Introduction to microsystem design:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Heidelberg
Springer
2015
|
| Ausgabe: | Second edition |
| Schriftenreihe: | RWTH edition
|
| Schlagworte: | |
| Online-Zugang: | Volltext Inhaltsverzeichnis |
| Beschreibung: | Online resource; title from PDF title page (SpringerLink, viewed June 29, 2015) |
| Beschreibung: | 1 online resource |
| ISBN: | 9783662470220 9783662470237 |
Internformat
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Datensatz im Suchindex
| _version_ | 1804175327553912832 |
|---|---|
| adam_text | Titel: Introduction to microsystem design
Autor: Schomburg, Werner Karl
Jahr: 2015
Contents
Introduction 1
Scaling Laws 3
Elastic Deformations 5
Thin Films 9
Exercises 16
Conductor Paths 23
Exercises 29
Electrical Measurements 31
Exercises 42
Membranes 43
Exercises 69
Strain Gauges on Membranes 73
Exercises 87
Beams 91
Exercises 107
Vibrations Ill
Exercises 128
Capillaries 135
Exercises 156
Capacitive Forces 161
Exercises 173
ix
http://d-nb.info/1068992204
x Contents
Piezoelectric Effect 175
Exercises 195
Thermal Actuators 201
Exercises 216
Micro Optics 223
Exercises 235
Diffusion 237
Exercises 246
Micro Valves 249
Exercises 270
Micro Pumps 277
Exercises 294
Micro Dosing 301
Analogies of Physical Domains 303
Exercises 309
Mechanical Devices for Electronics 313
Exercises 322
Pressure Sensors 327
Exercises 336
Flow Sensors 339
Exercises 351
Inertial Sensors 355
Exercises 361
List of Characteristic Curves of Actuators 363
List of Characteristic Curves of Sensors 363
Typical Material Properties 364
References 365
Index 371
|
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| format | Electronic eBook |
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| language | English |
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| spelling | Schomburg, Werner Karl 1955- aut Introduction to microsystem design Werner Karl Schomburg Second edition Heidelberg Springer 2015 1 online resource txt rdacontent c rdamedia cr rdacarrier RWTH edition Online resource; title from PDF title page (SpringerLink, viewed June 29, 2015) Microelectromechanical systems Design and construction Systementwurf (DE-588)4261480-6 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Systementwurf (DE-588)4261480-6 s 1\p DE-604 http://lib.myilibrary.com?id=803703 Verlag Volltext HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028417442&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Schomburg, Werner Karl 1955- Introduction to microsystem design Microelectromechanical systems Design and construction Systementwurf (DE-588)4261480-6 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4261480-6 (DE-588)4221617-5 |
| title | Introduction to microsystem design |
| title_auth | Introduction to microsystem design |
| title_exact_search | Introduction to microsystem design |
| title_full | Introduction to microsystem design Werner Karl Schomburg |
| title_fullStr | Introduction to microsystem design Werner Karl Schomburg |
| title_full_unstemmed | Introduction to microsystem design Werner Karl Schomburg |
| title_short | Introduction to microsystem design |
| title_sort | introduction to microsystem design |
| topic | Microelectromechanical systems Design and construction Systementwurf (DE-588)4261480-6 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Microelectromechanical systems Design and construction Systementwurf Mikrosystemtechnik |
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