Resonant MEMS: fundamentals, implementation and application
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2015
|
| Schriftenreihe: | Advanced micro and nanosystems
11 |
| Schlagworte: | |
| Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | XXV, 483 S. Illustrationen, Diagramme |
| ISBN: | 9783527335459 9783527676330 |
Internformat
MARC
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| 245 | 1 | 0 | |a Resonant MEMS |b fundamentals, implementation and application |c ed. by Oliver Brand ... |
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Datensatz im Suchindex
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CONTENTS
SERIES EDITOR'S PREFACE
XV
PREFACE
XVII
ABOUT THE VOLUME EDITORS
IX
LIST OF CONTRIBUTORS
XXI
PART I: FUNDAMENTALS 1
1 FUNDAMENTAL THEORY OF RESONANT MEMS DEVICES 3
STEPHEN M. HEINRICH ANDLSABELLE DUFOUR
1.1 INTRODUCTION 3
1.2 NOMENCLATURE 4
1.3 SINGLE-DEGREE-OF-FREEDOM (SDOF) SYSTEMS 5
1.3.1 FREE VIBRATION
6
1.3.2 HARMONICALLY FORCED VIBRATION
8
1.3.3 CONTRIBUTIONS TO QUALITY FACTOR FROM MULTIPLE SOURCES 13
1.4 CONTINUOUS SYSTEMS MODELING: MICROCANTILEVER BEAM EXAMPLE 14
1.4.1 MODELING ASSUMPTIONS 15
1.4.2 BOUNDARY VALUE PROBLEM FOR A VIBRATING MICROCANTILEVER 16
1.4.3 FREE-VIBRATION RESPONSE OF MICROCANTILEVER 17
1.4.4 STEADY-STATE RESPONSE OF A HARMONICALLY EXCITED
MICROCANTILEVER 19
1.5 FORMULAS FOR UNDAMPED NATURAL FREQUENCIES 22
1.5.1 SIMPLE DEFORMATIONS (AXIAL, BENDING, TWISTING) OF ID STRUCTURAL
MEMBERS: CANTILEVERS AND DOUBLY CLAMPED MEMBERS
("BRIDGES") 23
1.5.1.1 AXIAL VIBRATIONS (ALONG X-AXIS) 23
1.5.1.2 TORSIONAL VIBRATIONS (BASED ON H B) (TWIST ABOUT X-AXIS) 24
1.5.1.3 FLEXURAL (BENDING) VIBRATIONS 24
1.5.2 TRANSVERSE DEFLECTION OF 2D STRUCTURES: CIRCULAR AND SQUARE PLATES
WITH FREE AND CLAMPED SUPPORTS 25
1.5.3 TRANSVERSE DEFLECTION OF ID MEMBRANE STRUCTURES ("STRINGS") 25
HTTP://D-NB.INFO/1058702874
VII CONTENTS
1.5.4 TRANSVERSE DEFLECTION OF 2D MEMBRANE STRUCTURES: CIRCULAR AND
SQUARE MEMBRANES UNDER UNIFORM TENSION AND SUPPORTED ALONG
PERIPHERY 26
1.5.5 IN-PLANE DEFORMATION OF SLENDER CIRCULAR RINGS 26
1.5.5.1 EXTENSIONAL MODES 26
1.5.5.2 IN-PLANE BENDING MODES 26
1.6 SUMMARY 27
ACKNOWLEDGMENT 27
REFERENCES 27
2 FREQUENCY RESPONSE OF CANTILEVER BEAMS IMMERSED IN VISCOUS
FLUIDS 29
CORNELIS ANTHONY VAN EYSDEN AND JOHN ELIESADER
2.1 INTRODUCTION 29
2.2 LOW ORDER MODES 30
2.2.1 FLEXURAL OSCILLATION 30
2.2.2 TORSIONAL OSCILLATION 36
2.2.3 IN-PLANE FLEXURAL OSCILLATION 37
2.2.4 EXTENSIONAL OSCILLATION 37
2.3 ARBITRARY MODE ORDER 38
