Insulating Films on Semiconductors: Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981
Gespeichert in:
1. Verfasser: | |
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1981
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Schriftenreihe: | Springer Series in Electrophysics
7 |
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | The INFOS 81 Conference on Insulating Films on Semiconductors was held at the University of Erlangen-NUrnberg in Erlangen from 27 to 29 April 1981. This conference was a sequel to the first conference INFOS 79 held in Durham. INFOS 81 attracted 170 participants from universities, research institutes and industry. Attendants were registered from 15 nations. The biannual topical conference series will be continued by INFOS 83 to be held in Eindhoven, The Netherlands, in April 1983. The conference proceedings include all the invited (Y) and contrlDUtea (42) papers presented at the meeting. The topics range from the basic physical understanding of the properties of insulating films and their interface to semiconductors to the discussion of stability and dielectric strength as well as growing and deposition techniques which are relevant for technical applications. Strong emphasis was given to the semiconductor silicon and its native oxide; however, sessions on compound semiconductors and other insulating films also raised strong interest. The proceedings survey the present state of our understanding of the system of insulating films on semiconductors. As a new aspect of the topic, the properties of semiconductors deposited and laser processed on insulating films was in cluded for the first time |
Beschreibung: | 1 Online-Ressource (X, 318 p) |
ISBN: | 9783642682476 9783642682490 |
ISSN: | 0172-5734 |
DOI: | 10.1007/978-3-642-68247-6 |
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Datensatz im Suchindex
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any_adam_object | |
author | Schulz, Max J. |
author_facet | Schulz, Max J. |
author_role | aut |
author_sort | Schulz, Max J. |
author_variant | m j s mj mjs |
building | Verbundindex |
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dewey-hundreds | 600 - Technology (Applied sciences) |
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dewey-raw | 620.44 |
dewey-search | 620.44 |
dewey-sort | 3620.44 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik |
doi_str_mv | 10.1007/978-3-642-68247-6 |
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spelling | Schulz, Max J. Verfasser aut Insulating Films on Semiconductors Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 edited by Max J. Schulz, Gerhard Pensl Berlin, Heidelberg Springer Berlin Heidelberg 1981 1 Online-Ressource (X, 318 p) txt rdacontent c rdamedia cr rdacarrier Springer Series in Electrophysics 7 0172-5734 The INFOS 81 Conference on Insulating Films on Semiconductors was held at the University of Erlangen-NUrnberg in Erlangen from 27 to 29 April 1981. This conference was a sequel to the first conference INFOS 79 held in Durham. INFOS 81 attracted 170 participants from universities, research institutes and industry. Attendants were registered from 15 nations. The biannual topical conference series will be continued by INFOS 83 to be held in Eindhoven, The Netherlands, in April 1983. The conference proceedings include all the invited (Y) and contrlDUtea (42) papers presented at the meeting. The topics range from the basic physical understanding of the properties of insulating films and their interface to semiconductors to the discussion of stability and dielectric strength as well as growing and deposition techniques which are relevant for technical applications. Strong emphasis was given to the semiconductor silicon and its native oxide; however, sessions on compound semiconductors and other insulating films also raised strong interest. The proceedings survey the present state of our understanding of the system of insulating films on semiconductors. As a new aspect of the topic, the properties of semiconductors deposited and laser processed on insulating films was in cluded for the first time Surfaces (Physics) Materials Science Surfaces and Interfaces, Thin Films MIS (DE-588)4139664-9 gnd rswk-swf MOS (DE-588)4130209-6 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Nichtleiter (DE-588)4123451-0 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf 1\p (DE-588)1071861417 Konferenzschrift 1981 Erlangen gnd-content Halbleiter (DE-588)4022993-2 s Nichtleiter (DE-588)4123451-0 s Dünne Schicht (DE-588)4136925-7 s 2\p DE-604 MIS (DE-588)4139664-9 s 3\p DE-604 MOS (DE-588)4130209-6 s 4\p DE-604 Pensl, Gerhard Sonstige oth https://doi.org/10.1007/978-3-642-68247-6 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Schulz, Max J. Insulating Films on Semiconductors Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 Surfaces (Physics) Materials Science Surfaces and Interfaces, Thin Films MIS (DE-588)4139664-9 gnd MOS (DE-588)4130209-6 gnd Dünne Schicht (DE-588)4136925-7 gnd Nichtleiter (DE-588)4123451-0 gnd Halbleiter (DE-588)4022993-2 gnd |
subject_GND | (DE-588)4139664-9 (DE-588)4130209-6 (DE-588)4136925-7 (DE-588)4123451-0 (DE-588)4022993-2 (DE-588)1071861417 |
title | Insulating Films on Semiconductors Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 |
title_auth | Insulating Films on Semiconductors Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 |
title_exact_search | Insulating Films on Semiconductors Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 |
title_full | Insulating Films on Semiconductors Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 edited by Max J. Schulz, Gerhard Pensl |
title_fullStr | Insulating Films on Semiconductors Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 edited by Max J. Schulz, Gerhard Pensl |
title_full_unstemmed | Insulating Films on Semiconductors Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 edited by Max J. Schulz, Gerhard Pensl |
title_short | Insulating Films on Semiconductors |
title_sort | insulating films on semiconductors proceedings of the second international conference infos 81 erlangen fed rep of germany april 27 29 1981 |
title_sub | Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981 |
topic | Surfaces (Physics) Materials Science Surfaces and Interfaces, Thin Films MIS (DE-588)4139664-9 gnd MOS (DE-588)4130209-6 gnd Dünne Schicht (DE-588)4136925-7 gnd Nichtleiter (DE-588)4123451-0 gnd Halbleiter (DE-588)4022993-2 gnd |
topic_facet | Surfaces (Physics) Materials Science Surfaces and Interfaces, Thin Films MIS MOS Dünne Schicht Nichtleiter Halbleiter Konferenzschrift 1981 Erlangen |
url | https://doi.org/10.1007/978-3-642-68247-6 |
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