Thin Film and Depth Profile Analysis:
Gespeichert in:
Weitere Verfasser: | |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1984
|
Schriftenreihe: | Topics in Current Physics
37 |
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | The characterization of thin films and solid interfaces as well as the determination of concentration profiles in thin solid layers is one of the fields which require a rapid transfer of the results from basic research to technological applications and developments. It is the merit of the Dr. Wilhelm Heinrich and Else Heraeus-Stiftung to promote such a transfer by organizing high standard seminars mostly held at the "Physikzentrum" in Bad Honnef near Bonn. The present book has been stimulated by one of these seminars assembling most of the invited speakers as co-authors. The editor appreciates the cooperation of his colleagues contributing to this book. H. Oechsner Kaiserslautern, April 1984 v Contents 1. Introduction. By H. Oechsner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1. 1 Requirements for Thin Film and In-Depth Analysis . . . . . . . . . . . . . . . . . . . 1 1. 2 Object and Outline of the Book . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 4 References 2. The Application of Beam and Diffraction Techniques to Thin Film and Surface Micro-Analysis. By H. W. Werner (With 25 Figures) . . . . . . . . . . . . . . . . 5 2. 1 Methods to Determine Chemical Structures in Material Research 5 2. 2 Selected Analytical Features Used to Determine Chemical Structures 9 2. 2. 1 Depth Profiling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 9 a) Destructive Depth Profiling b) Nondestructive Methods for Depth and Thin Film Analysis 15 19 2. 2. 2 Microspot Analysis and Element Imaging 2. 3 Determining Physical Structures in Material Research . . . . . . . . . . . . . . . 27 2. 3. 1 X-Ray Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 2. 3. 2 X-Ray Double Crystal Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 2. 3 |
Beschreibung: | 1 Online-Ressource (XII, 208 p) |
ISBN: | 9783642464997 9783642465017 |
ISSN: | 0342-6793 |
DOI: | 10.1007/978-3-642-46499-7 |
Internformat
MARC
LEADER | 00000nmm a2200000zcb4500 | ||
---|---|---|---|
001 | BV042413161 | ||
003 | DE-604 | ||
005 | 20170925 | ||
007 | cr|uuu---uuuuu | ||
008 | 150316s1984 |||| o||u| ||||||eng d | ||
020 | |a 9783642464997 |c Online |9 978-3-642-46499-7 | ||
020 | |a 9783642465017 |c Print |9 978-3-642-46501-7 | ||
024 | 7 | |a 10.1007/978-3-642-46499-7 |2 doi | |
035 | |a (OCoLC)863954913 | ||
035 | |a (DE-599)BVBBV042413161 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-91 |a DE-83 | ||
082 | 0 | |a 620.44 |2 23 | |
084 | |a PHY 000 |2 stub | ||
245 | 1 | 0 | |a Thin Film and Depth Profile Analysis |c edited by Hans Oechsner |
246 | 1 | 3 | |a With contributions by numerous experts |
264 | 1 | |a Berlin, Heidelberg |b Springer Berlin Heidelberg |c 1984 | |
300 | |a 1 Online-Ressource (XII, 208 p) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 1 | |a Topics in Current Physics |v 37 |x 0342-6793 | |
500 | |a The characterization of thin films and solid interfaces as well as the determination of concentration profiles in thin solid layers is one of the fields which require a rapid transfer of the results from basic research to technological applications and developments. It is the merit of the Dr. Wilhelm Heinrich and Else Heraeus-Stiftung to promote such a transfer by organizing high standard seminars mostly held at the "Physikzentrum" in Bad Honnef near Bonn. The present book has been stimulated by one of these seminars assembling most of the invited speakers as co-authors. The editor appreciates the cooperation of his colleagues contributing to this book. H. Oechsner Kaiserslautern, April 1984 v Contents 1. Introduction. By H. Oechsner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1. 1 Requirements for Thin Film and In-Depth Analysis . . . . . . . . . . . . . . . . . . . 1 1. 2 Object and Outline of the Book . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 4 References 2. The Application of Beam and Diffraction Techniques to Thin Film and Surface Micro-Analysis. By H. W. Werner (With 25 Figures) . . . . . . . . . . . . . . . . 5 2. 1 Methods to Determine Chemical Structures in Material Research 5 2. 2 Selected Analytical Features Used to Determine Chemical Structures 9 2. 2. 1 Depth Profiling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 9 a) Destructive Depth Profiling b) Nondestructive Methods for Depth and Thin Film Analysis 15 19 2. 2. 2 Microspot Analysis and Element Imaging 2. 3 Determining Physical Structures in Material Research . . . . . . . . . . . . . . . 27 2. 3. 1 X-Ray Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 2. 3. 2 X-Ray Double Crystal Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 2. 3 | ||
