Special issue on atomic layer deposition:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
2014
|
| Schriftenreihe: | Journal of vacuum science & technology : A
32,1 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zs.-Heftes |
| Beschreibung: | Getr. Zählung |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV042729789 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 150803s2014 |||| 00||| eng d | ||
| 035 | |a (OCoLC)915864051 | ||
| 035 | |a (DE-599)BVBBV042729789 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 245 | 1 | 0 | |a Special issue on atomic layer deposition |
| 264 | 1 | |a New York |b American Inst. of Physics |c 2014 | |
| 300 | |a Getr. Zählung | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology : A |v 32,1 | |
| 500 | |a Einzelaufnahme eines Zs.-Heftes | ||
| 650 | 0 | 7 | |a Atomlagenabscheidung |0 (DE-588)7712127-2 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Atomlagenabscheidung |0 (DE-588)7712127-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028160825 | ||
Datensatz im Suchindex
| _version_ | 1804174940793995264 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV042729789 |
| ctrlnum | (OCoLC)915864051 (DE-599)BVBBV042729789 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00864nam a2200289 cb4500</leader><controlfield tag="001">BV042729789</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">150803s2014 |||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)915864051</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042729789</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Special issue on atomic layer deposition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">2014</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Getr. Zählung</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology : A</subfield><subfield code="v">32,1</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zs.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028160825</subfield></datafield></record></collection> |
| id | DE-604.BV042729789 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:08:23Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028160825 |
| oclc_num | 915864051 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | Getr. Zählung |
| publishDate | 2014 |
| publishDateSearch | 2014 |
| publishDateSort | 2014 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : A |
| spelling | Special issue on atomic layer deposition New York American Inst. of Physics 2014 Getr. Zählung txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : A 32,1 Einzelaufnahme eines Zs.-Heftes Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf Atomlagenabscheidung (DE-588)7712127-2 s DE-604 |
| spellingShingle | Special issue on atomic layer deposition Atomlagenabscheidung (DE-588)7712127-2 gnd |
| subject_GND | (DE-588)7712127-2 |
| title | Special issue on atomic layer deposition |
| title_auth | Special issue on atomic layer deposition |
| title_exact_search | Special issue on atomic layer deposition |
| title_full | Special issue on atomic layer deposition |
| title_fullStr | Special issue on atomic layer deposition |
| title_full_unstemmed | Special issue on atomic layer deposition |
| title_short | Special issue on atomic layer deposition |
| title_sort | special issue on atomic layer deposition |
| topic | Atomlagenabscheidung (DE-588)7712127-2 gnd |
| topic_facet | Atomlagenabscheidung |