Electrochemical micromachining for nanofabrication, MEMS and nanotechnology:
Gespeichert in:
1. Verfasser: | |
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Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Amsterdam [u.a.]
Elsevier, William Andrew
2015
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Schlagworte: | |
Beschreibung: | XXV, 270 S. Ill., graph. Darst. |
ISBN: | 9780323327374 |
Internformat
MARC
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264 | 1 | |a Amsterdam [u.a.] |b Elsevier, William Andrew |c 2015 | |
300 | |a XXV, 270 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
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650 | 4 | |a Micromachining | |
650 | 4 | |a Nanotechnology | |
650 | 4 | |a Microelectromechanical systems | |
650 | 7 | |a Microelectromechanical systems |2 fast | |
650 | 7 | |a Micromachining |2 fast | |
650 | 7 | |a Nanotechnology |2 fast | |
999 | |a oai:aleph.bib-bvb.de:BVB01-028187040 |
Datensatz im Suchindex
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any_adam_object | |
author | Bhattacharyya, Bijoy |
author_facet | Bhattacharyya, Bijoy |
author_role | aut |
author_sort | Bhattacharyya, Bijoy |
author_variant | b b bb |
building | Verbundindex |
bvnumber | BV042756413 |
ctrlnum | (OCoLC)921845266 (DE-599)BVBBV042756413 |
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id | DE-604.BV042756413 |
illustrated | Illustrated |
indexdate | 2024-07-10T07:08:54Z |
institution | BVB |
isbn | 9780323327374 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028187040 |
oclc_num | 921845266 |
open_access_boolean | |
owner | DE-29T |
owner_facet | DE-29T |
physical | XXV, 270 S. Ill., graph. Darst. |
publishDate | 2015 |
publishDateSearch | 2015 |
publishDateSort | 2015 |
publisher | Elsevier, William Andrew |
record_format | marc |
spelling | Bhattacharyya, Bijoy Verfasser aut Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya Amsterdam [u.a.] Elsevier, William Andrew 2015 XXV, 270 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Micromachining Nanotechnology Microelectromechanical systems Microelectromechanical systems fast Micromachining fast Nanotechnology fast |
spellingShingle | Bhattacharyya, Bijoy Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Micromachining Nanotechnology Microelectromechanical systems Microelectromechanical systems fast Micromachining fast Nanotechnology fast |
title | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
title_auth | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
title_exact_search | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
title_full | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
title_fullStr | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
title_full_unstemmed | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
title_short | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
title_sort | electrochemical micromachining for nanofabrication mems and nanotechnology |
topic | Micromachining Nanotechnology Microelectromechanical systems Microelectromechanical systems fast Micromachining fast Nanotechnology fast |
topic_facet | Micromachining Nanotechnology Microelectromechanical systems |
work_keys_str_mv | AT bhattacharyyabijoy electrochemicalmicromachiningfornanofabricationmemsandnanotechnology |