Nanofabrication: fundamentals and applications
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Singapore
World Scientific
c2008
|
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Includes bibliographical references and index Ch. 1. Atom, molecule, and nanocluster manipulations for nanostructure fabrication using scanning probe microscopy / A.A. Tseng ... [et al.] -- ch. 2. Atomic force microscope lithography / N. Kawasegi ... [et al.] -- ch. 3. Scanning probe arrays for nanoscale imaging, sensing, and modification / C. Santschi ... [et al.] -- ch. 4. Using biomolecules for self-assembly of engineered nano-scale structures and devices / R. Mehta, J. Lund, and B.A. Parviz -- ch. 5. Nanofabrication based on self-assembled alumina templates / S. Sen and N.A. Kouklin -- ch. 6. Nanowire assembly and integration / Z. Gu and D.H. Gracias -- ch. 7. Taper-drawing fabrication of glass nanowires / L. Tong and E. Mazur -- ch. 8. Extreme ultraviolet lithography / H. Kinoshita -- ch. 9. Electron projection lithography / T. Miura ... [et al.] -- ch. 10. Electron beam direct writing / K. Yamazaki -- ch. 11. Electron beam induced deposition / K. Mitsuishi -- ch. 12. High-resolution electron-beam-induced deposition / P.A. Crozier and C.W. Hagen -- ch. 13. Focused ion beams and interaction with solids / T. Ishitani, T. Ohnishi, and T. Yaguchi -- ch. 14. Nano/microstructuring of ceramic surfaces by unconventional lithographic methods / R.C. Salvarezza and O. Azzaroni -- ch. 15. Alternative nanofabrication approaches for non-CMOS applications / C.V. Cojocaru, F. Cicoira, and F. Rosei -- ch. 16. Nanofabrication of nanoelectromechanical systems (NEMS): emerging techniques / K.L. Ekinci and J. Brugger Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices |
| Beschreibung: | 1 Online-Ressource (viii, 574 p.) |
| ISBN: | 1281933597 1613447787 9781281933591 9781613447789 9789812700766 9789812705426 9789812790897 9812700765 9812705422 9812790896 |
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| 500 | |a Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices | ||
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| id | DE-604.BV043129317 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:20Z |
| institution | BVB |
| isbn | 1281933597 1613447787 9781281933591 9781613447789 9789812700766 9789812705426 9789812790897 9812700765 9812705422 9812790896 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028553508 |
| oclc_num | 463076470 |
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| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource (viii, 574 p.) |
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| publishDate | 2008 |
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| publishDateSort | 2008 |
| publisher | World Scientific |
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| spelling | Nanofabrication fundamentals and applications editor, Ampere A. Tseng Singapore World Scientific c2008 1 Online-Ressource (viii, 574 p.) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Ch. 1. Atom, molecule, and nanocluster manipulations for nanostructure fabrication using scanning probe microscopy / A.A. Tseng ... [et al.] -- ch. 2. Atomic force microscope lithography / N. Kawasegi ... [et al.] -- ch. 3. Scanning probe arrays for nanoscale imaging, sensing, and modification / C. Santschi ... [et al.] -- ch. 4. Using biomolecules for self-assembly of engineered nano-scale structures and devices / R. Mehta, J. Lund, and B.A. Parviz -- ch. 5. Nanofabrication based on self-assembled alumina templates / S. Sen and N.A. Kouklin -- ch. 6. Nanowire assembly and integration / Z. Gu and D.H. Gracias -- ch. 7. Taper-drawing fabrication of glass nanowires / L. Tong and E. Mazur -- ch. 8. Extreme ultraviolet lithography / H. Kinoshita -- ch. 9. Electron projection lithography / T. Miura ... [et al.] -- ch. 10. Electron beam direct writing / K. Yamazaki -- ch. 11. Electron beam induced deposition / K. Mitsuishi -- ch. 12. High-resolution electron-beam-induced deposition / P.A. Crozier and C.W. Hagen -- ch. 13. Focused ion beams and interaction with solids / T. Ishitani, T. Ohnishi, and T. Yaguchi -- ch. 14. Nano/microstructuring of ceramic surfaces by unconventional lithographic methods / R.C. Salvarezza and O. Azzaroni -- ch. 15. Alternative nanofabrication approaches for non-CMOS applications / C.V. Cojocaru, F. Cicoira, and F. Rosei -- ch. 16. Nanofabrication of nanoelectromechanical systems (NEMS): emerging techniques / K.L. Ekinci and J. Brugger Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Nanostructured materials Nanostructures Scanning probe microscopy Lithography, Electron beam Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s 1\p DE-604 Tseng, A. A. Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=236096 Aggregator Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Nanofabrication fundamentals and applications TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Nanostructured materials Nanostructures Scanning probe microscopy Lithography, Electron beam Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4327470-5 |
| title | Nanofabrication fundamentals and applications |
| title_auth | Nanofabrication fundamentals and applications |
| title_exact_search | Nanofabrication fundamentals and applications |
| title_full | Nanofabrication fundamentals and applications editor, Ampere A. Tseng |
| title_fullStr | Nanofabrication fundamentals and applications editor, Ampere A. Tseng |
| title_full_unstemmed | Nanofabrication fundamentals and applications editor, Ampere A. Tseng |
| title_short | Nanofabrication |
| title_sort | nanofabrication fundamentals and applications |
| title_sub | fundamentals and applications |
| topic | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Nanostructured materials Nanostructures Scanning probe microscopy Lithography, Electron beam Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. Nanostructured materials Nanostructures Scanning probe microscopy Lithography, Electron beam Nanotechnologie |
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