650 | 4 | |a Chemistry, Physical organic | |
650 | 4 | |a Surfaces (Physics) | |
650 | 4 | |a Materials Science | |
650 | 4 | |a Surfaces and Interfaces, Thin Films | |
650 | 4 | |a Solid State Physics | |
650 | 4 | |a Spectroscopy and Microscopy | |
650 | 4 | |a Physical Chemistry | |
650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Tiefenprofilmessung |0 (DE-588)4185422-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Oberflächenchemie |0 (DE-588)4126166-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Oberflächenanalyse |0 (DE-588)4172243-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
655 | 7 | |8 1\p |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
689 | 0 | 1 | |a Oberflächenchemie |0 (DE-588)4126166-5 |D s |
689 | 0 | 2 | |a Sputtern |0 (DE-588)4182614-0 |D s |
689 | 0 | |8 2\p |5 DE-604 | |
689 | 1 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
689 | 1 | 1 | |a Oberflächenanalyse |0 (DE-588)4172243-7 |D s |
689 | 1 | |8 3\p |5 DE-604 | |
689 | 2 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
689 | 2 | 1 | |a Tiefenprofilmessung |0 (DE-588)4185422-6 |D s |
689 | 2 | |8 4\p |5 DE-604 | |
700 | 1 | |a Oechsner, Hans |4 edt | |
830 | 0 | |a Topics in Current Physics |v 37 |w (DE-604)BV000000233 |9 37 | |
856 | 4 | 0 | |u https://doi.org/10.1007/978-3-642-46499-7 |x Verlag |3 Volltext |
912 | |a ZDB-2-PHA |a ZDB-2-BAE | ||
940 | 1 | |q ZDB-2-PHA_Archive | |
999 | |a oai:aleph.bib-bvb.de:BVB01-027848654 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
883 | 1 | |8 3\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
883 | 1 | |8 4\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk |
Datensatz im Suchindex
_version_ | 1804153077014462464 |
---|---|
any_adam_object | |
author2 | Oechsner, Hans |
author2_role | edt |
author2_variant | h o ho |
author_facet | Oechsner, Hans |
building | Verbundindex |
bvnumber | BV042413161 |
classification_tum | PHY 000 |
collection | ZDB-2-PHA ZDB-2-BAE |
ctrlnum | (OCoLC)863954913 (DE-599)BVBBV042413161 |
dewey-full | 620.44 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620.44 |
dewey-search | 620.44 |
dewey-sort | 3620.44 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik |
doi_str_mv | 10.1007/978-3-642-46499-7 |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>04764nmm a2200721zcb4500</leader><controlfield tag="001">BV042413161</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20170925 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150316s1984 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642464997</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-642-46499-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642465017</subfield><subfield code="c">Print</subfield><subfield code="9">978-3-642-46501-7</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-642-46499-7</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)863954913</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042413161</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.44</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Thin Film and Depth Profile Analysis</subfield><subfield code="c">edited by Hans Oechsner</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">With contributions by numerous experts</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin, Heidelberg</subfield><subfield code="b">Springer Berlin Heidelberg</subfield><subfield code="c">1984</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XII, 208 p)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Topics in Current Physics</subfield><subfield code="v">37</subfield><subfield code="x">0342-6793</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">The characterization of thin films and solid interfaces as well as the determination of concentration profiles in thin solid layers is one of the fields which require a rapid transfer of the results from basic research to technological applications and developments. It is the merit of the Dr. Wilhelm Heinrich and Else Heraeus-Stiftung to promote such a transfer by organizing high standard seminars mostly held at the "Physikzentrum" in Bad Honnef near Bonn. The present book has been stimulated by one of these seminars assembling most of the invited speakers as co-authors. The editor appreciates the cooperation of his colleagues contributing to this book. H. Oechsner Kaiserslautern, April 1984 v Contents 1. Introduction. By H. Oechsner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1. 