Verfügbarkeit: Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems

Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems:

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Bibliographische Detailangaben
1. Verfasser:	Kropp, Joel Miron (VerfasserIn)
Format:	Abschlussarbeit Buch
Sprache:	English
Veröffentlicht:	München Verlag Dr. Hut 2015
Ausgabe:	1. Auflage
Schriftenreihe:	Mikrosystemtechnik
Schlagworte:	Mikroelektronik Membran Siliciumnitrid LPCVD-Verfahren Sensor Biological Sensor Systems Low-Stress LPCVD Silicon Nitride Membranes Physical Sensor Systems Hochschulschrift
Online-Zugang:	http://www.dr.hut-verlag.de/978-3-8439-2247-0.html Inhaltstext
Beschreibung:	III, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 280 g
ISBN:	9783843922470 3843922470

Internformat

MARC


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Datensatz im Suchindex

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discipline	Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik
edition	1. Auflage
format	Thesis Book
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physical	III, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 280 g
publishDate	2015
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publisher	Verlag Dr. Hut
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series2	Mikrosystemtechnik
spelling	Kropp, Joel Miron Verfasser (DE-588)107973466X aut Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems Joel Miron Kropp 1. Auflage München Verlag Dr. Hut 2015 III, 174 Seiten Illustrationen, Diagramme 21 cm x 14.8 cm, 280 g txt rdacontent n rdamedia nc rdacarrier Mikrosystemtechnik Dissertation Fachbereich für Physik und Elektrotechnik der Universität Bremen 2015 Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Membran (DE-588)4038571-1 gnd rswk-swf Siliciumnitrid (DE-588)4127841-0 gnd rswk-swf LPCVD-Verfahren (DE-588)4277965-0 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Biological Sensor Systems Low-Stress LPCVD Silicon Nitride Membranes Physical Sensor Systems (DE-588)4113937-9 Hochschulschrift gnd-content Mikroelektronik (DE-588)4039207-7 s Sensor (DE-588)4038824-4 s LPCVD-Verfahren (DE-588)4277965-0 s Siliciumnitrid (DE-588)4127841-0 s Membran (DE-588)4038571-1 s DE-604 Verlag Dr. Hut (München) (DE-588)10174118-2 pbl Erscheint auch als Online-Ausgabe Kropp, Joel Miron Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems http://www.dr.hut-verlag.de/978-3-8439-2247-0.html Verlag X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=f4f04ecd35a04c5aabf903f2d6f712d4&prov=M&dok_var=1&dok_ext=htm Inhaltstext
spellingShingle	Kropp, Joel Miron Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems Mikroelektronik (DE-588)4039207-7 gnd Membran (DE-588)4038571-1 gnd Siliciumnitrid (DE-588)4127841-0 gnd LPCVD-Verfahren (DE-588)4277965-0 gnd Sensor (DE-588)4038824-4 gnd
subject_GND	(DE-588)4039207-7 (DE-588)4038571-1 (DE-588)4127841-0 (DE-588)4277965-0 (DE-588)4038824-4 (DE-588)4113937-9
title	Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems
title_auth	Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems
title_exact_search	Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems
title_full	Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems Joel Miron Kropp
title_fullStr	Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems Joel Miron Kropp
title_full_unstemmed	Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems Joel Miron Kropp
title_short	Low-Stress LPCVD Silicon Nitride Membranes and Applications for Physical and Biological Sensor Systems
title_sort	low stress lpcvd silicon nitride membranes and applications for physical and biological sensor systems
topic	Mikroelektronik (DE-588)4039207-7 gnd Membran (DE-588)4038571-1 gnd Siliciumnitrid (DE-588)4127841-0 gnd LPCVD-Verfahren (DE-588)4277965-0 gnd Sensor (DE-588)4038824-4 gnd
topic_facet	Mikroelektronik Membran Siliciumnitrid LPCVD-Verfahren Sensor Hochschulschrift
url	http://www.dr.hut-verlag.de/978-3-8439-2247-0.html http://deposit.dnb.de/cgi-bin/dokserv?id=f4f04ecd35a04c5aabf903f2d6f712d4&prov=M&dok_var=1&dok_ext=htm
work_keys_str_mv	AT kroppjoelmiron lowstresslpcvdsiliconnitridemembranesandapplicationsforphysicalandbiologicalsensorsystems AT verlagdrhutmunchen lowstresslpcvdsiliconnitridemembranesandapplicationsforphysicalandbiologicalsensorsystems

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