Microelectromechanical systems: advanced materials and fabrication methods
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Washington, DC
National Academy Press
1997
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| Subjects: | |
| Online Access: | FAW01 FAW02 Volltext |
| Item Description: | Includes bibliographical references (pages 51-55) |
| Physical Description: | 1 Online-Ressource (xiv, 61 pages) |
| ISBN: | 0309059801 0585002509 9780309059800 9780585002507 |
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| 245 | 1 | 0 | |a Microelectromechanical systems |b advanced materials and fabrication methods |c Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| 264 | 1 | |a Washington, DC |b National Academy Press |c 1997 | |
| 300 | |a 1 Online-Ressource (xiv, 61 pages) | ||
| 336 | |b txt |2 rdacontent | ||
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| 500 | |a Includes bibliographical references (pages 51-55) | ||
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| 650 | 7 | |a Microelectronics / Materials |2 fast | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Microelectromechanical systems |x Design and construction | |
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| 710 | 2 | |a National Research Council (U.S.) |b National Materials Advisory Board |e Sonstige |4 oth | |
| 710 | 2 | |a National Research Council (U.S.) |b Commission on Engineering and Technical Systems |e Sonstige |4 oth | |
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| id | DE-604.BV043134139 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:29Z |
| institution | BVB |
| isbn | 0309059801 0585002509 9780309059800 9780585002507 |
| language | English |
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| physical | 1 Online-Ressource (xiv, 61 pages) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | National Academy Press |
| record_format | marc |
| spelling | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council Washington, DC National Academy Press 1997 1 Online-Ressource (xiv, 61 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (pages 51-55) Microélectronique / Matériaux Micromachines / Conception et construction TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems / Design and construction fast Microelectronics / Materials fast Microelectronics Materials Microelectromechanical systems Design and construction National Research Council (U.S.) Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems Sonstige oth National Research Council (U.S.) National Materials Advisory Board Sonstige oth National Research Council (U.S.) Commission on Engineering and Technical Systems Sonstige oth Erscheint auch als Druckausgabe 0-309-05885-6 Erscheint auch als Druckausgabe 978-0-309-05885-8 http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507 Aggregator Volltext |
| spellingShingle | Microelectromechanical systems advanced materials and fabrication methods Microélectronique / Matériaux Micromachines / Conception et construction TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems / Design and construction fast Microelectronics / Materials fast Microelectronics Materials Microelectromechanical systems Design and construction |
| title | Microelectromechanical systems advanced materials and fabrication methods |
| title_auth | Microelectromechanical systems advanced materials and fabrication methods |
| title_exact_search | Microelectromechanical systems advanced materials and fabrication methods |
| title_full | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_fullStr | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_full_unstemmed | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_short | Microelectromechanical systems |
| title_sort | microelectromechanical systems advanced materials and fabrication methods |
| title_sub | advanced materials and fabrication methods |
| topic | Microélectronique / Matériaux Micromachines / Conception et construction TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems / Design and construction fast Microelectronics / Materials fast Microelectronics Materials Microelectromechanical systems Design and construction |
| topic_facet | Microélectronique / Matériaux Micromachines / Conception et construction TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Microelectromechanical systems / Design and construction Microelectronics / Materials Microelectronics Materials Microelectromechanical systems Design and construction |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507 |
| work_keys_str_mv | AT nationalresearchcounciluscommitteeonadvancedmaterialsandfabricationmethodsformicroelectromechanicalsystems microelectromechanicalsystemsadvancedmaterialsandfabricationmethods AT nationalresearchcouncilusnationalmaterialsadvisoryboard microelectromechanicalsystemsadvancedmaterialsandfabricationmethods AT nationalresearchcounciluscommissiononengineeringandtechnicalsystems microelectromechanicalsystemsadvancedmaterialsandfabricationmethods |