2.3.1 INCOMPRESSIBLE FLOWS 38
2.3.2 COMPRESSIBLE FLOWS 46
2.3.2.1 SCALING ANALYSIS 47
2.3.2.2 NUMERICAL RESULTS 48
REFERENCES 51
3 DAMPING IN RESONANT MEMS 55
SHIRIN GHAFFARI
AND THOMAS WILLIAM KENNY
3.1 INTRODUCTION 55
3.2 AIR DAMPING 56
3.3 SURFACE DAMPING 59
3.4 ANCHOR DAMPING 61
3.5 ELECTRICAL DAMPING 63
3.6 THERMOELASTIC DISSIPATION (TED) 64
3.7 AKHIEZER EFFECT (AKE) 66
REFERENCES 69
4 PARAMETRICALLY EXCITED MICRO- AND NANOSYSTEMS 73
JEFFREY F. RHOADS,
CONGZHONG GUO, AND GARY K. FEDDER
4.1 INTRODUCTION 73
4.2 SOURCES OF PARAMETRIC EXCITATION IN MEMS AND NEMS 74
4.2.1 PARAMETRIC EXCITATION VIA ELECTROSTATIC TRANSDUCTION 75
4.2.2 OTHER SOURCES OF PARAMETRIC EXCITATION 77
4.3 MODELING THE UNDERLYING DYNAMICS-VARIANTS OF THE MATHIEU
EQUATION 77
.1
.2
.3
.4
0
.1
.1.1
.1.2
.2
.2.1
.2.2
.2.3
.1
.1.1
.1.2
.2
.2.1
.2.2
.3
.3.1
.3.2
CONTENTS | VII
PERTURBATION ANALYSIS 79
LINEAR, STEADY-STATE BEHAVIORS 80
SOURCES OF NONLINEARITY AND NONLINEAR STEADY-STATE BEHAVIORS 81
COMPLEX DYNAMICS IN PARAMETRICALLY EXCITED
MICRO/NANOSYSTEMS
84
COMBINED PARAMETRIC AND DIRECT EXCITATIONS 85
SELECT APPLICATIONS 85
RESONANT MASS SENSING 85
INERTIAL SENSING
86
MICROMIRROR ACTUATION 87
BIFURCATION CONTROL 88
SOME PARTING THOUGHTS 89
ACKNOWLEDGMENT 89
REFERENCES 89
FINITE ELEMENT MODELING OF RESONATORS 97
REZA ABDOLVAND, JONATHAN GONZALES, AND GAVIN HO
INTRODUCTION TO FINITE ELEMENT ANALYSIS 97
MATHEMATICAL FUNDAMENTALS 97
STATIC PROBLEMS 98
DYNAMIC PROBLEMS (MODAL ANALYSIS) 100
PRACTICAL IMPLEMENTATION 101
SET UP 102
PROCESSING 103
POST-PROCESSING 103
APPLICATION OF FEA IN MEMS RESONATOR DESIGN 104
MODAL ANALYSIS 104
MODE SHAPE ANALYSIS FOR DESIGN OPTIMIZATION 104
MODELING PROCESS-INDUCED VARIATION 108
LOSS ANALYSIS 110
ANCHOR LOSS 110
THERMOELASTIC DAMPING 112
FREQUENCY RESPONSE ANALYSIS 113
SPURIOUS MODE IDENTIFICATION AND REJECTION 113
FILTER DESIGN 115
SUMMARY 116
REFERENCES 116
PART II: IMPLEMENTATION 119
CAPACITIVE RESONATORS 121
GARYK.FEDDER
INTRODUCTION 121
CAPACITIVE TRANSDUCTION 122
ELECTROMECHANICAL ACTUATION 123
VIIII CONTENTS
6.3.1 ELECTROMECHANICAL FORCE DERIVATION 123
6.3.2 VOLTAGE DEPENDENT FORCE COMPONENTS 124
6.4 CAPACITIVE SENSING AND MOTIONAL CAPACITOR TOPOLOGIES 127
6.4.1 PARALLEL-MOVING PLATES 127
6.4.2 PERPENDICULAR MOVING PLATES 129
6.4.3 ELECTROSTATIC SPRING SOFTENING AND SNAP-IN 132
6.4.4 ANGULAR MOVING PLATES 134
6.5 ELECTRICAL ISOLATION 13S
6.6 CAPACITIVE RESONATOR CIRCUIT MODELS 136
6.7 CAPACITIVE INTERFACES 138
6.7.1 TRANSIMPEDANCE AMPLIFIER 138
