Scanning electron microscopy: physics of image formation and microanalysis
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1985
|
| Schriftenreihe: | Springer Series in Optical Sciences
45 |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | The aim of this book is to outline the physics of image formation, electron specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the electron beam can be blanked at high frequencies for time-resolving experiments and what problems have tobe taken into account when focusing |
| Beschreibung: | 1 Online-Ressource (XVIII, 463 p) |
| ISBN: | 9783662135624 9783662135648 |
| DOI: | 10.1007/978-3-662-13562-4 |
Internformat
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Datensatz im Suchindex
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| discipline | Physik |
| doi_str_mv | 10.1007/978-3-662-13562-4 |
| format | Electronic eBook |
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| id | DE-604.BV042414621 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:20:55Z |
| institution | BVB |
| isbn | 9783662135624 9783662135648 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027850114 |
| oclc_num | 864029607 |
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| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | 1 Online-Ressource (XVIII, 463 p) |
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| publishDate | 1985 |
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| publisher | Springer Berlin Heidelberg |
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| series | Springer Series in Optical Sciences |
| series2 | Springer Series in Optical Sciences |
| spelling | Reimer, Ludwig 1928- Verfasser (DE-588)13230130X aut Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer Berlin, Heidelberg Springer Berlin Heidelberg 1985 1 Online-Ressource (XVIII, 463 p) txt rdacontent c rdamedia cr rdacarrier Springer Series in Optical Sciences 45 The aim of this book is to outline the physics of image formation, electron specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the electron beam can be blanked at high frequencies for time-resolving experiments and what problems have tobe taken into account when focusing Physics Solid State Physics Spectroscopy and Microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd rswk-swf Rasterelektronenmikroskopie (DE-588)4048455-5 s DE-604 Erscheint auch als Druck-Ausgabe 3-540-13530-8 Springer Series in Optical Sciences 45 (DE-604)BV000000237 45 https://doi.org/10.1007/978-3-662-13562-4 Verlag Volltext |
| spellingShingle | Reimer, Ludwig 1928- Scanning electron microscopy physics of image formation and microanalysis Springer Series in Optical Sciences Physics Solid State Physics Spectroscopy and Microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd |
| subject_GND | (DE-588)4048455-5 |
| title | Scanning electron microscopy physics of image formation and microanalysis |
| title_auth | Scanning electron microscopy physics of image formation and microanalysis |
| title_exact_search | Scanning electron microscopy physics of image formation and microanalysis |
| title_full | Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer |
| title_fullStr | Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer |
| title_full_unstemmed | Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer |
| title_short | Scanning electron microscopy |
| title_sort | scanning electron microscopy physics of image formation and microanalysis |
| title_sub | physics of image formation and microanalysis |
| topic | Physics Solid State Physics Spectroscopy and Microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd |
| topic_facet | Physics Solid State Physics Spectroscopy and Microscopy Rasterelektronenmikroskopie |
| url | https://doi.org/10.1007/978-3-662-13562-4 |
| volume_link | (DE-604)BV000000237 |
| work_keys_str_mv | AT reimerludwig scanningelectronmicroscopyphysicsofimageformationandmicroanalysis |