Introduction to focused ion beam nanometrology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
San Rafael, CA
Morgan & Claypool Publishers
[2015]
Bristol IOP Publishing [2015] |
| Edition: | Version: 20151001 |
| Series: | IOP concise physics
|
| Subjects: | |
| Online Access: | Volltext |
| Item Description: | Angekündigt unter dem Titel: Focused ion beam |
| Physical Description: | 1 Online-Ressource (84 Seiten in getrennter Zählung) Illustrationen, Diagramme |
| ISBN: | 9781681740843 9781681740201 9781681742120 |
| ISSN: | 2053-2571 2054-7307 |
| DOI: | 10.1088/978-1-6817-4084-3 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV043182728 | ||
| 003 | DE-604 | ||
| 005 | 20180620 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 151202s2015 xx a||| o|||| 00||| eng d | ||
| 020 | |a 9781681740843 |c Online |9 978-1-6817-4084-3 | ||
| 020 | |a 9781681740201 |c Print |9 978-1-6817-4020-1 | ||
| 020 | |a 9781681742120 |c mobi |9 978-1-6817-4212-0 | ||
| 024 | 7 | |a 10.1088/978-1-6817-4084-3 |2 doi | |
| 035 | |a (OCoLC)933210155 | ||
| 035 | |a (DE-599)OBVAC12662309 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-19 |a DE-703 |a DE-20 | ||
| 100 | 1 | |a Cox, David C. |d 1965- |e Verfasser |0 (DE-588)1080370323 |4 aut | |
| 245 | 1 | 0 | |a Introduction to focused ion beam nanometrology |c David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) |
| 250 | |a Version: 20151001 | ||
| 264 | 1 | |a San Rafael, CA |b Morgan & Claypool Publishers |c [2015] | |
| 264 | 1 | |a Bristol |b IOP Publishing |c [2015] | |
| 264 | 4 | |c © 2015 | |
| 300 | |a 1 Online-Ressource (84 Seiten in getrennter Zählung) |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 347 | |a Textdatei |b PDF |b EPUB |b HTML | ||
| 490 | 0 | |a IOP concise physics |x 2053-2571 |x 2054-7307 | |
| 500 | |a Angekündigt unter dem Titel: Focused ion beam | ||
| 650 | 0 | 7 | |a Ionenstrahlanalyse |0 (DE-588)4569698-6 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Ionenstrahlanalyse |0 (DE-588)4569698-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 0 | |u https://doi.org/10.1088/978-1-6817-4084-3 |x Verlag |3 Volltext |
| 912 | |a ZDB-135-ICP | ||
| 912 | |a ZDB-135-IAL | ||
| 940 | 1 | |q ZDB-135-ICP_Release2 | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-028606643 | |
Record in the Search Index
| _version_ | 1823154525819633664 |
|---|---|
| adam_text | |
| any_adam_object | |
| author | Cox, David C. 1965- |
| author_GND | (DE-588)1080370323 |
| author_facet | Cox, David C. 1965- |
| author_role | aut |
| author_sort | Cox, David C. 1965- |
| author_variant | d c c dc dcc |
| building | Verbundindex |
| bvnumber | BV043182728 |
| collection | ZDB-135-ICP ZDB-135-IAL |
| ctrlnum | (OCoLC)933210155 (DE-599)OBVAC12662309 |
| doi_str_mv | 10.1088/978-1-6817-4084-3 |
| edition | Version: 20151001 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV043182728</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20180620</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">151202s2015 xx a||| o|||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781681740843</subfield><subfield code="c">Online</subfield><subfield code="9">978-1-6817-4084-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781681740201</subfield><subfield code="c">Print</subfield><subfield code="9">978-1-6817-4020-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781681742120</subfield><subfield code="c">mobi</subfield><subfield code="9">978-1-6817-4212-0</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1088/978-1-6817-4084-3</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)933210155</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)OBVAC12662309</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-19</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-20</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Cox, David C.</subfield><subfield code="d">1965-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1080370323</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Introduction to focused ion beam nanometrology</subfield><subfield code="c">David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK)</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Version: 20151001</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">San Rafael, CA</subfield><subfield code="b">Morgan & Claypool Publishers</subfield><subfield code="c">[2015]</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bristol</subfield><subfield code="b">IOP Publishing</subfield><subfield code="c">[2015]</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">© 2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (84 Seiten in getrennter Zählung)</subfield><subfield code="b">Illustrationen, Diagramme</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="347" ind1=" " ind2=" "><subfield code="a">Textdatei</subfield><subfield code="b">PDF</subfield><subfield code="b">EPUB</subfield><subfield code="b">HTML</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">IOP concise physics</subfield><subfield code="x">2053-2571</subfield><subfield code="x">2054-7307</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Angekündigt unter dem Titel: Focused ion beam</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenstrahlanalyse</subfield><subfield code="0">(DE-588)4569698-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ionenstrahlanalyse</subfield><subfield code="0">(DE-588)4569698-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1088/978-1-6817-4084-3</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-135-ICP</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-135-IAL</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-135-ICP_Release2</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028606643</subfield></datafield></record></collection> |
| id | DE-604.BV043182728 |
| illustrated | Illustrated |
| indexdate | 2025-02-04T19:00:45Z |
| institution | BVB |
| isbn | 9781681740843 9781681740201 9781681742120 |
| issn | 2053-2571 2054-7307 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028606643 |
| oclc_num | 933210155 |
| open_access_boolean | |
| owner | DE-19 DE-BY-UBM DE-703 DE-20 |
| owner_facet | DE-19 DE-BY-UBM DE-703 DE-20 |
| physical | 1 Online-Ressource (84 Seiten in getrennter Zählung) Illustrationen, Diagramme |
| psigel | ZDB-135-ICP ZDB-135-IAL ZDB-135-ICP_Release2 |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | Morgan & Claypool Publishers IOP Publishing |
| record_format | marc |
| series2 | IOP concise physics |
| spelling | Cox, David C. 1965- Verfasser (DE-588)1080370323 aut Introduction to focused ion beam nanometrology David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) Version: 20151001 San Rafael, CA Morgan & Claypool Publishers [2015] Bristol IOP Publishing [2015] © 2015 1 Online-Ressource (84 Seiten in getrennter Zählung) Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier Textdatei PDF EPUB HTML IOP concise physics 2053-2571 2054-7307 Angekündigt unter dem Titel: Focused ion beam Ionenstrahlanalyse (DE-588)4569698-6 gnd rswk-swf Ionenstrahlanalyse (DE-588)4569698-6 s DE-604 https://doi.org/10.1088/978-1-6817-4084-3 Verlag Volltext |
| spellingShingle | Cox, David C. 1965- Introduction to focused ion beam nanometrology Ionenstrahlanalyse (DE-588)4569698-6 gnd |
| subject_GND | (DE-588)4569698-6 |
| title | Introduction to focused ion beam nanometrology |
| title_auth | Introduction to focused ion beam nanometrology |
| title_exact_search | Introduction to focused ion beam nanometrology |
| title_full | Introduction to focused ion beam nanometrology David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) |
| title_fullStr | Introduction to focused ion beam nanometrology David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) |
| title_full_unstemmed | Introduction to focused ion beam nanometrology David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) |
| title_short | Introduction to focused ion beam nanometrology |
| title_sort | introduction to focused ion beam nanometrology |
| topic | Ionenstrahlanalyse (DE-588)4569698-6 gnd |
| topic_facet | Ionenstrahlanalyse |
| url | https://doi.org/10.1088/978-1-6817-4084-3 |
| work_keys_str_mv | AT coxdavidc introductiontofocusedionbeamnanometrology |