6.7.2 HIGH-IMPEDANCE VOLTAGE DETECTION 142
6.7.3 SWITCHED-CAPACITOR DETECTION 142
6.8 CONCLUSION 143
ACKNOWLEDGMENT 144
REFERENCES 144
7 PIEZOELECTRIC RESONANT MEMS 147
GIANLUCA PIAZZA
7.1 INTRODUCTION TO PIEZOELECTRIC RESONANT MEMS 147
7.2 FUNDAMENTALS OF PIEZOELECTRICITY AND PIEZOELECTRIC RESONATORS 149
7.3 THIN FILM PIEZOELECTRIC MATERIALS FOR RESONANT MEMS 152
7.4 EQUIVALENT ELECTRICAL CIRCUIT OF PIEZOELECTRIC RESONANT MEMS 153
7.4.1 ONE-PORT PIEZOELECTRIC RESONATORS 156
7.4.2 TWO-PORT PIEZOELECTRIC RESONATORS 157
7.4.3 RESONATOR FIGURE OF MERIT 158
7.5 EXAMPLES OF PIEZOELECTRIC RESONANT MEMS: VIBRATIONS IN BEAMS,
MEMBRANES, AND PLATES 158
7.5.1 FLEXURAL VIBRATIONS 159
7.5.2 WIDTH-EXTENSIONAL VIBRATIONS 163
7.5.3 THICKNESS-EXTENSIONAL AND SHEAR VIBRATIONS 166
7.6 CONCLUSIONS 168
REFERENCES 169
8 ELECTROTHERMAL EXCITATION OF RESONANT MEMS 173
OLIVER BRAND AND SIAVASH POURKAMALI
8.1 BASIC PRINCIPLES 173
8.1.1 FUNDAMENTAL EQUATIONS FOR ELECTRO-THERMO-MECHANICAL
TRANSDUCTION 173
8.1.2 TIME CONSTANTS AND FREQUENCY DEPENDENCIES 175
8.2 ACTUATOR IMPLEMENTATIONS 178
8.2.1 THIN-FILM/SURFACE ACTUATORS 179
8.2.2 BULK ACTUATORS 184
8.3 PIEZORESISTIVE SENSING 185
8.3.1 FUNDAMENTAL EQUATIONS FOR PIEZORESISTIVE SENSING 185
CONTENTS | IX
8.3.2 PIEZORESISTOR IMPLEMENTATIONS 187
8.3.3 SELF-SUSTAINED THERMAL-PIEZORESISTIVE OSCILLATORS 189
8.4 MODELING AND OPTIMIZATION OF SINGLE-PORT THERMAL-PIEZORESISTIVE
RESONATORS 193
8.4.1 THERMO-ELECTRO-MECHANICAL MODELING 193
8.4.2 RESONATOR EQUIVALENT ELECTRICAL CIRCUIT AND OPTIMIZATION 195
8.5 EXAMPLES OF THERMALLY ACTUATED RESONANT MEMS 197
REFERENCES 199
9 NANOELECTROMECHANICAL SYSTEMS (NEMS) 203
LIVIU NICU,
VAIDA AUZELYTE, LUIS GUILLERMO
VILLANUEVA, NURIA BARNIOL, FRANCESC
PEREZ-MURANO,
WARNER J. VENSTRA, HERRE
S. J. VAN
DER ZANT, GABRIEL ABADAL,
VERONICA SAVU, AND JURGEN BRUGGER
9.1 INTRODUCTION 203
9.1.1 FUNDAMENTAL STUDIES 203
9.1.2 TRANSDUCTION AT THE NANOSCALE 206
9.1.3 MATERIALS, FABRICATION, AND SYSTEM INTEGRATION 208
9.1.4 ELECTRONICS 211
9.1.5 NONLINEAR MEMS/NEMS APPLICATIONS 212
9.2 CARBON-BASED NEMS 215
9.3 TOWARD FUNCTIONAL BIO-NEMS 219
9.3.1 NEMS-BASED ENERGY HARVESTING: AN EMERGING FIELD 220
9.4 SUMMARY AND OUTLOOK 222
REFERENCES 224
10 ORGANIC RESONANT MEMS DEVICES 233
SYLVAN SCHMID
10.1 INTRODUCTION 233
10.2 DEVICE DESIGNS 235
10.2.1 CONDUCTIVE POLYMER WITH ELECTROSTATIC ACTUATION 235
10.2.2 DIELECTRIC POLYMER WITH POLARIZATION FORCE
ACTUATION 236
10.2.3 SUPERPARAMAGNETIC NANOPARTICLE COMPOSITE WITH MAGNETIC
ACTUATION 238
