Three-Dimensional Simulation of Semiconductor Devices:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | German |
| Veröffentlicht: |
Basel
Birkhäuser Basel
1991
|
| Schriftenreihe: | Progress in Numerical Simulation for Microelectronics
1 |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | The three-dimensional device simulation has become a necessary tool for the design and investigation of complex device structures. The evolution of the three-dimensional simulation tools is directly linked to the scaling of the devices and the increasing complexity of dynamic random access memory (DRAM) cells. Scaling of MOSFET devices led to a three-dimensional geometry with effects which cannot be handled by two-dimensional simulations anymore. With increasing integration density in DRAMs the third dimen sion had to be utilized to realize the storage capacitor. The resulting leakage problems have to be investigated and the cell design optimized by means of three-dimensional simulations. This book is intended for senior undergraduate students in applied physics, electrical engineering and computational physics, as well as for scientists and engineers involved in semiconductor device research and development. It is also intended for software engineers and all those who are concerned with simulation. The book will give an overview on the problems and activities concerning three-dimensional device simulation, without the claim of being a classical textbook. It starts from the classical semiconductor equations, discusses the physical models used in device simulation, describes the discretization and some numerical methods for solving the differential equations. The application of the threedimensional simulation to VLSI device engineering is illustrated by a few specific examples |
| Beschreibung: | 1 Online-Ressource (124 S.) |
| ISBN: | 9783034877312 9783034877329 |
| DOI: | 10.1007/978-3-0348-7731-2 |
Internformat
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Datensatz im Suchindex
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| discipline | Allgemeine Naturwissenschaft |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:21:50Z |
| institution | BVB |
| isbn | 9783034877312 9783034877329 |
| language | German |
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| series | Progress in Numerical Simulation for Microelectronics |
| series2 | Progress in Numerical Simulation for Microelectronics |
| spelling | Kircher, Roland Verfasser aut Three-Dimensional Simulation of Semiconductor Devices von Roland Kircher, Wolfgang Bergner Basel Birkhäuser Basel 1991 1 Online-Ressource (124 S.) txt rdacontent c rdamedia cr rdacarrier Progress in Numerical Simulation for Microelectronics 1 The three-dimensional device simulation has become a necessary tool for the design and investigation of complex device structures. The evolution of the three-dimensional simulation tools is directly linked to the scaling of the devices and the increasing complexity of dynamic random access memory (DRAM) cells. Scaling of MOSFET devices led to a three-dimensional geometry with effects which cannot be handled by two-dimensional simulations anymore. With increasing integration density in DRAMs the third dimen sion had to be utilized to realize the storage capacitor. The resulting leakage problems have to be investigated and the cell design optimized by means of three-dimensional simulations. This book is intended for senior undergraduate students in applied physics, electrical engineering and computational physics, as well as for scientists and engineers involved in semiconductor device research and development. It is also intended for software engineers and all those who are concerned with simulation. The book will give an overview on the problems and activities concerning three-dimensional device simulation, without the claim of being a classical textbook. It starts from the classical semiconductor equations, discusses the physical models used in device simulation, describes the discretization and some numerical methods for solving the differential equations. The application of the threedimensional simulation to VLSI device engineering is illustrated by a few specific examples Science (General) Science, general Naturwissenschaft Halbleiterschaltung (DE-588)4158811-3 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Simulation (DE-588)4055072-2 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 s Simulation (DE-588)4055072-2 s 1\p DE-604 Halbleiterschaltung (DE-588)4158811-3 s 2\p DE-604 Bergner, Wolfgang Sonstige oth Progress in Numerical Simulation for Microelectronics 1 (DE-604)BV004586845 1 https://doi.org/10.1007/978-3-0348-7731-2 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Kircher, Roland Three-Dimensional Simulation of Semiconductor Devices Progress in Numerical Simulation for Microelectronics Science (General) Science, general Naturwissenschaft Halbleiterschaltung (DE-588)4158811-3 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Simulation (DE-588)4055072-2 gnd |
| subject_GND | (DE-588)4158811-3 (DE-588)4113826-0 (DE-588)4055072-2 |
| title | Three-Dimensional Simulation of Semiconductor Devices |
| title_auth | Three-Dimensional Simulation of Semiconductor Devices |
| title_exact_search | Three-Dimensional Simulation of Semiconductor Devices |
| title_full | Three-Dimensional Simulation of Semiconductor Devices von Roland Kircher, Wolfgang Bergner |
| title_fullStr | Three-Dimensional Simulation of Semiconductor Devices von Roland Kircher, Wolfgang Bergner |
| title_full_unstemmed | Three-Dimensional Simulation of Semiconductor Devices von Roland Kircher, Wolfgang Bergner |
| title_short | Three-Dimensional Simulation of Semiconductor Devices |
| title_sort | three dimensional simulation of semiconductor devices |
| topic | Science (General) Science, general Naturwissenschaft Halbleiterschaltung (DE-588)4158811-3 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Simulation (DE-588)4055072-2 gnd |
| topic_facet | Science (General) Science, general Naturwissenschaft Halbleiterschaltung Halbleiterbauelement Simulation |
| url | https://doi.org/10.1007/978-3-0348-7731-2 |
| volume_link | (DE-604)BV004586845 |
| work_keys_str_mv | AT kircherroland threedimensionalsimulationofsemiconductordevices AT bergnerwolfgang threedimensionalsimulationofsemiconductordevices |