Lithography: principles, processes, and materials
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
New York
Nova Science
c2011
|
| Series: | Engineering tools, techniques and tables
Nanotechnology science and technology series |
| Subjects: | |
| Online Access: | FAW01 FAW02 Volltext |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 1 Online-Ressource (xii, 284 p.) |
| ISBN: | 1611221234 1617618373 9781611221237 9781617618376 |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV043128383 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 151126s2011 |||| o||u| ||||||eng d | ||
| 020 | |a 1611221234 |c electronic bk. |9 1-61122-123-4 | ||
| 020 | |a 1617618373 |9 1-61761-837-3 | ||
| 020 | |a 9781611221237 |c electronic bk. |9 978-1-61122-123-7 | ||
| 020 | |a 9781617618376 |9 978-1-61761-837-6 | ||
| 035 | |a (OCoLC)726745731 | ||
| 035 | |a (DE-599)BVBBV043128383 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 |a DE-1047 | ||
| 082 | 0 | |a 621.3815/31 |2 22 | |
| 245 | 1 | 0 | |a Lithography |b principles, processes, and materials |c Theodore C. Hennessy, editor |
| 264 | 1 | |a New York |b Nova Science |c c2011 | |
| 300 | |a 1 Online-Ressource (xii, 284 p.) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Engineering tools, techniques and tables | |
| 490 | 0 | |a Nanotechnology science and technology series | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Circuits / General |2 bisacsh | |
| 650 | 7 | |a Microfabrication |2 fast | |
| 650 | 7 | |a Microlithography |2 fast | |
| 650 | 4 | |a Microlithography | |
| 650 | 4 | |a Microfabrication | |
| 700 | 1 | |a Hennessy, Theodore C. |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184 |x Aggregator |3 Volltext |
| 912 | |a ZDB-4-EBA | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028552574 | ||
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184 |l FAW01 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184 |l FAW02 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
Record in the Search Index
| _version_ | 1804175565150748672 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV043128383 |
| collection | ZDB-4-EBA |
| ctrlnum | (OCoLC)726745731 (DE-599)BVBBV043128383 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01852nmm a2200445zc 4500</leader><controlfield tag="001">BV043128383</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">151126s2011 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1611221234</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-61122-123-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1617618373</subfield><subfield code="9">1-61761-837-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781611221237</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-61122-123-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781617618376</subfield><subfield code="9">978-1-61761-837-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)726745731</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043128383</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/31</subfield><subfield code="2">22</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Lithography</subfield><subfield code="b">principles, processes, and materials</subfield><subfield code="c">Theodore C. Hennessy, editor</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">Nova Science</subfield><subfield code="c">c2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xii, 284 p.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Engineering tools, techniques and tables</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Nanotechnology science and technology series</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Circuits / General</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microfabrication</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microlithography</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microlithography</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microfabrication</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hennessy, Theodore C.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028552574</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV043128383 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:18Z |
| institution | BVB |
| isbn | 1611221234 1617618373 9781611221237 9781617618376 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028552574 |
| oclc_num | 726745731 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource (xii, 284 p.) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Nova Science |
| record_format | marc |
| series2 | Engineering tools, techniques and tables Nanotechnology science and technology series |
| spelling | Lithography principles, processes, and materials Theodore C. Hennessy, editor New York Nova Science c2011 1 Online-Ressource (xii, 284 p.) txt rdacontent c rdamedia cr rdacarrier Engineering tools, techniques and tables Nanotechnology science and technology series Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microfabrication fast Microlithography fast Microlithography Microfabrication Hennessy, Theodore C. Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184 Aggregator Volltext |
| spellingShingle | Lithography principles, processes, and materials TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microfabrication fast Microlithography fast Microlithography Microfabrication |
| title | Lithography principles, processes, and materials |
| title_auth | Lithography principles, processes, and materials |
| title_exact_search | Lithography principles, processes, and materials |
| title_full | Lithography principles, processes, and materials Theodore C. Hennessy, editor |
| title_fullStr | Lithography principles, processes, and materials Theodore C. Hennessy, editor |
| title_full_unstemmed | Lithography principles, processes, and materials Theodore C. Hennessy, editor |
| title_short | Lithography |
| title_sort | lithography principles processes and materials |
| title_sub | principles, processes, and materials |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microfabrication fast Microlithography fast Microlithography Microfabrication |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General Microfabrication Microlithography |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184 |
| work_keys_str_mv | AT hennessytheodorec lithographyprinciplesprocessesandmaterials |