10.2.4 METALLIZED POLYMER WITH LORENTZ FORCE ACTUATION 239
10.3 QUALITY FACTOR OF POLYMERIC MICROMECHANICAL
RESONATORS 242
10.3.1 QUALITY FACTOR IN VISCOUS ENVIRONMENT 242
10.3.2 QUALITY FACTOR OF RELAXED RESONATORS IN VACUUM 242
10.3.3 QUALITY FACTOR OF UNRELAXED RESONATORS IN VACUUM 243
10.4 APPLICATIONS 247
10.4.1 HUMIDITY SENSOR 247
10.4.2 VIBRATIONAL ENERGY HARVESTING 252
10.4.3 ARTIFICIAL COCHLEA 253
REFERENCES 256
X | CONTENTS
11 DEVICES WITH EMBEDDED CHANNELS 261
THOMAS P. BURG
11.1 INTRODUCTION 261
11.2 THEORY 263
11.2.1 EFFECTS OF FLUID DENSITY AND FLOW 263
11.2.2 EFFECTS OF VISCOSITY ON THE QUALITY FACTOR 267
11.2.3 EFFECT OF SURFACE REACTIONS 269
11.2.4 SINGLE PARTICLE MEASUREMENTS 271
11.3 DEVICE TECHNOLOGY 273
11.3.1 FABRICATION 273
11.3.2 PACKAGING CONSIDERATIONS 275
11.4 APPLICATIONS 279
11.4.1 MEASUREMENTS OF FLUID DENSITY AND MASS FLOW 279
11.4.2 SINGLE PARTICLE AND SINGLE CELL MEASUREMENTS 279
11.4.3 SURFACE-BASED MEASUREMENTS 280
11.5 CONCLUSION 282
REFERENCES 283
12 HERMETIC PACKAGING FOR RESONANT MEMS 28 7
MATTHEW WILLIAM MESSANA, ANDREW BRADLEY
GRAHAM, AND THOMAS WILLIAM
KENNY
12.1 INTRODUCTION 287
12.2 OVERVIEW OF PACKAGING TYPES 289
12.3 DIE-LEVEL VACUUM-CAN PACKAGING 291
12.4 WAFER BONDING FOR DEVICE PACKAGING 293
12.5 THIN FILM ENCAPSULATION-BASED PACKAGING 296
12.6 GETTERS 298
12.7 THE "STANFORD EPI-SEAL PROCESS" FOR PACKAGING OF MEMS
RESONATORS 299
12.8 CONCLUSION 302
REFERENCES 302
13 COMPENSATION, TUNING, AND TRIMMING OF MEMS RESONATORS 305
ROOZBEH TABRIZIAN AND FARROKH AYAZI
13.1 INTRODUCTION 306
13.2 COMPENSATION TECHNIQUES IN MEMS RESONATORS 306
13.2.1 COMPENSATION FOR THERMAL EFFECTS 306
13.2.1.1 ENGINEERING THE GEOMETRY 307
13.2.1.2 DOPING 307
13.2.1.3 COMPOSITE RESONATORS 309
13.2.2 COMPENSATION FOR MANUFACTURING UNCERTAINTIES 313
13.2.3 COMPENSATION AND CONTROL OF QUALITY FACTOR 315
13.2.4 COMPENSATION FOR POLARIZATION VOLTAGE 317
13.3 TUNING METHODS IN MEMS RESONATORS 317
13.3.1 DEVICE LEVEL TUNING 317
13.3.1.1 ELECTROSTATIC TUNING 318
13.3.1.2 THERMAL TUNING 318
13.3.1.3 PIEZOELECTRIC TUNING 319
13.3.2 SYSTEM-LEVEL TUNING 320
13.4 TRIMMING METHODS 321
REFERENCES 322
PART III: APPLICATION 327
14 MEMS INERTIAL SENSORS 329
DIEGO EMTIO SERRANO AND FARROKH AYAZI
14.1 INTRODUCTION 329
14.2 ACCELEROMETERS 329
14.2.1 PRINCIPLES OF OPERATION 330
14.2.2 QUASI-STATIC ACCELEROMETERS 331
14.2.2.1 SQUEEZE-FILM DAMPING 332
14.2.2.2 ELECTROMECHANICAL TRANSDUCTION IN ACCELEROMETERS 333
14.2.2.3 MECHANICAL NOISE IN ACCELEROMETERS 334
14.2.3 RESONANT ACCELEROMETERS 334