1 Requirements for Thin Film and In-Depth Analysis . . . . . . . . . . . . . . . . . . . 1 1. 2 Object and Outline of the Book . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 4 References 2. The Application of Beam and Diffraction Techniques to Thin Film and Surface Micro-Analysis. By H. W. Werner (With 25 Figures) . . . . . . . . . . . . . . . . 5 2. 1 Methods to Determine Chemical Structures in Material Research 5 2. 2 Selected Analytical Features Used to Determine Chemical Structures 9 2. 2. 1 Depth Profiling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 9 a) Destructive Depth Profiling b) Nondestructive Methods for Depth and Thin Film Analysis 15 19 2. 2. 2 Microspot Analysis and Element Imaging 2. 3 Determining Physical Structures in Material Research . . . . . . . . . . . . . . . 27 2. 3. 1 X-Ray Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 2. 3. 2 X-Ray Double Crystal Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 2. 3</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Chemistry, Physical organic</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surfaces (Physics)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Materials Science</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surfaces and Interfaces, Thin Films</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Solid State Physics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Spectroscopy and Microscopy</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Physical Chemistry</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Tiefenprofilmessung</subfield><subfield code="0">(DE-588)4185422-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Oberflächenchemie</subfield><subfield code="0">(DE-588)4126166-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Oberflächenanalyse</subfield><subfield code="0">(DE-588)4172243-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="8">1\p</subfield><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Oberflächenchemie</subfield><subfield code="0">(DE-588)4126166-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Oberflächenanalyse</subfield><subfield code="0">(DE-588)4172243-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">3\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Tiefenprofilmessung</subfield><subfield code="0">(DE-588)4185422-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="8">4\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Oechsner, Hans</subfield><subfield code="4">edt</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Topics in Current Physics</subfield><subfield code="v">37</subfield><subfield code="w">(DE-604)BV000000233</subfield><subfield code="9">37</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-642-46499-7</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-PHA</subfield><subfield code="a">ZDB-2-BAE</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-PHA_Archive</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027848654</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">3\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">4\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
genre | 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content |
genre_facet | Aufsatzsammlung |
id | DE-604.BV042413161 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:20:52Z |
institution | BVB |
isbn | 9783642464997 9783642465017 |
issn | 0342-6793 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027848654 |
oclc_num | 863954913 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM DE-83 |
owner_facet | DE-91 DE-BY-TUM DE-83 |
physical | 1 Online-Ressource (XII, 208 p) |
psigel | ZDB-2-PHA ZDB-2-BAE ZDB-2-PHA_Archive |
publishDate | 1984 |
publishDateSearch | 1984 |
publishDateSort | 1984 |
publisher | Springer Berlin Heidelberg |
record_format | marc |
series | Topics in Current Physics |
series2 | Topics in Current Physics |
