Introduction to focused ion beam nanometrology:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
San Rafael, CA
Morgan & Claypool Publishers
[2015]
Bristol IOP Publishing [2015] |
| Ausgabe: | Version: 20151001 |
| Schriftenreihe: | IOP concise physics
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | Angekündigt unter dem Titel: Focused ion beam |
| Beschreibung: | 1 Online-Ressource (84 Seiten in getrennter Zählung) Illustrationen, Diagramme |
| ISBN: | 9781681740843 9781681740201 9781681742120 |
| ISSN: | 2053-2571 2054-7307 |
| DOI: | 10.1088/978-1-6817-4084-3 |
Internformat
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| 245 | 1 | 0 | |a Introduction to focused ion beam nanometrology |c David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) |
| 250 | |a Version: 20151001 | ||
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Datensatz im Suchindex
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| author | Cox, David C. 1965- |
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| doi_str_mv | 10.1088/978-1-6817-4084-3 |
| edition | Version: 20151001 |
| format | Electronic eBook |
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| id | DE-604.BV043182728 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:19:56Z |
| institution | BVB |
| isbn | 9781681740843 9781681740201 9781681742120 |
| issn | 2053-2571 2054-7307 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028606643 |
| oclc_num | 933210155 |
| open_access_boolean | |
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| owner_facet | DE-19 DE-BY-UBM DE-703 DE-20 |
| physical | 1 Online-Ressource (84 Seiten in getrennter Zählung) Illustrationen, Diagramme |
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| publishDate | 2015 |
| publishDateSearch | 2015 |
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| publisher | Morgan & Claypool Publishers IOP Publishing |
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| series2 | IOP concise physics |
| spelling | Cox, David C. 1965- Verfasser (DE-588)1080370323 aut Introduction to focused ion beam nanometrology David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) Version: 20151001 San Rafael, CA Morgan & Claypool Publishers [2015] Bristol IOP Publishing [2015] © 2015 1 Online-Ressource (84 Seiten in getrennter Zählung) Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier IOP concise physics 2053-2571 2054-7307 Angekündigt unter dem Titel: Focused ion beam Ionenstrahlanalyse (DE-588)4569698-6 gnd rswk-swf Ionenstrahlanalyse (DE-588)4569698-6 s DE-604 https://doi.org/10.1088/978-1-6817-4084-3 Verlag Volltext Textdatei PDF EPUB HTML |
| spellingShingle | Cox, David C. 1965- Introduction to focused ion beam nanometrology Ionenstrahlanalyse (DE-588)4569698-6 gnd |
| subject_GND | (DE-588)4569698-6 |
| title | Introduction to focused ion beam nanometrology |
| title_auth | Introduction to focused ion beam nanometrology |
| title_exact_search | Introduction to focused ion beam nanometrology |
| title_full | Introduction to focused ion beam nanometrology David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) |
| title_fullStr | Introduction to focused ion beam nanometrology David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) |
| title_full_unstemmed | Introduction to focused ion beam nanometrology David C Cox (National Physical Laboratory, Teddington, UK and Advanced Technology Institute, University of Surrey, Guildford, UK) |
| title_short | Introduction to focused ion beam nanometrology |
| title_sort | introduction to focused ion beam nanometrology |
| topic | Ionenstrahlanalyse (DE-588)4569698-6 gnd |
| topic_facet | Ionenstrahlanalyse |
| url | https://doi.org/10.1088/978-1-6817-4084-3 |
| work_keys_str_mv | AT coxdavidc introductiontofocusedionbeamnanometrology |