14.2.3.1 ELECTROSTATIC SPRING-SOFTENING 335
14.2.3.2 ACCELERATION SENSITIVITY IN RESONANT ACCELEROMETERS 336
14.3 GYROSCOPES 336
14.3.1 PRINCIPLES OF OPERATION 337
14.3.1.1 VIBRATORY GYROSCOPES 337
14.3.1.2 MODE-SPLIT VERSUS MODE-MATCHED GYROSCOPES 339
14.3.2 BULK-ACOUSTIC WAVE (BAW) GYROSCOPES 341
14.3.2.1 ANGULAR GAIN 342
14.3.2.2 ZERO-RATE OUTPUT 343
14.3.2.3 ZRO CANCELATION 345
14.3.2.4 ELECTROMECHANICAL TRANSDUCTION IN GYROSCOPES 345
14.3.2.5 ELECTROSTATIC MODE MATCHING AND MODE ALIGNMENT 346
14.3.3 MECHANICAL NOISE IN MODE-MATCHED GYROSCOPES 347
14.4 MULTI-DEGREE-OF-FREEDOM INERTIAL MEASUREMENT UNITS 348
14.4.1 SYSTEM-IN-PACKAGE IMUS 348
14.4.2 SINGLE-DIE IMUS 349
14.4.3 FUTURE TRENDS IN SENSOR INTEGRATION 351
REFERENCES 352
15 RESONANT MEMS CHEMICAL SENSORS 355
LUKE A. BEARDSLEE,
OLIVER BRAND,
AND FABIEN JOSSE
15.1 INTRODUCTION 355
15.2 MODELING OF RESONANT MICROCANTILEVER CHEMICAL
SENSORS 357
15.2.1 GENERALIZED RESONANT FREQUENCY 360
15.3 EFFECTS OF CHEMICAL ANALYTE SORPTION INTO THE COATING 361
XII
| CONTENTS
15.3.1 RESONANT FREQUENCY 361
15.3.2 QUALITY FACTOR 363
15.4 FIGURES OF MERIT 364
15.5 CHEMICALLY SENSITIVE LAYERS 368
15.6 PACKAGING 371
15.7 GAS-PHASE CHEMICAL SENSORS 374
15.8 LIQUID-PHASE CHEMICAL SENSORS 377
15.8.1 CANTILEVERS 379
15.8.2 MICRODISK RESONATORS 380
15.8.3 ACOUSTIC WAVE SENSORS 381
15.8.4 RESONATORS WITH ENCAPSULATED CHANNELS 383
REFERENCES 383
16 BIOSENSORS 391
BLAKE N. JOHNSON AND RAJ MUTHARASAN
16.1 INTRODUCTION 391
16.2 DESIGN CONSIDERATIONS: LENGTH SCALE, GEOMETRY,
AND MATERIALS 392
16.2.1 FABRICATION MATERIALS 392
16.2.2 SINGLE-LAYER GEOMETRY 402
16.2.3 MULTI-LAYER GEOMETRY 403
16.2.4 LENGTH SCALES 403
16.3 SURFACE FUNCTIONALIZATION: PREPARATION, PASSIVATION, AND
BIO-RECOGNITION 404
16.3.1 ANTIBODY-BASED BIO-RECOGNITION 405
16.3.2 NUCLEIC ACID-BASED BIO-RECOGNITION 405
16.3.3 ALTERNATIVE BIO-RECOGNITION AGENTS 407
16.4 BIOSENSING APPLICATION FORMATS 408
16.4.1 DIP-DRY-MEASURE METHOD 408
16.4.2 CONTINUOUS FLOW METHOD 408
16.5 APPLICATION CASE STUDIES 409
16.5.1 WHOLE CELLS: PATHOGENS AND PARASITES 409
16.5.1.1 FOODBORNE PATHOGEN: ESCHERICHIA COLI 0157:H7 409
16.5.1.2 FOODBORNE PATHOGEN: LISTERIA MONOCYTOGENES 411
16.5.1.3 WATERBORNE PARASITE: CRYPTOSPORIDIUM PARVUM 413
16.5.1.4 WATERBORNE PARASITE: GIARDIA LAMBLIA 413
16.5.2 PROTEINS: BIOMARKERS AND TOXINS 414
16.5.2.1 PROSTATE CANCER BIOMARKER: PROSTATE SPECIFIC ANTIGEN 414
16.5.2.2 PROSTATE CANCER BIOMARKER: ALPHA-METHYLACYL-COA RACEMASE
(AMACR) 414
16.5.2.3 TOXIN IN SOURCE WATER: MICROCYSTIN 415
