Metallic oxynitride thin films by reactive sputtering and related deposition methods: processes, properties and applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Sharjah
Bentham Science Publishers
2013
|
| Subjects: | |
| Online Access: | FAW01 FAW02 Volltext |
| Item Description: | Print version record |
| Physical Description: | 1 online resource (363 pages) |
| ISBN: | 1608051560 9781608051564 |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV043033148 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 151120s2013 |||| o||u| ||||||eng d | ||
| 020 | |a 1608051560 |9 1-60805-156-0 | ||
| 020 | |a 9781608051564 |9 978-1-60805-156-4 | ||
| 035 | |a (OCoLC)854975260 | ||
| 035 | |a (DE-599)BVBBV043033148 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 |a DE-1047 | ||
| 082 | 0 | |a 621.3815/2 |2 23 | |
| 100 | 1 | |a Vaz, Filipe |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Metallic oxynitride thin films by reactive sputtering and related deposition methods |b processes, properties and applications |c Filipe Vaz |
| 264 | 1 | |a Sharjah |b Bentham Science Publishers |c 2013 | |
| 300 | |a 1 online resource (363 pages) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Print version record | ||
| 505 | 8 | |a This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Mechanical |2 bisacsh | |
| 650 | 7 | |a Thin films |2 fast | |
| 650 | 4 | |a Thin films | |
| 700 | 1 | |a Martin, Nicolas |e Sonstige |4 oth | |
| 700 | 1 | |a Fenker, Martin |e Sonstige |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |a Vaz, Filipe |t Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods : Processes, Properties and Applications |
| 856 | 4 | 0 | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=606313 |x Aggregator |3 Volltext |
| 912 | |a ZDB-4-EBA | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028457798 | ||
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=606313 |l FAW01 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=606313 |l FAW02 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
Record in the Search Index
| _version_ | 1804175390944526336 |
|---|---|
| any_adam_object | |
| author | Vaz, Filipe |
| author_facet | Vaz, Filipe |
| author_role | aut |
| author_sort | Vaz, Filipe |
| author_variant | f v fv |
| building | Verbundindex |
| bvnumber | BV043033148 |
| collection | ZDB-4-EBA |
| contents | This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes |
| ctrlnum | (OCoLC)854975260 (DE-599)BVBBV043033148 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02047nmm a2200421zc 4500</leader><controlfield tag="001">BV043033148</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">151120s2013 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1608051560</subfield><subfield code="9">1-60805-156-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781608051564</subfield><subfield code="9">978-1-60805-156-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)854975260</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043033148</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">23</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Vaz, Filipe</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Metallic oxynitride thin films by reactive sputtering and related deposition methods</subfield><subfield code="b">processes, properties and applications</subfield><subfield code="c">Filipe Vaz</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Sharjah</subfield><subfield code="b">Bentham Science Publishers</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (363 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Print version record</subfield></datafield><datafield tag="505" ind1="8" ind2=" "><subfield code="a">This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Mechanical</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Thin films</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Martin, Nicolas</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Fenker, Martin</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="a">Vaz, Filipe</subfield><subfield code="t">Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods : Processes, Properties and Applications</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=606313</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028457798</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=606313</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=606313</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV043033148 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:15:32Z |
| institution | BVB |
| isbn | 1608051560 9781608051564 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028457798 |
| oclc_num | 854975260 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 online resource (363 pages) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Bentham Science Publishers |
| record_format | marc |
| spelling | Vaz, Filipe Verfasser aut Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications Filipe Vaz Sharjah Bentham Science Publishers 2013 1 online resource (363 pages) txt rdacontent c rdamedia cr rdacarrier Print version record This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin films fast Thin films Martin, Nicolas Sonstige oth Fenker, Martin Sonstige oth Erscheint auch als Druck-Ausgabe Vaz, Filipe Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods : Processes, Properties and Applications http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=606313 Aggregator Volltext |
| spellingShingle | Vaz, Filipe Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin films fast Thin films |
| title | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications |
| title_auth | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications |
| title_exact_search | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications |
| title_full | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications Filipe Vaz |
| title_fullStr | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications Filipe Vaz |
| title_full_unstemmed | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications Filipe Vaz |
| title_short | Metallic oxynitride thin films by reactive sputtering and related deposition methods |
| title_sort | metallic oxynitride thin films by reactive sputtering and related deposition methods processes properties and applications |
| title_sub | processes, properties and applications |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin films fast Thin films |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Thin films |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=606313 |
| work_keys_str_mv | AT vazfilipe metallicoxynitridethinfilmsbyreactivesputteringandrelateddepositionmethodsprocessespropertiesandapplications AT martinnicolas metallicoxynitridethinfilmsbyreactivesputteringandrelateddepositionmethodsprocessespropertiesandapplications AT fenkermartin metallicoxynitridethinfilmsbyreactivesputteringandrelateddepositionmethodsprocessespropertiesandapplications |