Microelectromechanical systems: advanced materials and fabrication methods
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Washington, DC
National Academy Press
1997
|
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Includes bibliographical references (pages 51-55) |
| Beschreibung: | 1 Online-Ressource (xiv, 61 pages) |
| ISBN: | 0309059801 0585002509 9780309059800 9780585002507 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV043134139 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 151126s1997 |||| o||u| ||||||eng d | ||
| 020 | |a 0309059801 |c Online version |9 0-309-05980-1 | ||
| 020 | |a 0585002509 |c electronic bk. |9 0-585-00250-9 | ||
| 020 | |a 9780309059800 |c Online version |9 978-0-309-05980-0 | ||
| 020 | |a 9780585002507 |c electronic bk. |9 978-0-585-00250-7 | ||
| 035 | |a (OCoLC)53011051 | ||
| 035 | |a (DE-599)BVBBV043134139 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 |a DE-1047 | ||
| 082 | 0 | |a 621.381 |2 21 | |
| 245 | 1 | 0 | |a Microelectromechanical systems |b advanced materials and fabrication methods |c Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| 264 | 1 | |a Washington, DC |b National Academy Press |c 1997 | |
| 300 | |a 1 Online-Ressource (xiv, 61 pages) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references (pages 51-55) | ||
| 650 | 4 | |a Microélectronique / Matériaux | |
| 650 | 4 | |a Micromachines / Conception et construction | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Digital |2 bisacsh | |
| 650 | 7 | |a Microelectromechanical systems / Design and construction |2 fast | |
| 650 | 7 | |a Microelectronics / Materials |2 fast | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Microelectromechanical systems |x Design and construction | |
| 710 | 2 | |a National Research Council (U.S.) |b Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems |e Sonstige |4 oth | |
| 710 | 2 | |a National Research Council (U.S.) |b National Materials Advisory Board |e Sonstige |4 oth | |
| 710 | 2 | |a National Research Council (U.S.) |b Commission on Engineering and Technical Systems |e Sonstige |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druckausgabe |z 0-309-05885-6 |
| 776 | 0 | 8 | |i Erscheint auch als |n Druckausgabe |z 978-0-309-05885-8 |
| 856 | 4 | 0 | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507 |x Aggregator |3 Volltext |
| 912 | |a ZDB-4-EBA | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028558330 | ||
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507 |l FAW01 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507 |l FAW02 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804175576630558720 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV043134139 |
| collection | ZDB-4-EBA |
| ctrlnum | (OCoLC)53011051 (DE-599)BVBBV043134139 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02702nmm a2200505zc 4500</leader><controlfield tag="001">BV043134139</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">151126s1997 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0309059801</subfield><subfield code="c">Online version</subfield><subfield code="9">0-309-05980-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0585002509</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-585-00250-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780309059800</subfield><subfield code="c">Online version</subfield><subfield code="9">978-0-309-05980-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780585002507</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-0-585-00250-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)53011051</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043134139</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">21</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microelectromechanical systems</subfield><subfield code="b">advanced materials and fabrication methods</subfield><subfield code="c">Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Washington, DC</subfield><subfield code="b">National Academy Press</subfield><subfield code="c">1997</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xiv, 61 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references (pages 51-55)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microélectronique / Matériaux</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Micromachines / Conception et construction</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Microelectronics</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Digital</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectromechanical systems / Design and construction</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectronics / Materials</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">National Research Council (U.S.)</subfield><subfield code="b">Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">National Research Council (U.S.)</subfield><subfield code="b">National Materials Advisory Board</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">National Research Council (U.S.)</subfield><subfield code="b">Commission on Engineering and Technical Systems</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druckausgabe</subfield><subfield code="z">0-309-05885-6</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druckausgabe</subfield><subfield code="z">978-0-309-05885-8</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028558330</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV043134139 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:29Z |
| institution | BVB |
| isbn | 0309059801 0585002509 9780309059800 9780585002507 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028558330 |
| oclc_num | 53011051 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource (xiv, 61 pages) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | National Academy Press |
| record_format | marc |
| spelling | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council Washington, DC National Academy Press 1997 1 Online-Ressource (xiv, 61 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (pages 51-55) Microélectronique / Matériaux Micromachines / Conception et construction TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems / Design and construction fast Microelectronics / Materials fast Microelectronics Materials Microelectromechanical systems Design and construction National Research Council (U.S.) Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems Sonstige oth National Research Council (U.S.) National Materials Advisory Board Sonstige oth National Research Council (U.S.) Commission on Engineering and Technical Systems Sonstige oth Erscheint auch als Druckausgabe 0-309-05885-6 Erscheint auch als Druckausgabe 978-0-309-05885-8 http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507 Aggregator Volltext |
| spellingShingle | Microelectromechanical systems advanced materials and fabrication methods Microélectronique / Matériaux Micromachines / Conception et construction TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems / Design and construction fast Microelectronics / Materials fast Microelectronics Materials Microelectromechanical systems Design and construction |
| title | Microelectromechanical systems advanced materials and fabrication methods |
| title_auth | Microelectromechanical systems advanced materials and fabrication methods |
| title_exact_search | Microelectromechanical systems advanced materials and fabrication methods |
| title_full | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_fullStr | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_full_unstemmed | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_short | Microelectromechanical systems |
| title_sort | microelectromechanical systems advanced materials and fabrication methods |
| title_sub | advanced materials and fabrication methods |
| topic | Microélectronique / Matériaux Micromachines / Conception et construction TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems / Design and construction fast Microelectronics / Materials fast Microelectronics Materials Microelectromechanical systems Design and construction |
| topic_facet | Microélectronique / Matériaux Micromachines / Conception et construction TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Microelectromechanical systems / Design and construction Microelectronics / Materials Microelectronics Materials Microelectromechanical systems Design and construction |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=1507 |
| work_keys_str_mv | AT nationalresearchcounciluscommitteeonadvancedmaterialsandfabricationmethodsformicroelectromechanicalsystems microelectromechanicalsystemsadvancedmaterialsandfabricationmethods AT nationalresearchcouncilusnationalmaterialsadvisoryboard microelectromechanicalsystemsadvancedmaterialsandfabricationmethods AT nationalresearchcounciluscommissiononengineeringandtechnicalsystems microelectromechanicalsystemsadvancedmaterialsandfabricationmethods |