Soft x-rays and extreme ultraviolet radiation: principles and applications
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cambridge
Cambridge University Press
2000
|
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Includes bibliographical references and index Ch. 1 - Introduction -- - Ch. 2 - Radiation and scattering at EUV and soft x-ray wavelengths -- - Ch. 3 - Wave propagation and refractive index at EUV and soft x-ray wavelengths -- - Ch. 4 - Multilayer interference coatings -- - Ch. 5 - Synchrotron radiation -- - Ch. 6 - Physics of hot dense plasmas -- - Ch. 7 - Extreme ultraviolet and soft x-ray lasers -- - Ch. 8 - Coherence at short wavelengths -- - Ch. 9 - Soft x-ray microscopy with diffractive optics -- - Ch. 10 - Extreme ultraviolet and x-ray lithography "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--BOOK JACKET. |
| Beschreibung: | 1 Online-Ressource (xvi, 470 p.) |
| ISBN: | 0521652146 1139164422 1139648934 9780521652148 9781139164429 9781139648936 |
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| 500 | |a Includes bibliographical references and index | ||
| 500 | |a Ch. 1 - Introduction -- - Ch. 2 - Radiation and scattering at EUV and soft x-ray wavelengths -- - Ch. 3 - Wave propagation and refractive index at EUV and soft x-ray wavelengths -- - Ch. 4 - Multilayer interference coatings -- - Ch. 5 - Synchrotron radiation -- - Ch. 6 - Physics of hot dense plasmas -- - Ch. 7 - Extreme ultraviolet and soft x-ray lasers -- - Ch. 8 - Coherence at short wavelengths -- - Ch. 9 - Soft x-ray microscopy with diffractive optics -- - Ch. 10 - Extreme ultraviolet and x-ray lithography | ||
| 500 | |a "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--BOOK JACKET. | ||
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| 650 | 4 | |a Ultraviolet radiation / Industrial applications | |
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Datensatz im Suchindex
| _version_ | 1804175431832698880 |
|---|---|
| any_adam_object | |
| author | Attwood, David T. |
| author_facet | Attwood, David T. |
| author_role | aut |
| author_sort | Attwood, David T. |
| author_variant | d t a dt dta |
| building | Verbundindex |
| bvnumber | BV043058503 |
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| dewey-full | 539.7/222 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 539 - Modern physics |
| dewey-raw | 539.7/222 |
| dewey-search | 539.7/222 |
| dewey-sort | 3539.7 3222 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| format | Electronic eBook |
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| id | DE-604.BV043058503 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:16:11Z |
| institution | BVB |
| isbn | 0521652146 1139164422 1139648934 9780521652148 9781139164429 9781139648936 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028482695 |
| oclc_num | 818666348 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource (xvi, 470 p.) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Cambridge University Press |
| record_format | marc |
| spelling | Attwood, David T. Verfasser aut Soft x-rays and extreme ultraviolet radiation principles and applications David Attwood Cambridge Cambridge University Press 2000 1 Online-Ressource (xvi, 470 p.) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Ch. 1 - Introduction -- - Ch. 2 - Radiation and scattering at EUV and soft x-ray wavelengths -- - Ch. 3 - Wave propagation and refractive index at EUV and soft x-ray wavelengths -- - Ch. 4 - Multilayer interference coatings -- - Ch. 5 - Synchrotron radiation -- - Ch. 6 - Physics of hot dense plasmas -- - Ch. 7 - Extreme ultraviolet and soft x-ray lasers -- - Ch. 8 - Coherence at short wavelengths -- - Ch. 9 - Soft x-ray microscopy with diffractive optics -- - Ch. 10 - Extreme ultraviolet and x-ray lithography "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--BOOK JACKET. Grenz rays / Industrial applications Ultraviolet radiation / Industrial applications Rayons limite Rayonnement ultraviolet Extremes Ultraviolett swd Weiche Röntgenstrahlung swd Rayonnement ultraviolet ram Rayons X. ram SCIENCE / Physics / Nuclear bisacsh Grenz rays fast Ultraviolet radiation fast Grenz rays Ultraviolet radiation Extremes Ultraviolett (DE-588)4264163-9 gnd rswk-swf Weiche Röntgenstrahlung (DE-588)4189406-6 gnd rswk-swf Weiche Röntgenstrahlung (DE-588)4189406-6 s 1\p DE-604 Extremes Ultraviolett (DE-588)4264163-9 s 2\p DE-604 http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=510939 Aggregator Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Attwood, David T. Soft x-rays and extreme ultraviolet radiation principles and applications Grenz rays / Industrial applications Ultraviolet radiation / Industrial applications Rayons limite Rayonnement ultraviolet Extremes Ultraviolett swd Weiche Röntgenstrahlung swd Rayonnement ultraviolet ram Rayons X. ram SCIENCE / Physics / Nuclear bisacsh Grenz rays fast Ultraviolet radiation fast Grenz rays Ultraviolet radiation Extremes Ultraviolett (DE-588)4264163-9 gnd Weiche Röntgenstrahlung (DE-588)4189406-6 gnd |
| subject_GND | (DE-588)4264163-9 (DE-588)4189406-6 |
| title | Soft x-rays and extreme ultraviolet radiation principles and applications |
| title_auth | Soft x-rays and extreme ultraviolet radiation principles and applications |
| title_exact_search | Soft x-rays and extreme ultraviolet radiation principles and applications |
| title_full | Soft x-rays and extreme ultraviolet radiation principles and applications David Attwood |
| title_fullStr | Soft x-rays and extreme ultraviolet radiation principles and applications David Attwood |
| title_full_unstemmed | Soft x-rays and extreme ultraviolet radiation principles and applications David Attwood |
| title_short | Soft x-rays and extreme ultraviolet radiation |
| title_sort | soft x rays and extreme ultraviolet radiation principles and applications |
| title_sub | principles and applications |
| topic | Grenz rays / Industrial applications Ultraviolet radiation / Industrial applications Rayons limite Rayonnement ultraviolet Extremes Ultraviolett swd Weiche Röntgenstrahlung swd Rayonnement ultraviolet ram Rayons X. ram SCIENCE / Physics / Nuclear bisacsh Grenz rays fast Ultraviolet radiation fast Grenz rays Ultraviolet radiation Extremes Ultraviolett (DE-588)4264163-9 gnd Weiche Röntgenstrahlung (DE-588)4189406-6 gnd |
| topic_facet | Grenz rays / Industrial applications Ultraviolet radiation / Industrial applications Rayons limite Rayonnement ultraviolet Extremes Ultraviolett Weiche Röntgenstrahlung Rayons X. SCIENCE / Physics / Nuclear Grenz rays Ultraviolet radiation |
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