Electronic properties of nano-textured silicon:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Garching
Verein zur Förderung des Walter Schottky Inst. der Techn. Univ. München e.V.
2015
|
| Ausgabe: | 1. Aufl. |
| Schriftenreihe: | Selected topics of semiconductor physics and technology
190 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VII, 206 S. graph. Darst. |
| ISBN: | 9783941650909 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV042873046 | ||
| 003 | DE-604 | ||
| 005 | 20170201 | ||
| 007 | t | ||
| 008 | 150916s2015 d||| m||| 00||| eng d | ||
| 020 | |a 9783941650909 |9 978-3-941650-90-9 | ||
| 035 | |a (OCoLC)926041088 | ||
| 035 | |a (DE-599)BVBBV042873046 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 |a DE-12 |a DE-83 | ||
| 084 | |a ELT 300d |2 stub | ||
| 084 | |a PHY 685d |2 stub | ||
| 100 | 1 | |a Algasinger, Michael Andreas |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Electronic properties of nano-textured silicon |c Michael Andreas Algasinger |
| 250 | |a 1. Aufl. | ||
| 264 | 1 | |a Garching |b Verein zur Förderung des Walter Schottky Inst. der Techn. Univ. München e.V. |c 2015 | |
| 300 | |a VII, 206 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Selected topics of semiconductor physics and technology |v 190 | |
| 502 | |a Zugl.: München, Techn. Univ., Diss., 2015 | ||
| 650 | 0 | 7 | |a Elektrische Eigenschaft |0 (DE-588)4193812-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Elektrische Eigenschaft |0 (DE-588)4193812-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 830 | 0 | |a Selected topics of semiconductor physics and technology |v 190 |w (DE-604)BV011499438 |9 190 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028302126&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028302126 | ||
