Plasma processing and processing science:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Washington, D.C.
National Academy Press
1995
|
| Schriftenreihe: | NRL strategic series
|
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Committee chair: Francis F. Chen. - This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124 |
| Beschreibung: | 1 Online-Ressource (x, 35 pages) |
| ISBN: | 0309575168 9780309575164 |
Internformat
MARC
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| 300 | |a 1 Online-Ressource (x, 35 pages) | ||
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| 500 | |a Committee chair: Francis F. Chen. - This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124 | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Mechanical |2 bisacsh | |
| 650 | 7 | |a Plasma engineering |2 fast | |
| 650 | 7 | |a Plasma etching |2 fast | |
| 650 | 7 | |a Semiconductors / Etching |2 fast | |
| 650 | 4 | |a Plasma engineering | |
| 650 | 4 | |a Semiconductors |x Etching | |
| 650 | 4 | |a Plasma etching | |
| 700 | 1 | |a Chen, Francis F. |d 1929- |e Sonstige |0 (DE-588)17201932X |4 oth | |
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| 710 | 2 | |a National Research Council (U.S.) |b Commission on Physical Sciences, Mathematics, and Applications |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| author_GND | (DE-588)17201932X |
| building | Verbundindex |
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| dewey-full | 621.044 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.044 |
| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| format | Electronic eBook |
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| id | DE-604.BV043147321 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:54Z |
| institution | BVB |
| isbn | 0309575168 9780309575164 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028571512 |
| oclc_num | 58567010 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource (x, 35 pages) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | National Academy Press |
| record_format | marc |
| series2 | NRL strategic series |
| spelling | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council Washington, D.C. National Academy Press 1995 1 Online-Ressource (x, 35 pages) txt rdacontent c rdamedia cr rdacarrier NRL strategic series Committee chair: Francis F. Chen. - This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124 TECHNOLOGY & ENGINEERING / Mechanical bisacsh Plasma engineering fast Plasma etching fast Semiconductors / Etching fast Plasma engineering Semiconductors Etching Plasma etching Chen, Francis F. 1929- Sonstige (DE-588)17201932X oth National Research Council (U.S.) Panel on Plasma Processing Sonstige oth National Research Council (U.S.) Naval Studies Board Sonstige oth National Research Council (U.S.) Commission on Physical Sciences, Mathematics, and Applications Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=123670 Aggregator Volltext |
| spellingShingle | Plasma processing and processing science TECHNOLOGY & ENGINEERING / Mechanical bisacsh Plasma engineering fast Plasma etching fast Semiconductors / Etching fast Plasma engineering Semiconductors Etching Plasma etching |
| title | Plasma processing and processing science |
| title_auth | Plasma processing and processing science |
| title_exact_search | Plasma processing and processing science |
| title_full | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_fullStr | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_full_unstemmed | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_short | Plasma processing and processing science |
| title_sort | plasma processing and processing science |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Plasma engineering fast Plasma etching fast Semiconductors / Etching fast Plasma engineering Semiconductors Etching Plasma etching |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Plasma engineering Plasma etching Semiconductors / Etching Semiconductors Etching |
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