Oriented Crystallization on Amorphous Substrates:
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Boston, MA
Springer US
1991
|
Schriftenreihe: | Microdevices, Physics and Fabrication Technologies
|
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | Present-day scienceand technology have become increasingly based on studies and applications of thin films. This is especiallytrue of solid-state physics, semiconduc tor electronics, integrated optics, computer science, and the like. In these fields, it is necessary to use filmswith an ordered structure, especiallysingle-crystallinefilms, because physical phenomena and effects in such films are most reproducible. Also, active parts of semiconductor and other devices and circuits are created, as a rule, in single-crystal bodies. To date, single-crystallinefilms have been mainly epitaxial (or heteroepitaxial); i.e., they have been grown on a single-crystalline substrate, and principal trends, e.g., in the evolution of integrated circuits (lCs), have been based on continuing reduction in feature size and increase in the number of components per chip. However, as the size decreases into the submicrometer range, technological and physical limitations in integrated electronics become more and more severe. It is generally believed that a feature size of about 0.1um will have a crucial character. In other words, the present two-dimensional ICs are anticipated to reach their limit of minimization in the near future, and it is realized that further increase of packing density and/or functions might depend on three-dimensional integration. To solve the problem, techniques for preparation of single-crystalline films on arbitrary (including amorphous) substrates are essential |
Beschreibung: | 1 Online-Ressource (XII, 370 p) |
ISBN: | 9781489925602 9781489925626 |
DOI: | 10.1007/978-1-4899-2560-2 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV042412608 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | cr|uuu---uuuuu | ||
008 | 150316s1991 |||| o||u| ||||||eng d | ||
020 | |a 9781489925602 |c Online |9 978-1-4899-2560-2 | ||
020 | |a 9781489925626 |c Print |9 978-1-4899-2562-6 | ||
024 | 7 | |a 10.1007/978-1-4899-2560-2 |2 doi | |
035 | |a (OCoLC)863898034 | ||
035 | |a (DE-599)BVBBV042412608 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-91 |a DE-83 | ||
082 | 0 | |a 621.3 |2 23 | |
084 | |a PHY 000 |2 stub | ||
100 | 1 | |a Givargizov, E. I. |e Verfasser |4 aut | |
245 | 1 | 0 | |a Oriented Crystallization on Amorphous Substrates |c by E. I. Givargizov |
264 | 1 | |a Boston, MA |b Springer US |c 1991 | |
300 | |a 1 Online-Ressource (XII, 370 p) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 0 | |a Microdevices, Physics and Fabrication Technologies | |
500 | |a Present-day scienceand technology have become increasingly based on studies and applications of thin films. This is especiallytrue of solid-state physics, semiconduc tor electronics, integrated optics, computer science, and the like. In these fields, it is necessary to use filmswith an ordered structure, especiallysingle-crystallinefilms, because physical phenomena and effects in such films are most reproducible. Also, active parts of semiconductor and other devices and circuits are created, as a rule, in single-crystal bodies. To date, single-crystallinefilms have been mainly epitaxial (or heteroepitaxial); i.e., they have been grown on a single-crystalline substrate, and principal trends, e.g., in the evolution of integrated circuits (lCs), have been based on continuing reduction in feature size and increase in the number of components per chip. However, as the size decreases into the submicrometer range, technological and physical limitations in integrated electronics become more and more severe. It is generally believed that a feature size of about 0.1um will have a crucial character. In other words, the present two-dimensional ICs are anticipated to reach their limit of minimization in the near future, and it is realized that further increase of packing density and/or functions might depend on three-dimensional integration. To solve the problem, techniques for preparation of single-crystalline films on arbitrary (including amorphous) substrates are essential | ||
650 | 4 | |a Engineering | |
650 | 4 | |a Computer engineering | |
650 | 4 | |a Optical materials | |
650 | 4 | |a Electrical Engineering | |
650 | 4 | |a Optical and Electronic Materials | |
650 | 4 | |a Ingenieurwissenschaften | |
856 | 4 | 0 | |u https://doi.org/10.1007/978-1-4899-2560-2 |x Verlag |3 Volltext |
912 | |a ZDB-2-PHA |a ZDB-2-BAE | ||
940 | 1 | |q ZDB-2-PHA_Archive | |
999 | |a oai:aleph.bib-bvb.de:BVB01-027848101 |
Datensatz im Suchindex
_version_ | 1804153075632439297 |
---|---|
any_adam_object | |
author | Givargizov, E. I. |
author_facet | Givargizov, E. I. |
author_role | aut |
author_sort | Givargizov, E. I. |
author_variant | e i g ei eig |
building | Verbundindex |
bvnumber | BV042412608 |
classification_tum | PHY 000 |
collection | ZDB-2-PHA ZDB-2-BAE |
ctrlnum | (OCoLC)863898034 (DE-599)BVBBV042412608 |
dewey-full | 621.3 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.3 |
dewey-search | 621.3 |
dewey-sort | 3621.3 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
doi_str_mv | 10.1007/978-1-4899-2560-2 |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02870nmm a2200433zc 4500</leader><controlfield tag="001">BV042412608</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150316s1991 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781489925602</subfield><subfield code="c">Online</subfield><subfield code="9">978-1-4899-2560-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781489925626</subfield><subfield code="c">Print</subfield><subfield code="9">978-1-4899-2562-6</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-1-4899-2560-2</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)863898034</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042412608</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Givargizov, E. I.