16.5.2.4 TOXIN IN FOOD MATRICES: STAPHYLOCOCCAL ENTEROTOXIN B 415
16.5.3 VIRUS 416
16.5.4 NUCLEIC ACIDS: BIOMARKERS AND GENES ASSOCIATED WITH TOXIN
PRODUCTION 416
CONTENTS | XIII
16.5.4.1 RNA-BASED BIOMARKERS: MICRORNA 416
16.5.4.2 GENE SIGNATURE OF A VIRUS 417
16.5.4.3 TOXIN-ASSOCIATED GENES FOR PATHOGEN DETECTION WITHOUT DNA
AMPLIFICATION 417
16.6 CONCLUSIONS AND FUTURE TRENDS 418
ACKNOWLEDGMENT 419
REFERENCES 419
17 FLUID PROPERTY SENSORS 427
ERWIN K. REICHEL, MARTIN HEINISCH,
AND BERNHARD JAKOBY
17.1 INTRODUCTION 427
17.2 DEFINITION OF FLUID PROPERTIES 429
17.2.1 RHEOLOGICAL PROPERTIES 429
17.2.2 TIME-HARMONIC DEFORMATION 431
17.2.3 CLASSICAL METHODS FOR MEASURING FLUID PROPERTIES 431
17.2.4 MINIATURIZED RHEOMETERS 432
17.3 RESONATOR SENSORS 433
17.3.1 EXCITATION AND READOUT 433
17.3.2 EIGENMODE DECOMPOSITION 433
17.3.3 ELECTRICAL EQUIVALENT CIRCUIT 434
17.3.4 DAMPING 435
17.3.5 FLUID-STRUCTURE INTERACTION 436
17.4 EXAMPLES OF RESONANT SENSORS FOR FLUID PROPERTIES 438
17.4.1 MICROACOUSTIC DEVICES 440
17.4.2 MEMS DEVICES 441
17.4.2.1 CANTILEVER DEVICES 441
17.4.2.2 U-SHAPED CANTILEVERS 445
17.4.2.3 TUNING FORKS 445
17.4.2.4 DOUBLY-CLAMPED BEAM DEVICES 445
17.4.2.5 IN-PLANE RESONATORS 445
17.4.2.6 OTHER PRINCIPLES 445
17.4.3 COMPARISON 446
17.5 CONCLUSIONS 446
REFERENCES 446
18 ENERGY HARVESTING DEVICES 451
STEPHEN P. BEEBY
18.1 INTRODUCTION 451
18.2 GENERIC HARVESTER STRUCTURES 452
18.2.1 INERTIAL ENERGY HARVESTERS 453
18.2.2 DIRECT FORCE ENERGY HARVESTERS 456
18.2.3 BROADBAND ENERGY HARVESTERS 457
18.2.4 FREQUENCY CONVERSION 460
18.3 MEMS ENERGY HARVESTER TRANSDUCTION MECHANISMS 461
18.3.1 PIEZOELECTRIC TRANSDUCTION 462
XIV
| CONTENTS
18.3.2 ELECTROMAGNETIC TRANSDUCTION 464
18.3.3 ELECTROSTATIC TRANSDUCTION 465
18.3.4 OTHER TRANSDUCER MATERIALS 467
18.4 REVIEW AND COMPARISON OF MEMS ENERGY HARVESTING DEVICES 468
18.5 CONCLUSIONS 471
REFERENCES 472
INDEX 475 |
| any_adam_object | 1 |
| author2 | Brand, Oliver 1964- |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV042514739 |
| illustrated | Illustrated |
| indexdate | 2024-09-10T01:41:34Z |
| institution | BVB |
| isbn | 9783527335459 9783527676330 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027949199 |
| oclc_num | 892071759 |
| open_access_boolean | |
| owner | DE-703 DE-M347 DE-1043 DE-29T DE-634 DE-92 DE-83 |
| owner_facet | DE-703 DE-M347 DE-1043 DE-29T DE-634 DE-92 DE-83 |
| physical | XXV, 483 S. Illustrationen, Diagramme |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | Wiley-VCH |
