Nanofabrication using focused ion and electron beams: principles and applications
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Oxford
Oxford University Press
2011
|
| Schriftenreihe: | Nanomanufacturing series
v. 1 |
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Cover; Contents; Foreword; Preface; Contributors; INTRODUCTION; I-1. The Historical Development of Electron Beam Induced Deposition and Etching: From Carbonaceous to Functional Materials; I-2. Historical Evolution of FIB Instrumentation and Technology: From Circuit Editing to Nanoprototyping; PART I: FUNDAMENTALS AND MODELS; 1. The Theory of Bright Field Electron and Field Ion Emission Sources; 2. How to Select Compounds for Focused Charged Particle Beam Assisted Etching and Deposition; 3. Gas Injection Systems for FEB and FIB Processing Theory and Experiment Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr |
| Beschreibung: | 1 Online-Ressource |
| ISBN: | 0199734216 0199920990 9780199734214 9780199920990 |
Internformat
MARC
| LEADER | 00000nmm a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV043080893 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 151126s2011 |||| o||u| ||||||eng d | ||
| 020 | |a 0199734216 |9 0-19-973421-6 | ||
| 020 | |a 0199920990 |c electronic bk. |9 0-19-992099-0 | ||
| 020 | |a 9780199734214 |9 978-0-19-973421-4 | ||
| 020 | |a 9780199920990 |c electronic bk. |9 978-0-19-992099-0 | ||
| 035 | |a (OCoLC)777268040 | ||
| 035 | |a (DE-599)BVBBV043080893 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 |a DE-1047 | ||
| 082 | 0 | |a 620.1/15 |2 23 | |
| 245 | 1 | 0 | |a Nanofabrication using focused ion and electron beams |b principles and applications |c edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| 264 | 1 | |a Oxford |b Oxford University Press |c 2011 | |
| 300 | |a 1 Online-Ressource | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Nanomanufacturing series |v v. 1 | |
| 500 | |a Cover; Contents; Foreword; Preface; Contributors; INTRODUCTION; I-1. The Historical Development of Electron Beam Induced Deposition and Etching: From Carbonaceous to Functional Materials; I-2. Historical Evolution of FIB Instrumentation and Technology: From Circuit Editing to Nanoprototyping; PART I: FUNDAMENTALS AND MODELS; 1. The Theory of Bright Field Electron and Field Ion Emission Sources; 2. How to Select Compounds for Focused Charged Particle Beam Assisted Etching and Deposition; 3. Gas Injection Systems for FEB and FIB Processing Theory and Experiment | ||
| 500 | |a Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Material Science |2 bisacsh | |
| 650 | 7 | |a Electron beams / Industrial applications |2 fast | |
| 650 | 7 | |a Ion bombardment / Industrial applications |2 fast | |
| 650 | 7 | |a Nanostructured materials |2 fast | |
| 650 | 7 | |a Nanotechnology |2 fast | |
| 650 | 4 | |a Nanostructured materials | |
| 650 | 4 | |a Nanotechnology | |
| 650 | 4 | |a Electron beams |x Industrial applications | |
| 650 | 4 | |a Ion bombardment |x Industrial applications | |
| 700 | 1 | |a Utke, Ivo |e Sonstige |4 oth | |
| 700 | 1 | |a Moshkalev, Stanislav |e Sonstige |4 oth | |
| 700 | 1 | |a Russell, Phillip |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=434470 |x Aggregator |3 Volltext |
| 912 | |a ZDB-4-EBA | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028505085 | ||
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=434470 |l FAW01 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=434470 |l FAW02 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804175473036492800 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV043080893 |
| collection | ZDB-4-EBA |
| ctrlnum | (OCoLC)777268040 (DE-599)BVBBV043080893 |
| dewey-full | 620.1/15 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.1/15 |
| dewey-search | 620.1/15 |
| dewey-sort | 3620.1 215 |
| dewey-tens | 620 - Engineering and allied operations |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03293nmm a2200517zcb4500</leader><controlfield tag="001">BV043080893</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">151126s2011 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0199734216</subfield><subfield code="9">0-19-973421-6</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0199920990</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-19-992099-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780199734214</subfield><subfield code="9">978-0-19-973421-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780199920990</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-0-19-992099-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)777268040</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043080893</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.1/15</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Nanofabrication using focused ion and electron beams</subfield><subfield code="b">principles and applications</subfield><subfield code="c">edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford</subfield><subfield code="b">Oxford University Press</subfield><subfield code="c">2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Nanomanufacturing series</subfield><subfield code="v">v. 