Low energy ion assisted film growth:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
London
Imperial College Press
©2003
|
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Includes bibliographical references and index Cover -- Contents -- Foreword -- CHAPTER 1: BASIC CONCEPTS ON THE INTERACTION OF LOW ENERGY ION BEAMS WITH SOLID TARGETS -- 1.1. Introduction -- 1.2. Interatomic interaction -- 1.3. Basic concepts in classical dynamics of binary elastic collisions -- 1.4. Range of energetic ions in solids -- 1.5. Spatial distribution of deposited energy -- 1.6. Damage induced by ion bombardment -- 1.7. Sputtering -- 1.8. Experimental parameters in IAD thin film growth -- References -- CHAPTER 2: ION ASSISTED METHODS OF PREPARATION OF THIN FILMS -- 2.1. Assistance of film growth with independent ion sources -- 2.2. Ion assisted deposition of thin films without independent ion sources -- 2.3. Plasma immersion ion implantation -- 2.4. Broad beam ion sources -- References -- CHAPTER 3: EFFECTS INDUCED BY THE ION ASSISTANCE OF FILM GROWTH -- 3.1. Ion beam effects during film growth -- 3.2. Nucleation and growth of thin films under ion bombardment & This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book |
| Beschreibung: | 1 Online-Ressource (xiv, 283 pages) |
| ISBN: | 1281865931 1848161328 1860943519 9781281865939 9781848161320 |
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| 100 | 1 | |a González-Elipe, A. R. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Low energy ion assisted film growth |c A.R. González-Elipe, F. Yubero, J.M. Sanz |
| 264 | 1 | |a London |b Imperial College Press |c ©2003 | |
| 300 | |a 1 Online-Ressource (xiv, 283 pages) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
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| 500 | |a Includes bibliographical references and index | ||
| 500 | |a Cover -- Contents -- Foreword -- CHAPTER 1: BASIC CONCEPTS ON THE INTERACTION OF LOW ENERGY ION BEAMS WITH SOLID TARGETS -- 1.1. Introduction -- 1.2. Interatomic interaction -- 1.3. Basic concepts in classical dynamics of binary elastic collisions -- 1.4. Range of energetic ions in solids -- 1.5. Spatial distribution of deposited energy -- 1.6. Damage induced by ion bombardment -- 1.7. Sputtering -- 1.8. Experimental parameters in IAD thin film growth -- References -- CHAPTER 2: ION ASSISTED METHODS OF PREPARATION OF THIN FILMS -- 2.1. Assistance of film growth with independent ion sources -- 2.2. Ion assisted deposition of thin films without independent ion sources -- 2.3. Plasma immersion ion implantation -- 2.4. Broad beam ion sources -- References -- CHAPTER 3: EFFECTS INDUCED BY THE ION ASSISTANCE OF FILM GROWTH -- 3.1. Ion beam effects during film growth -- 3.2. Nucleation and growth of thin films under ion bombardment & | ||
| 500 | |a This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Solid State |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Semiconductors |2 bisacsh | |
| 650 | 7 | |a Ion bombardment |2 fast | |
| 650 | 7 | |a Thin films / Design and construction |2 fast | |
| 650 | 7 | |a Thin films / Effect of radiation on |2 fast | |
| 650 | 4 | |a Thin films |x Design and construction | |
| 650 | 4 | |a Thin films |x Effect of radiation on | |
| 650 | 4 | |a Ion bombardment | |
| 700 | 1 | |a Yubero, F. |e Sonstige |4 oth | |
| 700 | 1 | |a Sanz, J. M. |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| author | González-Elipe, A. R. |
| author_facet | González-Elipe, A. R. |
| author_role | aut |
| author_sort | González-Elipe, A. R. |
| author_variant | a r g e arg arge |
| building | Verbundindex |
| bvnumber | BV043142037 |
| collection | ZDB-4-EBA |
| ctrlnum | (OCoLC)261114897 (DE-599)BVBBV043142037 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043142037 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:44Z |
| institution | BVB |
| isbn | 1281865931 1848161328 1860943519 9781281865939 9781848161320 |
| language | English |
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| physical | 1 Online-Ressource (xiv, 283 pages) |
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| spelling | González-Elipe, A. R. Verfasser aut Low energy ion assisted film growth A.R. González-Elipe, F. Yubero, J.M. Sanz London Imperial College Press ©2003 1 Online-Ressource (xiv, 283 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Cover -- Contents -- Foreword -- CHAPTER 1: BASIC CONCEPTS ON THE INTERACTION OF LOW ENERGY ION BEAMS WITH SOLID TARGETS -- 1.1. Introduction -- 1.2. Interatomic interaction -- 1.3. Basic concepts in classical dynamics of binary elastic collisions -- 1.4. Range of energetic ions in solids -- 1.5. Spatial distribution of deposited energy -- 1.6. Damage induced by ion bombardment -- 1.7. Sputtering -- 1.8. Experimental parameters in IAD thin film growth -- References -- CHAPTER 2: ION ASSISTED METHODS OF PREPARATION OF THIN FILMS -- 2.1. Assistance of film growth with independent ion sources -- 2.2. Ion assisted deposition of thin films without independent ion sources -- 2.3. Plasma immersion ion implantation -- 2.4. Broad beam ion sources -- References -- CHAPTER 3: EFFECTS INDUCED BY THE ION ASSISTANCE OF FILM GROWTH -- 3.1. Ion beam effects during film growth -- 3.2. Nucleation and growth of thin films under ion bombardment & This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Ion bombardment fast Thin films / Design and construction fast Thin films / Effect of radiation on fast Thin films Design and construction Thin films Effect of radiation on Ion bombardment Yubero, F. Sonstige oth Sanz, J. M. Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=235523 Aggregator Volltext |
| spellingShingle | González-Elipe, A. R. Low energy ion assisted film growth TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Ion bombardment fast Thin films / Design and construction fast Thin films / Effect of radiation on fast Thin films Design and construction Thin films Effect of radiation on Ion bombardment |
| title | Low energy ion assisted film growth |
| title_auth | Low energy ion assisted film growth |
| title_exact_search | Low energy ion assisted film growth |
| title_full | Low energy ion assisted film growth A.R. González-Elipe, F. Yubero, J.M. Sanz |
| title_fullStr | Low energy ion assisted film growth A.R. González-Elipe, F. Yubero, J.M. Sanz |
| title_full_unstemmed | Low energy ion assisted film growth A.R. González-Elipe, F. Yubero, J.M. Sanz |
| title_short | Low energy ion assisted film growth |
| title_sort | low energy ion assisted film growth |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Ion bombardment fast Thin films / Design and construction fast Thin films / Effect of radiation on fast Thin films Design and construction Thin films Effect of radiation on Ion bombardment |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Solid State TECHNOLOGY & ENGINEERING / Electronics / Semiconductors Ion bombardment Thin films / Design and construction Thin films / Effect of radiation on Thin films Design and construction Thin films Effect of radiation on |
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