | |8 1\p |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |D s |
689 | 0 | |8 2\p |5 DE-604 | |
700 | 1 | |a Baklanov, Mikhail |e Sonstige |4 oth | |
700 | 1 | |a Green, Martin |e Sonstige |4 oth | |
700 | 1 | |a Maex, Karen |e Sonstige |4 oth | |
776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe, Hardcover |z 978-0-470-01360-1 |
776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe, Hardcover |z 0-470-01360-5 |
856 | 4 | 0 | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
912 | |a ZDB-35-WIC | ||
940 | 1 | |q UBG_PDA_WIC | |
999 | |a oai:aleph.bib-bvb.de:BVB01-028804753 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
966 | e | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944 |l FRO01 |p ZDB-35-WIC |q FRO_PDA_WIC |x Verlag |3 Volltext | |
966 | e | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944 |l UBG01 |p ZDB-35-WIC |q UBG_PDA_WIC |x Verlag |3 Volltext |
Datensatz im Suchindex
_version_ | 1804175955207389184 |
---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV043386169 |
classification_rvk | ZN 3490 |
collection | ZDB-35-WIC |
ctrlnum | (ZDB-35-WIC)ocn123519025 (OCoLC)123519025 (DE-599)BVBBV043386169 |
dewey-full | 621.381 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.381 |
dewey-search | 621.381 |
dewey-sort | 3621.381 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03058nmm a2200661zc 4500</leader><controlfield tag="001">BV043386169</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">160222s2007 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780470017944</subfield><subfield code="9">978-0-470-01794-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0470017945</subfield><subfield code="9">0-470-01794-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780470065419</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-0-470-06541-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0470065419</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-470-06541-9</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1002/9780470017944</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-35-WIC)ocn123519025</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)123519025</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043386169</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-861</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3490</subfield><subfield code="0">(DE-625)157325:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Dielectric films for advanced microelectronics</subfield><subfield code="c">edited by Mikhail Baklanov, Martin Green, and Karen Maex</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Chichester, England</subfield><subfield code="b">John Wiley & Sons</subfield><subfield code="c">©2007</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xxii, 486 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Wiley series in materials for electronic and optoelectronic applications</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">The topic of thin films is an area of increasing¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Microelectronics</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Digital</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Dielectric films</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectronics / Materials</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Dielectric films</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Dielectric films</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics / Materials</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dielektrische Schicht</subfield><subfield code="0">(DE-588)4194257-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Electronic books</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="8">1\p</subfield><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dielektrische Schicht</subfield><subfield code="0">(DE-588)4194257-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Baklanov, Mikhail</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Green, Martin</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Maex, Karen</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe, Hardcover</subfield><subfield code="z">978-0-470-01360-1</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe, Hardcover</subfield><subfield code="z">0-470-01360-5</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-35-WIC</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">UBG_PDA_WIC</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028804753</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944</subfield><subfield code="l">FRO01</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">FRO_PDA_WIC</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944</subfield><subfield code="l">UBG01</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">UBG_PDA_WIC</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
genre | 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content |
genre_facet | Aufsatzsammlung |
id | DE-604.BV043386169 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T07:24:30Z |
institution | BVB |
isbn | 9780470017944 0470017945 9780470065419 0470065419 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028804753 |
oclc_num | 123519025 |
open_access_boolean | |
owner | DE-861 |
owner_facet | DE-861 |
physical | 1 Online-Ressource (xxii, 486 pages) |
psigel | ZDB-35-WIC UBG_PDA_WIC ZDB-35-WIC FRO_PDA_WIC ZDB-35-WIC UBG_PDA_WIC |
publishDate | 2007 |
publishDateSearch | 2007 |
publishDateSort | 2007 |
publisher | John Wiley & Sons |
record_format | marc |
series2 | Wiley series in materials for electronic and optoelectronic applications |
spelling | Dielectric films for advanced microelectronics edited by Mikhail Baklanov, Martin Green, and Karen Maex Chichester, England John Wiley & Sons ©2007 1 Online-Ressource (xxii, 486 pages) txt rdacontent c rdamedia cr rdacarrier Wiley series in materials for electronic and optoelectronic applications Includes bibliographical references and index The topic of thin films is an area of increasing¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Dielectric films fast Microelectronics / Materials fast Dielectric films Microelectronics Microelectronics / Materials Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf Electronic books 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Dielektrische Schicht (DE-588)4194257-7 s 2\p DE-604 Baklanov, Mikhail Sonstige oth Green, Martin Sonstige oth Maex, Karen Sonstige oth Erscheint auch als Druck-Ausgabe, Hardcover 978-0-470-01360-1 Erscheint auch als Druck-Ausgabe, Hardcover 0-470-01360-5 https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Dielectric films for advanced microelectronics TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Dielectric films fast Microelectronics / Materials fast Dielectric films Microelectronics Microelectronics / Materials Dielektrische Schicht (DE-588)4194257-7 gnd |
subject_GND | (DE-588)4194257-7 (DE-588)4143413-4 |
title | Dielectric films for advanced microelectronics |
title_auth | Dielectric films for advanced microelectronics |
title_exact_search | Dielectric films for advanced microelectronics |
title_full | Dielectric films for advanced microelectronics edited by Mikhail Baklanov, Martin Green, and Karen Maex |
title_fullStr | Dielectric films for advanced microelectronics edited by Mikhail Baklanov, Martin Green, and Karen Maex |
title_full_unstemmed | Dielectric films for advanced microelectronics edited by Mikhail Baklanov, Martin Green, and Karen Maex |
title_short | Dielectric films for advanced microelectronics |
title_sort | dielectric films for advanced microelectronics |
topic | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Dielectric films fast Microelectronics / Materials fast Dielectric films Microelectronics Microelectronics / Materials Dielektrische Schicht (DE-588)4194257-7 gnd |
topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Dielectric films Microelectronics / Materials Microelectronics Dielektrische Schicht Aufsatzsammlung |
url | https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944 |
work_keys_str_mv | AT baklanovmikhail dielectricfilmsforadvancedmicroelectronics AT greenmartin dielectricfilmsforadvancedmicroelectronics AT maexkaren dielectricfilmsforadvancedmicroelectronics |