1</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Cover; Contents; Foreword; Preface; Contributors; INTRODUCTION; I-1. The Historical Development of Electron Beam Induced Deposition and Etching: From Carbonaceous to Functional Materials; I-2. Historical Evolution of FIB Instrumentation and Technology: From Circuit Editing to Nanoprototyping; PART I: FUNDAMENTALS AND MODELS; 1. The Theory of Bright Field Electron and Field Ion Emission Sources; 2. How to Select Compounds for Focused Charged Particle Beam Assisted Etching and Deposition; 3. Gas Injection Systems for FEB and FIB Processing Theory and Experiment</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Material Science</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Electron beams / Industrial applications</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Ion bombardment / Industrial applications</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Nanostructured materials</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Nanotechnology</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructured materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanotechnology</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electron beams</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion bombardment</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Utke, Ivo</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Moshkalev, Stanislav</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Russell, Phillip</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=434470</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028505085</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=434470</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=434470</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV043080893 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:16:50Z |
| institution | BVB |
| isbn | 0199734216 0199920990 9780199734214 9780199920990 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028505085 |
| oclc_num | 777268040 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Oxford University Press |
| record_format | marc |
| series2 | Nanomanufacturing series |
| spelling | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell Oxford Oxford University Press 2011 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Nanomanufacturing series v. 1 Cover; Contents; Foreword; Preface; Contributors; INTRODUCTION; I-1. The Historical Development of Electron Beam Induced Deposition and Etching: From Carbonaceous to Functional Materials; I-2. Historical Evolution of FIB Instrumentation and Technology: From Circuit Editing to Nanoprototyping; PART I: FUNDAMENTALS AND MODELS; 1. The Theory of Bright Field Electron and Field Ion Emission Sources; 2. How to Select Compounds for Focused Charged Particle Beam Assisted Etching and Deposition; 3. Gas Injection Systems for FEB and FIB Processing Theory and Experiment Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr TECHNOLOGY & ENGINEERING / Material Science bisacsh Electron beams / Industrial applications fast Ion bombardment / Industrial applications fast Nanostructured materials fast Nanotechnology fast Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications Utke, Ivo Sonstige oth Moshkalev, Stanislav Sonstige oth Russell, Phillip Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=434470 Aggregator Volltext |
| spellingShingle | Nanofabrication using focused ion and electron beams principles and applications TECHNOLOGY & ENGINEERING / Material Science bisacsh Electron beams / Industrial applications fast Ion bombardment / Industrial applications fast Nanostructured materials fast Nanotechnology fast Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
| title | Nanofabrication using focused ion and electron beams principles and applications |
| title_auth | Nanofabrication using focused ion and electron beams principles and applications |
| title_exact_search | Nanofabrication using focused ion and electron beams principles and applications |
| title_full | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_fullStr | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_full_unstemmed | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_short | Nanofabrication using focused ion and electron beams |
| title_sort | nanofabrication using focused ion and electron beams principles and applications |
| title_sub | principles and applications |
| topic | TECHNOLOGY & ENGINEERING / Material Science bisacsh Electron beams / Industrial applications fast Ion bombardment / Industrial applications fast Nanostructured materials fast Nanotechnology fast Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
| topic_facet | TECHNOLOGY & ENGINEERING / Material Science Electron beams / Industrial applications Ion bombardment / Industrial applications Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=434470 |
| work_keys_str_mv | AT utkeivo nanofabricationusingfocusedionandelectronbeamsprinciplesandapplications AT moshkalevstanislav nanofabricationusingfocusedionandelectronbeamsprinciplesandapplications AT russellphillip nanofabricationusingfocusedionandelectronbeamsprinciplesandapplications |