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Oriented Crystallization on Amorphous Substrates</subfield><subfield code="c">by E. I. Givargizov</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boston, MA</subfield><subfield code="b">Springer US</subfield><subfield code="c">1991</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XII, 370 p)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Microdevices, Physics and Fabrication Technologies</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Present-day scienceand technology have become increasingly based on studies and applications of thin films. This is especiallytrue of solid-state physics, semiconduc tor electronics, integrated optics, computer science, and the like. In these fields, it is necessary to use filmswith an ordered structure, especiallysingle-crystallinefilms, because physical phenomena and effects in such films are most reproducible. Also, active parts of semiconductor and other devices and circuits are created, as a rule, in single-crystal bodies. To date, single-crystallinefilms have been mainly epitaxial (or heteroepitaxial); i.e., they have been grown on a single-crystalline substrate, and principal trends, e.g., in the evolution of integrated circuits (lCs), have been based on continuing reduction in feature size and increase in the number of components per chip. However, as the size decreases into the submicrometer range, technological and physical limitations in integrated electronics become more and more severe. It is generally believed that a feature size of about 0.1um will have a crucial character. In other words, the present two-dimensional ICs are anticipated to reach their limit of minimization in the near future, and it is realized that further increase of packing density and/or functions might depend on three-dimensional integration. To solve the problem, techniques for preparation of single-crystalline films on arbitrary (including amorphous) substrates are essential</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Computer engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electrical Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical and Electronic Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ingenieurwissenschaften</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-1-4899-2560-2</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-PHA</subfield><subfield code="a">ZDB-2-BAE</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-PHA_Archive</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027848101</subfield></datafield></record></collection> |
id | DE-604.BV042412608 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:20:51Z |
institution | BVB |
isbn | 9781489925602 9781489925626 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027848101 |
oclc_num | 863898034 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM DE-83 |
owner_facet | DE-91 DE-BY-TUM DE-83 |
physical | 1 Online-Ressource (XII, 370 p) |
psigel | ZDB-2-PHA ZDB-2-BAE ZDB-2-PHA_Archive |
publishDate | 1991 |
publishDateSearch | 1991 |
publishDateSort | 1991 |
publisher | Springer US |
record_format | marc |
series2 | Microdevices, Physics and Fabrication Technologies |
spelling | Givargizov, E. I. Verfasser aut Oriented Crystallization on Amorphous Substrates by E. I. Givargizov Boston, MA Springer US 1991 1 Online-Ressource (XII, 370 p) txt rdacontent c rdamedia cr rdacarrier Microdevices, Physics and Fabrication Technologies Present-day scienceand technology have become increasingly based on studies and applications of thin films. This is especiallytrue of solid-state physics, semiconduc tor electronics, integrated optics, computer science, and the like. In these fields, it is necessary to use filmswith an ordered structure, especiallysingle-crystallinefilms, because physical phenomena and effects in such films are most reproducible. Also, active parts of semiconductor and other devices and circuits are created, as a rule, in single-crystal bodies. To date, single-crystallinefilms have been mainly epitaxial (or heteroepitaxial); i.e., they have been grown on a single-crystalline substrate, and principal trends, e.g., in the evolution of integrated circuits (lCs), have been based on continuing reduction in feature size and increase in the number of components per chip. However, as the size decreases into the submicrometer range, technological and physical limitations in integrated electronics become more and more severe. It is generally believed that a feature size of about 0.1um will have a crucial character. In other words, the present two-dimensional ICs are anticipated to reach their limit of minimization in the near future, and it is realized that further increase of packing density and/or functions might depend on three-dimensional integration. To solve the problem, techniques for preparation of single-crystalline films on arbitrary (including amorphous) substrates are essential Engineering Computer engineering Optical materials Electrical Engineering Optical and Electronic Materials Ingenieurwissenschaften https://doi.org/10.1007/978-1-4899-2560-2 Verlag Volltext |
spellingShingle | Givargizov, E. I. Oriented Crystallization on Amorphous Substrates Engineering Computer engineering Optical materials Electrical Engineering Optical and Electronic Materials Ingenieurwissenschaften |
title | Oriented Crystallization on Amorphous Substrates |
title_auth | Oriented Crystallization on Amorphous Substrates |
title_exact_search | Oriented Crystallization on Amorphous Substrates |
title_full | Oriented Crystallization on Amorphous Substrates by E. I. Givargizov |
title_fullStr | Oriented Crystallization on Amorphous Substrates by E. I. Givargizov |
title_full_unstemmed | Oriented Crystallization on Amorphous Substrates by E. I. Givargizov |
title_short | Oriented Crystallization on Amorphous Substrates |
title_sort | oriented crystallization on amorphous substrates |
topic | Engineering Computer engineering Optical materials Electrical Engineering Optical and Electronic Materials Ingenieurwissenschaften |
topic_facet | Engineering Computer engineering Optical materials Electrical Engineering Optical and Electronic Materials Ingenieurwissenschaften |
url | https://doi.org/10.1007/978-1-4899-2560-2 |
work_keys_str_mv | AT givargizovei orientedcrystallizationonamorphoussubstrates |