Rapid Thermal Processing of Semiconductors:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boston, MA
Springer US
1997
|
| Schriftenreihe: | Microdevices, Physics and Fabrication Technologies
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field |
| Beschreibung: | 1 Online-Ressource (XXII, 358 p) |
| ISBN: | 9781489918048 9781489918062 |
| DOI: | 10.1007/978-1-4899-1804-8 |
Internformat
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Datensatz im Suchindex
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| author | Borisenko, Victor E. |
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| discipline | Physik |
| doi_str_mv | 10.1007/978-1-4899-1804-8 |
| format | Electronic eBook |
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| indexdate | 2024-07-10T01:20:50Z |
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| isbn | 9781489918048 9781489918062 |
| language | English |
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| spelling | Borisenko, Victor E. Verfasser aut Rapid Thermal Processing of Semiconductors by Victor E. Borisenko, Peter J. Hesketh Boston, MA Springer US 1997 1 Online-Ressource (XXII, 358 p) txt rdacontent c rdamedia cr rdacarrier Microdevices, Physics and Fabrication Technologies Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field Optical materials Materials Science Optical and Electronic Materials Solid State Physics Spectroscopy and Microscopy Rapid thermal processing (DE-588)4347011-7 gnd rswk-swf Thermische Verfahrenstechnik (DE-588)4117203-6 gnd rswk-swf Supraleiter (DE-588)4184140-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Supraleiter (DE-588)4184140-2 s Thermische Verfahrenstechnik (DE-588)4117203-6 s 1\p DE-604 Halbleiter (DE-588)4022993-2 s Rapid thermal processing (DE-588)4347011-7 s 2\p DE-604 Hesketh, Peter J. Sonstige oth https://doi.org/10.1007/978-1-4899-1804-8 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Borisenko, Victor E. Rapid Thermal Processing of Semiconductors Optical materials Materials Science Optical and Electronic Materials Solid State Physics Spectroscopy and Microscopy Rapid thermal processing (DE-588)4347011-7 gnd Thermische Verfahrenstechnik (DE-588)4117203-6 gnd Supraleiter (DE-588)4184140-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4347011-7 (DE-588)4117203-6 (DE-588)4184140-2 (DE-588)4022993-2 |
| title | Rapid Thermal Processing of Semiconductors |
| title_auth | Rapid Thermal Processing of Semiconductors |
| title_exact_search | Rapid Thermal Processing of Semiconductors |
| title_full | Rapid Thermal Processing of Semiconductors by Victor E. Borisenko, Peter J. Hesketh |
| title_fullStr | Rapid Thermal Processing of Semiconductors by Victor E. Borisenko, Peter J. Hesketh |
| title_full_unstemmed | Rapid Thermal Processing of Semiconductors by Victor E. Borisenko, Peter J. Hesketh |
| title_short | Rapid Thermal Processing of Semiconductors |
| title_sort | rapid thermal processing of semiconductors |
| topic | Optical materials Materials Science Optical and Electronic Materials Solid State Physics Spectroscopy and Microscopy Rapid thermal processing (DE-588)4347011-7 gnd Thermische Verfahrenstechnik (DE-588)4117203-6 gnd Supraleiter (DE-588)4184140-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Optical materials Materials Science Optical and Electronic Materials Solid State Physics Spectroscopy and Microscopy Rapid thermal processing Thermische Verfahrenstechnik Supraleiter Halbleiter |
| url | https://doi.org/10.1007/978-1-4899-1804-8 |
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