SIMOX:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
London
Institution of Electrical Engineers
©2004
|
| Schriftenreihe: | EMIS processing series
no. 4 |
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002 Includes bibliographical references and index Introduction - M.J. Anc -- - Overview of SIMOX technology: historical perspective - K. Izumi -- - Fundamental processes in SIMOX layer formation: ion implantation and oxide growth - P.L.F. Hemment -- - SIMOX/SOI processes: flexibility based on thermodynamic considerations - A. Ogura -- - Electrical and optical characterisation of SIMOX substrates - H. Hovel -- - SIMOX material technology from R & D to advanced products - D.K. Sadana This volume on SIMOX includes an historical perspective of SIMOX developments, fundamental formation mechanisms and emerging techniques, along with SOI material characterisation methods and results, technological processes from RandD to advanced applications and a brief overview of VLSI circuit applications |
| Beschreibung: | 1 Online-Ressource (xvi, 143 pages) |
| ISBN: | 086341334X 184919064X 9780863413346 9781849190640 |
Internformat
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| 500 | |a This volume on SIMOX includes an historical perspective of SIMOX developments, fundamental formation mechanisms and emerging techniques, along with SOI material characterisation methods and results, technological processes from RandD to advanced applications and a brief overview of VLSI circuit applications | ||
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| 700 | 1 | |a Anc, Maria J. |e Sonstige |4 oth | |
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| dewey-search | 621.31937 |
| dewey-sort | 3621.31937 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043098769 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:17:22Z |
| institution | BVB |
| isbn | 086341334X 184919064X 9780863413346 9781849190640 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028522960 |
| oclc_num | 460736336 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource (xvi, 143 pages) |
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| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Institution of Electrical Engineers |
| record_format | marc |
| series2 | EMIS processing series |
| spelling | SIMOX edited by Maria J. Anc London Institution of Electrical Engineers ©2004 1 Online-Ressource (xvi, 143 pages) txt rdacontent c rdamedia cr rdacarrier EMIS processing series no. 4 Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002 Includes bibliographical references and index Introduction - M.J. Anc -- - Overview of SIMOX technology: historical perspective - K. Izumi -- - Fundamental processes in SIMOX layer formation: ion implantation and oxide growth - P.L.F. Hemment -- - SIMOX/SOI processes: flexibility based on thermodynamic considerations - A. Ogura -- - Electrical and optical characterisation of SIMOX substrates - H. Hovel -- - SIMOX material technology from R & D to advanced products - D.K. Sadana This volume on SIMOX includes an historical perspective of SIMOX developments, fundamental formation mechanisms and emerging techniques, along with SOI material characterisation methods and results, technological processes from RandD to advanced applications and a brief overview of VLSI circuit applications Silicium sur isolant TECHNOLOGY & ENGINEERING / Electrical bisacsh Silicon-on-insulator technology fast Silicon-on-insulator technology Anc, Maria J. Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=292234 Aggregator Volltext |
| spellingShingle | SIMOX Silicium sur isolant TECHNOLOGY & ENGINEERING / Electrical bisacsh Silicon-on-insulator technology fast Silicon-on-insulator technology |
| title | SIMOX |
| title_auth | SIMOX |
| title_exact_search | SIMOX |
| title_full | SIMOX edited by Maria J. Anc |
| title_fullStr | SIMOX edited by Maria J. Anc |
| title_full_unstemmed | SIMOX edited by Maria J. Anc |
| title_short | SIMOX |
| title_sort | simox |
| topic | Silicium sur isolant TECHNOLOGY & ENGINEERING / Electrical bisacsh Silicon-on-insulator technology fast Silicon-on-insulator technology |
| topic_facet | Silicium sur isolant TECHNOLOGY & ENGINEERING / Electrical Silicon-on-insulator technology |
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