Particles on surfaces 8: detection, adhesion and removal
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Utrecht
VSP
2003
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| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | "This volume documents the proceedings of the 8th International Symposium on Particles on Surfaces: Detection, Adhesion, and Removal held under the auspices of MST Conferences in Providence, Rhode Island, June 24-26, 2002 Includes bibliographical references Preface; The nature and characterization of small particles; Surface and micro-analytical methods for particle identification; The haze of a wafer: A new approach to monitor nano-sized particles; Particle transport and adhesion in an ultra-clean ion-beam sputter deposition process; Particle deposition from a carry-over layer during immersion rinsing; The use of surfactants to reduce particulate contamination on surfaces; The use of rectangular jets for surface decontamination; Ice-air blast cleaning: Case studies This work documents the proceedings of the 8th International Symposium on Particles on Surfaces - Detection, Adhesion and Removal, held in Providence, Rhode Island, from June 24-26, 2002. Topics include nature and characterization of small particles, and particle deposition during immersion rinsing |
| Beschreibung: | 1 Online-Ressource (viii, 352 p.) |
| ISBN: | 1417577827 9047403339 9067643920 9781417577828 9789047403333 9789067643924 |
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| 500 | |a This work documents the proceedings of the 8th International Symposium on Particles on Surfaces - Detection, Adhesion and Removal, held in Providence, Rhode Island, from June 24-26, 2002. Topics include nature and characterization of small particles, and particle deposition during immersion rinsing | ||
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| spelling | International Symposium on Particles on Surfaces: Detection, Adhesion, and Removal < 2002, Providence, R.I.> Verfasser aut Particles on surfaces 8 detection, adhesion and removal editor, K.L. Mittal Particles on surfaces eight Utrecht VSP 2003 1 Online-Ressource (viii, 352 p.) txt rdacontent c rdamedia cr rdacarrier "This volume documents the proceedings of the 8th International Symposium on Particles on Surfaces: Detection, Adhesion, and Removal held under the auspices of MST Conferences in Providence, Rhode Island, June 24-26, 2002 Includes bibliographical references Preface; The nature and characterization of small particles; Surface and micro-analytical methods for particle identification; The haze of a wafer: A new approach to monitor nano-sized particles; Particle transport and adhesion in an ultra-clean ion-beam sputter deposition process; Particle deposition from a carry-over layer during immersion rinsing; The use of surfactants to reduce particulate contamination on surfaces; The use of rectangular jets for surface decontamination; Ice-air blast cleaning: Case studies This work documents the proceedings of the 8th International Symposium on Particles on Surfaces - Detection, Adhesion and Removal, held in Providence, Rhode Island, from June 24-26, 2002. Topics include nature and characterization of small particles, and particle deposition during immersion rinsing Particles Surfaces (Technology) TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Particles fast Surfaces (Technology) fast Particles Congresses Surfaces (Technology) Congresses (DE-588)1071861417 Konferenzschrift gnd-content Mittal, K. L. Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=117243 Aggregator Volltext |
| spellingShingle | Particles on surfaces 8 detection, adhesion and removal Particles Surfaces (Technology) TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Particles fast Surfaces (Technology) fast Particles Congresses Surfaces (Technology) Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Particles on surfaces 8 detection, adhesion and removal |
| title_alt | Particles on surfaces eight |
| title_auth | Particles on surfaces 8 detection, adhesion and removal |
| title_exact_search | Particles on surfaces 8 detection, adhesion and removal |
| title_full | Particles on surfaces 8 detection, adhesion and removal editor, K.L. Mittal |
| title_fullStr | Particles on surfaces 8 detection, adhesion and removal editor, K.L. Mittal |
| title_full_unstemmed | Particles on surfaces 8 detection, adhesion and removal editor, K.L. Mittal |
| title_short | Particles on surfaces 8 |
| title_sort | particles on surfaces 8 detection adhesion and removal |
| title_sub | detection, adhesion and removal |
| topic | Particles Surfaces (Technology) TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Particles fast Surfaces (Technology) fast Particles Congresses Surfaces (Technology) Congresses |
| topic_facet | Particles Surfaces (Technology) TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. Particles Congresses Surfaces (Technology) Congresses Konferenzschrift |
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