Radiation Effects in Advanced Semiconductor Materials and Devices:
Gespeichert in:
1. Verfasser: | |
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Berlin, Heidelberg
Springer Berlin Heidelberg
2002
|
Schriftenreihe: | Springer Series in Materials Science
57 |
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments |
Beschreibung: | 1 Online-Ressource (XXII, 404 p) |
ISBN: | 9783662049747 9783642077784 |
ISSN: | 0933-033X |
DOI: | 10.1007/978-3-662-04974-7 |
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Datensatz im Suchindex
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author | Claeys, Cor L. 1951- |
author_GND | (DE-588)1089337477 |
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dewey-tens | 540 - Chemistry and allied sciences |
discipline | Chemie / Pharmazie Physik |
doi_str_mv | 10.1007/978-3-662-04974-7 |
format | Electronic eBook |
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institution | BVB |
isbn | 9783662049747 9783642077784 |
issn | 0933-033X |
language | English |
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owner_facet | DE-91 DE-BY-TUM DE-83 |
physical | 1 Online-Ressource (XXII, 404 p) |
psigel | ZDB-2-PHA ZDB-2-BAE ZDB-2-PHA_Archive |
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spelling | Claeys, Cor L. 1951- Verfasser (DE-588)1089337477 aut Radiation Effects in Advanced Semiconductor Materials and Devices by Cor Claeys, Eddy Simoen Berlin, Heidelberg Springer Berlin Heidelberg 2002 1 Online-Ressource (XXII, 404 p) txt rdacontent c rdamedia cr rdacarrier Springer Series in Materials Science 57 0933-033X In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments Physics Crystallography Electronics Optical materials Surfaces (Physics) Characterization and Evaluation of Materials Optical and Electronic Materials Surfaces and Interfaces, Thin Films Electronics and Microelectronics, Instrumentation Halbleiter (DE-588)4022993-2 gnd rswk-swf Strahlenschaden (DE-588)4057825-2 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 s Strahlenschaden (DE-588)4057825-2 s 1\p DE-604 Halbleiter (DE-588)4022993-2 s 2\p DE-604 Simoen, Eddy Sonstige oth https://doi.org/10.1007/978-3-662-04974-7 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Claeys, Cor L. 1951- Radiation Effects in Advanced Semiconductor Materials and Devices Physics Crystallography Electronics Optical materials Surfaces (Physics) Characterization and Evaluation of Materials Optical and Electronic Materials Surfaces and Interfaces, Thin Films Electronics and Microelectronics, Instrumentation Halbleiter (DE-588)4022993-2 gnd Strahlenschaden (DE-588)4057825-2 gnd Halbleiterbauelement (DE-588)4113826-0 gnd |
subject_GND | (DE-588)4022993-2 (DE-588)4057825-2 (DE-588)4113826-0 |
title | Radiation Effects in Advanced Semiconductor Materials and Devices |
title_auth | Radiation Effects in Advanced Semiconductor Materials and Devices |
title_exact_search | Radiation Effects in Advanced Semiconductor Materials and Devices |
title_full | Radiation Effects in Advanced Semiconductor Materials and Devices by Cor Claeys, Eddy Simoen |
title_fullStr | Radiation Effects in Advanced Semiconductor Materials and Devices by Cor Claeys, Eddy Simoen |
title_full_unstemmed | Radiation Effects in Advanced Semiconductor Materials and Devices by Cor Claeys, Eddy Simoen |
title_short | Radiation Effects in Advanced Semiconductor Materials and Devices |
title_sort | radiation effects in advanced semiconductor materials and devices |
topic | Physics Crystallography Electronics Optical materials Surfaces (Physics) Characterization and Evaluation of Materials Optical and Electronic Materials Surfaces and Interfaces, Thin Films Electronics and Microelectronics, Instrumentation Halbleiter (DE-588)4022993-2 gnd Strahlenschaden (DE-588)4057825-2 gnd Halbleiterbauelement (DE-588)4113826-0 gnd |
topic_facet | Physics Crystallography Electronics Optical materials Surfaces (Physics) Characterization and Evaluation of Materials Optical and Electronic Materials Surfaces and Interfaces, Thin Films Electronics and Microelectronics, Instrumentation Halbleiter Strahlenschaden Halbleiterbauelement |
url | https://doi.org/10.1007/978-3-662-04974-7 |
work_keys_str_mv | AT claeyscorl radiationeffectsinadvancedsemiconductormaterialsanddevices AT simoeneddy radiationeffectsinadvancedsemiconductormaterialsanddevices |