Electrochemical micromachining for nanofabrication, MEMS and nanotechnology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam [u.a.]
Elsevier, William Andrew
2015
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| Subjects: | |
| Physical Description: | XXV, 270 S. Ill., graph. Darst. |
| ISBN: | 9780323327374 |
Staff View
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Record in the Search Index
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| author_facet | Bhattacharyya, Bijoy |
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| id | DE-604.BV042756413 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:08:54Z |
| institution | BVB |
| isbn | 9780323327374 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028187040 |
| oclc_num | 921845266 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XXV, 270 S. Ill., graph. Darst. |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | Elsevier, William Andrew |
| record_format | marc |
| spelling | Bhattacharyya, Bijoy Verfasser aut Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya Amsterdam [u.a.] Elsevier, William Andrew 2015 XXV, 270 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Micromachining Nanotechnology Microelectromechanical systems Microelectromechanical systems fast Micromachining fast Nanotechnology fast |
| spellingShingle | Bhattacharyya, Bijoy Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Micromachining Nanotechnology Microelectromechanical systems Microelectromechanical systems fast Micromachining fast Nanotechnology fast |
| title | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
| title_auth | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
| title_exact_search | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
| title_full | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
| title_fullStr | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
| title_full_unstemmed | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
| title_short | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
| title_sort | electrochemical micromachining for nanofabrication mems and nanotechnology |
| topic | Micromachining Nanotechnology Microelectromechanical systems Microelectromechanical systems fast Micromachining fast Nanotechnology fast |
| topic_facet | Micromachining Nanotechnology Microelectromechanical systems |
| work_keys_str_mv | AT bhattacharyyabijoy electrochemicalmicromachiningfornanofabricationmemsandnanotechnology |