spelling | Thin Film and Depth Profile Analysis edited by Hans Oechsner With contributions by numerous experts Berlin, Heidelberg Springer Berlin Heidelberg 1984 1 Online-Ressource (XII, 208 p) txt rdacontent c rdamedia cr rdacarrier Topics in Current Physics 37 0342-6793 The characterization of thin films and solid interfaces as well as the determination of concentration profiles in thin solid layers is one of the fields which require a rapid transfer of the results from basic research to technological applications and developments. It is the merit of the Dr. Wilhelm Heinrich and Else Heraeus-Stiftung to promote such a transfer by organizing high standard seminars mostly held at the "Physikzentrum" in Bad Honnef near Bonn. The present book has been stimulated by one of these seminars assembling most of the invited speakers as co-authors. The editor appreciates the cooperation of his colleagues contributing to this book. H. Oechsner Kaiserslautern, April 1984 v Contents 1. Introduction. By H. Oechsner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1. 1 Requirements for Thin Film and In-Depth Analysis . . . . . . . . . . . . . . . . . . . 1 1. 2 Object and Outline of the Book . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 4 References 2. The Application of Beam and Diffraction Techniques to Thin Film and Surface Micro-Analysis. By H. W. Werner (With 25 Figures) . . . . . . . . . . . . . . . . 5 2. 1 Methods to Determine Chemical Structures in Material Research 5 2. 2 Selected Analytical Features Used to Determine Chemical Structures 9 2. 2. 1 Depth Profiling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 9 a) Destructive Depth Profiling b) Nondestructive Methods for Depth and Thin Film Analysis 15 19 2. 2. 2 Microspot Analysis and Element Imaging 2. 3 Determining Physical Structures in Material Research . . . . . . . . . . . . . . . 27 2. 3. 1 X-Ray Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 2. 3. 2 X-Ray Double Crystal Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 2. 3 Chemistry, Physical organic Surfaces (Physics) Materials Science Surfaces and Interfaces, Thin Films Solid State Physics Spectroscopy and Microscopy Physical Chemistry Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Tiefenprofilmessung (DE-588)4185422-6 gnd rswk-swf Oberflächenchemie (DE-588)4126166-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Oberflächenanalyse (DE-588)4172243-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Dünnschichttechnik (DE-588)4136339-5 s Oberflächenchemie (DE-588)4126166-5 s Sputtern (DE-588)4182614-0 s 2\p DE-604 Dünne Schicht (DE-588)4136925-7 s Oberflächenanalyse (DE-588)4172243-7 s 3\p DE-604 Tiefenprofilmessung (DE-588)4185422-6 s 4\p DE-604 Oechsner, Hans edt Topics in Current Physics 37 (DE-604)BV000000233 37 https://doi.org/10.1007/978-3-642-46499-7 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Thin Film and Depth Profile Analysis Topics in Current Physics Chemistry, Physical organic Surfaces (Physics) Materials Science Surfaces and Interfaces, Thin Films Solid State Physics Spectroscopy and Microscopy Physical Chemistry Dünne Schicht (DE-588)4136925-7 gnd Tiefenprofilmessung (DE-588)4185422-6 gnd Oberflächenchemie (DE-588)4126166-5 gnd Sputtern (DE-588)4182614-0 gnd Oberflächenanalyse (DE-588)4172243-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
subject_GND | (DE-588)4136925-7 (DE-588)4185422-6 (DE-588)4126166-5 (DE-588)4182614-0 (DE-588)4172243-7 (DE-588)4136339-5 (DE-588)4143413-4 |
title | Thin Film and Depth Profile Analysis |
title_alt | With contributions by numerous experts |
title_auth | Thin Film and Depth Profile Analysis |
title_exact_search | Thin Film and Depth Profile Analysis |
title_full | Thin Film and Depth Profile Analysis edited by Hans Oechsner |
title_fullStr | Thin Film and Depth Profile Analysis edited by Hans Oechsner |
title_full_unstemmed | Thin Film and Depth Profile Analysis edited by Hans Oechsner |
title_short | Thin Film and Depth Profile Analysis |
title_sort | thin film and depth profile analysis |
topic | Chemistry, Physical organic Surfaces (Physics) Materials Science Surfaces and Interfaces, Thin Films Solid State Physics Spectroscopy and Microscopy Physical Chemistry Dünne Schicht (DE-588)4136925-7 gnd Tiefenprofilmessung (DE-588)4185422-6 gnd Oberflächenchemie (DE-588)4126166-5 gnd Sputtern (DE-588)4182614-0 gnd Oberflächenanalyse (DE-588)4172243-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
topic_facet | Chemistry, Physical organic Surfaces (Physics) Materials Science Surfaces and Interfaces, Thin Films Solid State Physics Spectroscopy and Microscopy Physical Chemistry Dünne Schicht Tiefenprofilmessung Oberflächenchemie Sputtern Oberflächenanalyse Dünnschichttechnik Aufsatzsammlung |
url | https://doi.org/10.1007/978-3-642-46499-7 |
volume_link | (DE-604)BV000000233 |
work_keys_str_mv | AT oechsnerhans thinfilmanddepthprofileanalysis AT oechsnerhans withcontributionsbynumerousexperts |