Ultra clean processing of semiconductor surfaces XI: selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Durnten-Zurich, Switzerland
Trans Tech Publications Ltd.
[2013]
|
| Schriftenreihe: | Diffusion and defect data
v. 195 |
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Description based on online resource; title from PDF title page (ebrary, viewed November 1, 2013) Paralleltitel: UCPSS 2012 |
| Beschreibung: | 1 online resource (328 pages) illustrations (black and white) |
| ISBN: | 1628700262 3038139084 9781628700268 9783038139089 |
Internformat
MARC
| LEADER | 00000nmm a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV043031593 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 151120s2013 |||| o||u| ||||||eng d | ||
| 020 | |a 1628700262 |c electronic bk. |9 1-62870-026-2 | ||
| 020 | |a 3038139084 |c electronic bk. |9 3-03813-908-4 | ||
| 020 | |a 9781628700268 |c electronic bk. |9 978-1-62870-026-8 | ||
| 020 | |a 9783038139089 |c electronic bk. |9 978-3-03813-908-9 | ||
| 035 | |a (OCoLC)868960708 | ||
| 035 | |a (DE-599)BVBBV043031593 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 |a DE-1047 | ||
| 082 | 0 | |a 537.622 |2 23 | |
| 110 | 2 | |a International Symposium on Ultra Clean Processing of Semiconductor Surfaces < 2012, Ghent, Belgium> |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Ultra clean processing of semiconductor surfaces XI |b selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium |c edited by Paul Mertens, Marc Meuris and Marc Heyns |
| 246 | 1 | 3 | |a UCPSS 2012 |
| 264 | 1 | |a Durnten-Zurich, Switzerland |b Trans Tech Publications Ltd. |c [2013] | |
| 264 | 4 | |c © 2013 | |
| 300 | |a 1 online resource (328 pages) |b illustrations (black and white) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Diffusion and defect data |v v. 195 | |
| 500 | |a Description based on online resource; title from PDF title page (ebrary, viewed November 1, 2013) | ||
| 500 | |a Paralleltitel: UCPSS 2012 | ||
| 650 | 7 | |a SCIENCE / Physics / Electricity |2 bisacsh | |
| 650 | 7 | |a SCIENCE / Physics / Electromagnetism |2 bisacsh | |
| 650 | 7 | |a Electrical engineering |2 fast | |
| 650 | 7 | |a Semiconductors / Surfaces |2 fast | |
| 650 | 4 | |a Electrical engineering |v Congresses | |
| 650 | 4 | |a Semiconductors |x Surfaces |v Congresses | |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Oberflächenreinigung |0 (DE-588)4204243-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Oberflächenreinigung |0 (DE-588)4204243-4 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Heyns, Marc |e Sonstige |4 oth | |
| 700 | 1 | |a Mertens, Paul |e Sonstige |4 oth | |
| 700 | 1 | |a Meuris, Marc |e Sonstige |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |a Ultra clean processing of semiconductor surfaces XI. |
| 776 | 0 | 8 | |i Erscheint auch als |n Druckausgabe |z 3-03785-527-4 |
| 776 | 0 | 8 | |i Erscheint auch als |n Druckausgabe |z 978-3-03785-527-0 |
| 856 | 4 | 0 | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=646329 |x Aggregator |3 Volltext |
| 912 | |a ZDB-4-EBA | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028456244 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=646329 |l FAW01 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=646329 |l FAW02 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804175388222423040 |
|---|---|
| any_adam_object | |
| author_corporate | International Symposium on Ultra Clean Processing of Semiconductor Surfaces < 2012, Ghent, Belgium> |
| author_corporate_role | aut |
| author_facet | International Symposium on Ultra Clean Processing of Semiconductor Surfaces < 2012, Ghent, Belgium> |
| author_sort | International Symposium on Ultra Clean Processing of Semiconductor Surfaces < 2012, Ghent, Belgium> |
| building | Verbundindex |
| bvnumber | BV043031593 |
| collection | ZDB-4-EBA |
| ctrlnum | (OCoLC)868960708 (DE-599)BVBBV043031593 |
| dewey-full | 537.622 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 537 - Electricity and electronics |
| dewey-raw | 537.622 |
| dewey-search | 537.622 |
| dewey-sort | 3537.622 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03170nmm a2200637zcb4500</leader><controlfield tag="001">BV043031593</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">151120s2013 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1628700262</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-62870-026-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3038139084</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">3-03813-908-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781628700268</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-62870-026-8</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783038139089</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-3-03813-908-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)868960708</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043031593</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">537.622</subfield><subfield code="2">23</subfield></datafield><datafield tag="110" ind1="2" ind2=" "><subfield code="a">International Symposium on Ultra Clean Processing of Semiconductor Surfaces < 2012, Ghent, Belgium></subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ultra clean processing of semiconductor surfaces XI</subfield><subfield code="b">selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium</subfield><subfield code="c">edited by Paul Mertens, Marc Meuris and Marc Heyns</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">UCPSS 2012</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Durnten-Zurich, Switzerland</subfield><subfield code="b">Trans Tech Publications Ltd.