Acoustic wave and electromechanical resonators: concept to key applications
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Norwood, MA.
Artech House
©2010
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| Schriftenreihe: | Artech House integrated microsystems series
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| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Includes bibliographical references and index 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin |
| Beschreibung: | 1 Online-Ressource (xv, 345 pages) |
| ISBN: | 1607839784 9781607839781 |
Internformat
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| 264 | 1 | |a Norwood, MA. |b Artech House |c ©2010 | |
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| 500 | |a Includes bibliographical references and index | ||
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| 500 | |a This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin | ||
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| 650 | 7 | |a Acoustic surface wave devices |2 fast | |
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Datensatz im Suchindex
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| author | Campanella, Humberto |
| author_facet | Campanella, Humberto |
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| author_variant | h c hc |
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| ctrlnum | (OCoLC)659579814 (DE-599)BVBBV043130443 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043130443 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:22Z |
| institution | BVB |
| isbn | 1607839784 9781607839781 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028554634 |
| oclc_num | 659579814 |
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| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource (xv, 345 pages) |
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| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Artech House |
| record_format | marc |
| series2 | Artech House integrated microsystems series |
| spelling | Campanella, Humberto Verfasser aut Acoustic wave and electromechanical resonators concept to key applications Humberto Campanella Acoustic wave & electromechanical resonators Norwood, MA. Artech House ©2010 1 Online-Ressource (xv, 345 pages) txt rdacontent c rdamedia cr rdacarrier Artech House integrated microsystems series Includes bibliographical references and index 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin Engineering: Electrical Engineering TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Acoustic surface wave devices fast Electric resonators fast Ingenieurwissenschaften Acoustic surface wave devices Electric resonators http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=324514 Aggregator Volltext |
| spellingShingle | Campanella, Humberto Acoustic wave and electromechanical resonators concept to key applications Engineering: Electrical Engineering TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Acoustic surface wave devices fast Electric resonators fast Ingenieurwissenschaften Acoustic surface wave devices Electric resonators |
| title | Acoustic wave and electromechanical resonators concept to key applications |
| title_alt | Acoustic wave & electromechanical resonators |
| title_auth | Acoustic wave and electromechanical resonators concept to key applications |
| title_exact_search | Acoustic wave and electromechanical resonators concept to key applications |
| title_full | Acoustic wave and electromechanical resonators concept to key applications Humberto Campanella |
| title_fullStr | Acoustic wave and electromechanical resonators concept to key applications Humberto Campanella |
| title_full_unstemmed | Acoustic wave and electromechanical resonators concept to key applications Humberto Campanella |
| title_short | Acoustic wave and electromechanical resonators |
| title_sort | acoustic wave and electromechanical resonators concept to key applications |
| title_sub | concept to key applications |
| topic | Engineering: Electrical Engineering TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Acoustic surface wave devices fast Electric resonators fast Ingenieurwissenschaften Acoustic surface wave devices Electric resonators |
| topic_facet | Engineering: Electrical Engineering TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Acoustic surface wave devices Electric resonators Ingenieurwissenschaften |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=324514 |
| work_keys_str_mv | AT campanellahumberto acousticwaveandelectromechanicalresonatorsconcepttokeyapplications AT campanellahumberto acousticwaveelectromechanicalresonators |