Datensatz im Suchindex
| _version_ | 1804175155880001537 |
|---|---|
| adam_text | CONTENTS
ZUSAMMENFASSUNG I
1 INTRODUCTION 1
2 THEORETICAL BACKGROUND 11
2.1 OPTICAL PROPERTIES 11
2.1.1 BAND STRUCTURE AND DIELECTRIC FUNCTION 11
2.1.2 ABSORPTION AND REFLECTION 13
2.1.3 OPTICALLY GRADED EFFECTIVE MEDIUM 15
2.1.4 SCATTERING 17
2.2 ELECTRONIC PROPERTIES OF THE SI/SIC 2 INTERFACE 19
2.2.1 SILICON OXIDE 19
2.2.2 INTERFACE STATES 21
2.2.3 RECOMBINATION MECHANISMS 24
3 AU-CATALYZED ETCH PROCESS 29
3.1 PROCESS PARAMETERS 30
3.1.1 ETCH TIME 31
3.1.2 AU THICKNESS 37
3.2 INFLUENCE OF THE SUBSTRATE PROPERTIES 39
3.2.1 DOPING TYPE AND DOPING LEVEL 39
3.2.2 CRYSTALLOGRAPHIC ORIENTATION 44
3.3 MODEL OF THE AU-CATALYZED ETCH PROCESS 46
4 ELECTRONIC PROPERTIES 51
4.1 AU IMPURITIES 51
4.1.1 AU CONCENTRATION IN THE NANO-TEXTURE 52
4.1.2 LOW-TEMPERATURE AU DIFFUSION 56
4.2 SURFACE DEFECTS 61
V
HTTP://D-NB.INFO/1076844286
VI
CONTENTS
4.2.1 SURFACE TERMINATION 61
4.2.2 TYPE OF DEFECTS 63
4.2.3 DEFECT DENSITY 69
4.2.4 ENERGY DISTRIBUTION OF SURFACE DEFECTS 73
4.3 SURFACE BAND BENDING 77
4.4 SURFACE RECOMBINATION 82
4.5 SPECTRALLY RESOLVED PHOTOCONDUCTIVITY IN NANO-TEXTURED THIN FILMS .
. 85
5 SURFACE PASSIVATION 93
5.1 AI2O3 95
5.2 SIN
X
103
5.3 A-SI:H 106
6 IMPLEMENTATION IN SOLAR CELL STRUCTURES 111
6.1 SOLAR CELL 113
6.1.1 WORKING PRINCIPLE 113
6.2 BACK CONTACT SOLAR CELL 115
6.3 HETEROJUNCTION SOLAR CELL 119
6.3.1 INFLUENCE OF THE A-SI:H THICKNESS 120
6.3.2 INFLUENCE OF THE STRUCTURE DEPTH 127
6.4 THIN FILM HETEROJUNCTION SOLAR CELL 130
6.4.1 OPTIMIZATION OF THE AU-CATALYZED ETCHING FOR POLY-SI THIN FILMS
132
6.4.2 POLY-SI THIN FILM SHJ SOLAR CELL 136
7 SUMMARY AND OUTLOOK 143
7.1 SUMMARY 143
7.2 OUTLOOK 147
A EXPERIMENTAL DETAILS 151
A.L FABRICATION OF THE NANO-TEXTURE 151
A.2 POST-TREATMENT 152
B CHARACTERIZATION METHODS 153
B.L UV/VIS/NIR SPECTROSCOPY 153
B.2 PHOTOLUMINESCENCE SPECTROSCOPY 153
B.3 FOURIER-TRANSFORM INFRARED SPECTROSCOPY 153
B.4 FOCUSED ION BEAM AND SCANNING ELECTRON MICROSCOPY 154
B.5 ATOMIC FORCE MICROSCOPY 155
CONTENTS VII
B.6 SECONDARY ION MASS SPECTROSCOPY 156
B.7 ELECTRON PARAMAGNETIC RESONANCE MEASUREMENTS 157
B.8 SURFACE PHOTOVOLTAGE SPECTROSCOPY 163
B.9 CAPACITANCE-VOLTAGE SPECTROSCOPY 166
B.10 LIFETIME MEASUREMENTS 167
B.LL PHOTOCURRENT SPECTROSCOPY 172
B.12 ELECTROCHEMICAL CHARACTERIZATION 173
C EPR 177
C.L EPR CALIBRATION 177
C.2 EDMR FITS 179
D SIMULATION PARAMETERS 185
LIST OF PUBLICATIONS 187
ACKNOWLEDGMENTS 189
BIBLIOGRAPHY 191
|
| any_adam_object | 1 |
| author | Algasinger, Michael Andreas |
| author_facet | Algasinger, Michael Andreas |
| author_role | aut |
| author_sort | Algasinger, Michael Andreas |
| author_variant | m a a ma maa |
| building | Verbundindex |
| bvnumber | BV042873046 |
| classification_tum | ELT 300d PHY 685d |
| ctrlnum | (OCoLC)926041088 (DE-599)BVBBV042873046 |
| discipline | Physik Elektrotechnik |
| edition | 1. Aufl. |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01727nam a2200409 cb4500</leader><controlfield tag="001">BV042873046</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20170201 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">150916s2015 d||| m||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783941650909</subfield><subfield code="9">978-3-941650-90-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)926041088</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042873046</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-12</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 300d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 685d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Algasinger, Michael Andreas</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Electronic properties of nano-textured silicon</subfield><subfield code="c">Michael Andreas Algasinger</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. Aufl.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Garching</subfield><subfield code="b">Verein zur Förderung des Walter Schottky Inst. der Techn. Univ. München e.V.</subfield><subfield code="c">2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VII, 206 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Selected topics of semiconductor physics and technology</subfield><subfield code="v">190</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Zugl.: München, Techn. Univ., Diss., 2015</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Elektrische Eigenschaft</subfield><subfield code="0">(DE-588)4193812-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Elektrische Eigenschaft</subfield><subfield code="0">(DE-588)4193812-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Selected topics of semiconductor physics and technology</subfield><subfield code="v">190</subfield><subfield code="w">(DE-604)BV011499438</subfield><subfield code="9">190</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028302126&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028302126</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV042873046 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:11:48Z |
| institution | BVB |
| isbn | 9783941650909 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028302126 |
| oclc_num | 926041088 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-12 DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-12 DE-83 |
| physical | VII, 206 S. graph. Darst. |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | Verein zur Förderung des Walter Schottky Inst. der Techn. Univ. München e.V. |
| record_format | marc |
| series | Selected topics of semiconductor physics and technology |
| series2 | Selected topics of semiconductor physics and technology |
| spelling | Algasinger, Michael Andreas Verfasser aut Electronic properties of nano-textured silicon Michael Andreas Algasinger 1. Aufl. Garching Verein zur Förderung des Walter Schottky Inst. der Techn. Univ. München e.V. 2015 VII, 206 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Selected topics of semiconductor physics and technology 190 Zugl.: München, Techn. Univ., Diss., 2015 Elektrische Eigenschaft (DE-588)4193812-4 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Elektrische Eigenschaft (DE-588)4193812-4 s DE-604 Selected topics of semiconductor physics and technology 190 (DE-604)BV011499438 190 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028302126&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Algasinger, Michael Andreas Electronic properties of nano-textured silicon Selected topics of semiconductor physics and technology Elektrische Eigenschaft (DE-588)4193812-4 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4193812-4 (DE-588)4077445-4 (DE-588)4113937-9 |
| title | Electronic properties of nano-textured silicon |
| title_auth | Electronic properties of nano-textured silicon |
| title_exact_search | Electronic properties of nano-textured silicon |
| title_full | Electronic properties of nano-textured silicon Michael Andreas Algasinger |
| title_fullStr | Electronic properties of nano-textured silicon Michael Andreas Algasinger |
| title_full_unstemmed | Electronic properties of nano-textured silicon Michael Andreas Algasinger |
| title_short | Electronic properties of nano-textured silicon |
| title_sort | electronic properties of nano textured silicon |
| topic | Elektrische Eigenschaft (DE-588)4193812-4 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Elektrische Eigenschaft Silicium Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028302126&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV011499438 |
| work_keys_str_mv | AT algasingermichaelandreas electronicpropertiesofnanotexturedsilicon |