Lithography: principles, processes, and materials
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York
Nova Science
c2011
|
| Schriftenreihe: | Engineering tools, techniques and tables
Nanotechnology science and technology series |
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 Online-Ressource (xii, 284 p.) |
| ISBN: | 1611221234 1617618373 9781611221237 9781617618376 |
Internformat
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043128383 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:18Z |
| institution | BVB |
| isbn | 1611221234 1617618373 9781611221237 9781617618376 |
| language | English |
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| physical | 1 Online-Ressource (xii, 284 p.) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Nova Science |
| record_format | marc |
| series2 | Engineering tools, techniques and tables Nanotechnology science and technology series |
| spelling | Lithography principles, processes, and materials Theodore C. Hennessy, editor New York Nova Science c2011 1 Online-Ressource (xii, 284 p.) txt rdacontent c rdamedia cr rdacarrier Engineering tools, techniques and tables Nanotechnology science and technology series Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microfabrication fast Microlithography fast Microlithography Microfabrication Hennessy, Theodore C. Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=367184 Aggregator Volltext |
| spellingShingle | Lithography principles, processes, and materials TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microfabrication fast Microlithography fast Microlithography Microfabrication |
| title | Lithography principles, processes, and materials |
| title_auth | Lithography principles, processes, and materials |
| title_exact_search | Lithography principles, processes, and materials |
| title_full | Lithography principles, processes, and materials Theodore C. Hennessy, editor |
| title_fullStr | Lithography principles, processes, and materials Theodore C. Hennessy, editor |
| title_full_unstemmed | Lithography principles, processes, and materials Theodore C. Hennessy, editor |
| title_short | Lithography |
| title_sort | lithography principles processes and materials |
| title_sub | principles, processes, and materials |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microfabrication fast Microlithography fast Microlithography Microfabrication |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General Microfabrication Microlithography |
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