</subfield><subfield code="c">[2013]</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">© 2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (328 pages)</subfield><subfield code="b">illustrations (black and white)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Diffusion and defect data</subfield><subfield code="v">v. 195</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Description based on online resource; title from PDF title page (ebrary, viewed November 1, 2013)</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Paralleltitel: UCPSS 2012</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Physics / Electricity</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Physics / Electromagnetism</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Electrical engineering</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconductors / Surfaces</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electrical engineering</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Surfaces</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Oberflächenreinigung</subfield><subfield code="0">(DE-588)4204243-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Oberflächenreinigung</subfield><subfield code="0">(DE-588)4204243-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Heyns, Marc</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mertens, Paul</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Meuris, Marc</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="a">Ultra clean processing of semiconductor surfaces XI.</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druckausgabe</subfield><subfield code="z">3-03785-527-4</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druckausgabe</subfield><subfield code="z">978-3-03785-527-0</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=646329</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028456244</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=646329</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=646329</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV043031593 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:15:29Z |
| institution | BVB |
| isbn | 1628700262 3038139084 9781628700268 9783038139089 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028456244 |
| oclc_num | 868960708 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 online resource (328 pages) illustrations (black and white) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Trans Tech Publications Ltd. |
| record_format | marc |
| series2 | Diffusion and defect data |
| spelling | International Symposium on Ultra Clean Processing of Semiconductor Surfaces < 2012, Ghent, Belgium> Verfasser aut Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium edited by Paul Mertens, Marc Meuris and Marc Heyns UCPSS 2012 Durnten-Zurich, Switzerland Trans Tech Publications Ltd. [2013] © 2013 1 online resource (328 pages) illustrations (black and white) txt rdacontent c rdamedia cr rdacarrier Diffusion and defect data v. 195 Description based on online resource; title from PDF title page (ebrary, viewed November 1, 2013) Paralleltitel: UCPSS 2012 SCIENCE / Physics / Electricity bisacsh SCIENCE / Physics / Electromagnetism bisacsh Electrical engineering fast Semiconductors / Surfaces fast Electrical engineering Congresses Semiconductors Surfaces Congresses Halbleiter (DE-588)4022993-2 gnd rswk-swf Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s Oberflächenreinigung (DE-588)4204243-4 s 1\p DE-604 Heyns, Marc Sonstige oth Mertens, Paul Sonstige oth Meuris, Marc Sonstige oth Erscheint auch als Druck-Ausgabe Ultra clean processing of semiconductor surfaces XI. Erscheint auch als Druckausgabe 3-03785-527-4 Erscheint auch als Druckausgabe 978-3-03785-527-0 http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=646329 Aggregator Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium SCIENCE / Physics / Electricity bisacsh SCIENCE / Physics / Electromagnetism bisacsh Electrical engineering fast Semiconductors / Surfaces fast Electrical engineering Congresses Semiconductors Surfaces Congresses Halbleiter (DE-588)4022993-2 gnd Oberflächenreinigung (DE-588)4204243-4 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4204243-4 (DE-588)1071861417 |
| title | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium |
| title_alt | UCPSS 2012 |
| title_auth | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium |
| title_exact_search | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium |
| title_full | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium edited by Paul Mertens, Marc Meuris and Marc Heyns |
| title_fullStr | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium edited by Paul Mertens, Marc Meuris and Marc Heyns |
| title_full_unstemmed | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium edited by Paul Mertens, Marc Meuris and Marc Heyns |
| title_short | Ultra clean processing of semiconductor surfaces XI |
| title_sort | ultra clean processing of semiconductor surfaces xi selected peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces ucpss september 17 19 2012 gent belgium |
| title_sub | selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium |
| topic | SCIENCE / Physics / Electricity bisacsh SCIENCE / Physics / Electromagnetism bisacsh Electrical engineering fast Semiconductors / Surfaces fast Electrical engineering Congresses Semiconductors Surfaces Congresses Halbleiter (DE-588)4022993-2 gnd Oberflächenreinigung (DE-588)4204243-4 gnd |
| topic_facet | SCIENCE / Physics / Electricity SCIENCE / Physics / Electromagnetism Electrical engineering Semiconductors / Surfaces Electrical engineering Congresses Semiconductors Surfaces Congresses Halbleiter Oberflächenreinigung Konferenzschrift |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=646329 |
| work_keys_str_mv | AT internationalsymposiumonultracleanprocessingofsemiconductorsurfaces2012ghentbelgium ultracleanprocessingofsemiconductorsurfacesxiselectedpeerreviewedpapersfromthe11thinternationalsymposiumonultracleanprocessingofsemiconductorsurfacesucpssseptember17192012gentbelgium AT heynsmarc ultracleanprocessingofsemiconductorsurfacesxiselectedpeerreviewedpapersfromthe11thinternationalsymposiumonultracleanprocessingofsemiconductorsurfacesucpssseptember17192012gentbelgium AT mertenspaul ultracleanprocessingofsemiconductorsurfacesxiselectedpeerreviewedpapersfromthe11thinternationalsymposiumonultracleanprocessingofsemiconductorsurfacesucpssseptember17192012gentbelgium AT meurismarc ultracleanprocessingofsemiconductorsurfacesxiselectedpeerreviewedpapersfromthe11thinternationalsymposiumonultracleanprocessingofsemiconductorsurfacesucpssseptember17192012gentbelgium AT internationalsymposiumonultracleanprocessingofsemiconductorsurfaces2012ghentbelgium ucpss2012 AT heynsmarc ucpss2012 AT mertenspaul ucpss2012 AT meurismarc ucpss2012 |