Focused electron beam induced processing: from fundamentals towards applications:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2014
|
| Schriftenreihe: | Applied physics : A, Materials science : processing
117,4: Special issue |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zs.-Heftes |
| Beschreibung: | S. 1599-2294 Ill., graph. Darst. |
Internformat
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| indexdate | 2024-07-10T07:05:54Z |
| institution | BVB |
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| series2 | Applied physics : A, Materials science : processing |
| spelling | Focused electron beam induced processing: from fundamentals towards applications guest ed.: Harald Plank Berlin [u.a.] Springer 2014 S. 1599-2294 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Applied physics : A, Materials science : processing 117,4: Special issue Einzelaufnahme eines Zs.-Heftes Elektronenstrahlabtragung (DE-588)4151895-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Elektronenstrahlabtragung (DE-588)4151895-0 s DE-604 Plank, Harald Sonstige oth |
| spellingShingle | Focused electron beam induced processing: from fundamentals towards applications Elektronenstrahlabtragung (DE-588)4151895-0 gnd |
| subject_GND | (DE-588)4151895-0 (DE-588)4143413-4 |
| title | Focused electron beam induced processing: from fundamentals towards applications |
| title_auth | Focused electron beam induced processing: from fundamentals towards applications |
| title_exact_search | Focused electron beam induced processing: from fundamentals towards applications |
| title_full | Focused electron beam induced processing: from fundamentals towards applications guest ed.: Harald Plank |
| title_fullStr | Focused electron beam induced processing: from fundamentals towards applications guest ed.: Harald Plank |
| title_full_unstemmed | Focused electron beam induced processing: from fundamentals towards applications guest ed.: Harald Plank |
| title_short | Focused electron beam induced processing: from fundamentals towards applications |
| title_sort | focused electron beam induced processing from fundamentals towards applications |
| topic | Elektronenstrahlabtragung (DE-588)4151895-0 gnd |
| topic_facet | Elektronenstrahlabtragung Aufsatzsammlung |
| work_keys_str_mv | AT plankharald focusedelectronbeaminducedprocessingfromfundamentalstowardsapplications |