APA (7th ed.) Citation

Cox, D. C. (2015). Introduction to focused ion beam nanometrology (Version: 20151001.). Morgan & Claypool Publishers. https://doi.org/10.1088/978-1-6817-4084-3

Chicago Style (17th ed.) Citation

Cox, David C. Introduction to Focused Ion Beam Nanometrology. Version: 20151001. San Rafael, CA: Morgan & Claypool Publishers, 2015. https://doi.org/10.1088/978-1-6817-4084-3.

MLA (9th ed.) Citation

Cox, David C. Introduction to Focused Ion Beam Nanometrology. Version: 20151001. Morgan & Claypool Publishers, 2015. https://doi.org/10.1088/978-1-6817-4084-3.