Verfügbarkeit: Introduction to microsystem design

Introduction to microsystem design:

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	Schomburg, Werner Karl 1955- (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Berlin [u.a.] Springer 2015
Ausgabe:	2. ed.
Schriftenreihe:	RWTHedition
Schlagworte:	Engineering Electronics Systems engineering Electronics and Microelectronics, Instrumentation Circuits and Systems Nanotechnology and Microengineering Ingenieurwissenschaften Mikrosystemtechnik Systementwurf
Online-Zugang:	BHS01 BTU01 FAB01 FAW01 FHA01 FHI01 FHN01 FHR01 FKE01 FRO01 FWS01 FWS02 UBY01 Volltext Inhaltsverzeichnis Abstract
Beschreibung:	1 Online-Ressource (XXIV, 374 p. 380 illus., 332 illus. in color)
ISBN:	9783662470237
DOI:	10.1007/978-3-662-47023-7

Internformat

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Datensatz im Suchindex

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adam_text	INTRODUCTION TO MICROSYSTEM DESIGN / SCHOMBURG, WERNER KARL : 2015 TABLE OF CONTENTS / INHALTSVERZEICHNIS SCALING LAWS ELASTIC DEFORMATIONS THIN FILMS CONDUCTOR PATHS ELECTRICAL MEASUREMENTS MEMBRANES STRAIN GAUGES ON MEMBRANES BEAMS VIBRATIONS CAPILLARIES CAPACITIVE FORCES PIEZOELECTRIC EFFECT THERMAL ACTUATORS MICRO OPTICS DIFFUSION MICRO VALVES MICRO PUMPS MICRO DOSING ANALOGIES OF PHYSICAL DOMAINS MECHANICAL DEVICES FOR ELECTRONICS DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT. INTRODUCTION TO MICROSYSTEM DESIGN / SCHOMBURG, WERNER KARL : 2015 ABSTRACT / INHALTSTEXT THIS BOOK SYSTEMATICALLY DESCRIBES THE DESIGN OPTIONS FOR MICRO SYSTEMS AS WELL AS THE EQUATIONS NEEDED FOR CALCULATING THE BEHAVIOR OF THEIR BASIC ELEMENTS. THE FUNDAMENTAL EQUATIONS NEEDED TO CALCULATE THE EFFECTS AND FORCES THAT ARE IMPORTANT IN MICRO SYSTEMS ARE ALSO PROVIDED.READERS DO NOT REQUIRE PREVIOUS KNOWLEDGEOF FABRICATION PROCESSES. THIS SECOND EDITION OF THE VOLUME IS A THOROUGHLY REVISED AND EXTENDED UPDATE. THE TARGET AUDIENCE PRIMARILY COMPRISES EXPERTS IN THE FIELD OF MICRO SYSTEMS AND THE BOOK IS ALSO SUITABLE FOR GRADUATE ENGINEERING STUDENTS. FOR QUICK REFERENCE, EQUATIONS ARE PRESENTED IN TABLES THAT CAN BE FOUND IN AN INDEX AT THE END OF THE BOOK. DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
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discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
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spellingShingle	Schomburg, Werner Karl 1955- Introduction to microsystem design Engineering Electronics Systems engineering Electronics and Microelectronics, Instrumentation Circuits and Systems Nanotechnology and Microengineering Ingenieurwissenschaften Mikrosystemtechnik (DE-588)4221617-5 gnd Systementwurf (DE-588)4261480-6 gnd
subject_GND	(DE-588)4221617-5 (DE-588)4261480-6
title	Introduction to microsystem design
title_auth	Introduction to microsystem design
title_exact_search	Introduction to microsystem design
title_full	Introduction to microsystem design Werner Karl Schomburg
title_fullStr	Introduction to microsystem design Werner Karl Schomburg
title_full_unstemmed	Introduction to microsystem design Werner Karl Schomburg
title_short	Introduction to microsystem design
title_sort	introduction to microsystem design
topic	Engineering Electronics Systems engineering Electronics and Microelectronics, Instrumentation Circuits and Systems Nanotechnology and Microengineering Ingenieurwissenschaften Mikrosystemtechnik (DE-588)4221617-5 gnd Systementwurf (DE-588)4261480-6 gnd
topic_facet	Engineering Electronics Systems engineering Electronics and Microelectronics, Instrumentation Circuits and Systems Nanotechnology and Microengineering Ingenieurwissenschaften Mikrosystemtechnik Systementwurf
url	https://doi.org/10.1007/978-3-662-47023-7 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028101889&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028101889&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT schomburgwernerkarl introductiontomicrosystemdesign

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