| record_format | marc |
| series | Advanced micro and nanosystems |
| series2 | Advanced micro and nanosystems |
| spelling | Resonant MEMS fundamentals, implementation and application ed. by Oliver Brand ... Weinheim Wiley-VCH 2015 XXV, 483 S. Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Advanced micro and nanosystems 11 Nanoelektromechanik (DE-588)7546434-2 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Resonator (DE-588)4131574-1 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content MEMS (DE-588)4824724-8 s Nanoelektromechanik (DE-588)7546434-2 s Resonator (DE-588)4131574-1 s DE-604 Brand, Oliver 1964- (DE-588)123279216 edt Erscheint auch als Online-Ausgabe, EPUB 978-3-527-67635-4 Erscheint auch als Online-Ausgabe, MOBI 978-3-527-67634-7 Erscheint auch als Online-Ausgabe, PDF 978-3-527-67636-1 Advanced micro and nanosystems 11 (DE-604)BV019371555 11 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4783432&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027949199&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Resonant MEMS fundamentals, implementation and application Advanced micro and nanosystems Nanoelektromechanik (DE-588)7546434-2 gnd MEMS (DE-588)4824724-8 gnd Resonator (DE-588)4131574-1 gnd |
| subject_GND | (DE-588)7546434-2 (DE-588)4824724-8 (DE-588)4131574-1 (DE-588)4143413-4 |
| title | Resonant MEMS fundamentals, implementation and application |
| title_auth | Resonant MEMS fundamentals, implementation and application |
| title_exact_search | Resonant MEMS fundamentals, implementation and application |
| title_full | Resonant MEMS fundamentals, implementation and application ed. by Oliver Brand ... |
| title_fullStr | Resonant MEMS fundamentals, implementation and application ed. by Oliver Brand ... |
| title_full_unstemmed | Resonant MEMS fundamentals, implementation and application ed. by Oliver Brand ... |
| title_short | Resonant MEMS |
| title_sort | resonant mems fundamentals implementation and application |
| title_sub | fundamentals, implementation and application |
| topic | Nanoelektromechanik (DE-588)7546434-2 gnd MEMS (DE-588)4824724-8 gnd Resonator (DE-588)4131574-1 gnd |
| topic_facet | Nanoelektromechanik MEMS Resonator Aufsatzsammlung |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=4783432&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027949199&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV019371555 |
| work_keys_str_mv | AT brandoliver resonantmemsfundamentalsimplementationandapplication |