Electron Beam Testing Technology:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boston, MA
Springer US
1993
|
| Schriftenreihe: | Microdevices, Physics and Fabrication Technologies
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age |
| Beschreibung: | 1 Online-Ressource (XVI, 462 p) |
| ISBN: | 9781489915221 9781489915245 |
| DOI: | 10.1007/978-1-4899-1522-1 |
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Datensatz im Suchindex
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| author | Thong, John T. L. |
| author_facet | Thong, John T. L. |
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| dewey-tens | 530 - Physics |
| discipline | Physik |
| doi_str_mv | 10.1007/978-1-4899-1522-1 |
| format | Electronic eBook |
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| indexdate | 2024-07-10T01:20:50Z |
| institution | BVB |
| isbn | 9781489915221 9781489915245 |
| language | English |
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| spelling | Thong, John T. L. Verfasser aut Electron Beam Testing Technology edited by John T. L. Thong Boston, MA Springer US 1993 1 Online-Ressource (XVI, 462 p) txt rdacontent c rdamedia cr rdacarrier Microdevices, Physics and Fabrication Technologies Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age Physics Crystallography Computer engineering Optical materials Solid State Physics Spectroscopy and Microscopy Condensed Matter Physics Electrical Engineering Optical and Electronic Materials Test (DE-588)4059549-3 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Elektronenmikroskop (DE-588)4014326-0 gnd rswk-swf Test (DE-588)4059549-3 s 1\p DE-604 Elektronenmikroskop (DE-588)4014326-0 s 2\p DE-604 Halbleiter (DE-588)4022993-2 s 3\p DE-604 https://doi.org/10.1007/978-1-4899-1522-1 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Thong, John T. L. Electron Beam Testing Technology Physics Crystallography Computer engineering Optical materials Solid State Physics Spectroscopy and Microscopy Condensed Matter Physics Electrical Engineering Optical and Electronic Materials Test (DE-588)4059549-3 gnd Halbleiter (DE-588)4022993-2 gnd Elektronenmikroskop (DE-588)4014326-0 gnd |
| subject_GND | (DE-588)4059549-3 (DE-588)4022993-2 (DE-588)4014326-0 |
| title | Electron Beam Testing Technology |
| title_auth | Electron Beam Testing Technology |
| title_exact_search | Electron Beam Testing Technology |
| title_full | Electron Beam Testing Technology edited by John T. L. Thong |
| title_fullStr | Electron Beam Testing Technology edited by John T. L. Thong |
| title_full_unstemmed | Electron Beam Testing Technology edited by John T. L. Thong |
| title_short | Electron Beam Testing Technology |
| title_sort | electron beam testing technology |
| topic | Physics Crystallography Computer engineering Optical materials Solid State Physics Spectroscopy and Microscopy Condensed Matter Physics Electrical Engineering Optical and Electronic Materials Test (DE-588)4059549-3 gnd Halbleiter (DE-588)4022993-2 gnd Elektronenmikroskop (DE-588)4014326-0 gnd |
| topic_facet | Physics Crystallography Computer engineering Optical materials Solid State Physics Spectroscopy and Microscopy Condensed Matter Physics Electrical Engineering Optical and Electronic Materials Test Halbleiter Elektronenmikroskop |
| url | https://doi.org/10.1007/978-1-4899-1522-1 |
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