Microwave discharges: Fundamentals and Applications
Gespeichert in:
Weitere Verfasser: | , |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Boston, MA
Springer US
1993
|
Schriftenreihe: | NATO: [NATO ASI series / B]
302 |
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | This book is the result of a NATO Advanced Research Workshop held in Vimeiro, Portugal, in May 1992. The objectives of this Workshop were: i) to promote exchange of knowledge between experts in various fields of discharge modeling, plasma diagnostics and microwave plasma applications; ii) to assess the state-of-the-art in this field from a multidisciplinary viewpoint; iii) to identify basic points needing clarification and to estab lish basic guidelines for future research; iv) to compare the properties of microwave dis charges to those of RF discharges, as plasma sources for specific applications. Most of the contributors to this book are well known scientists in the field of mi crowave discharge sources, modeling, diagnostics and applications. The book provides an up-to-date review in this field which should be useful for both the fundamentalists and those using these systems in applications such as surface treatment and elemental analysis. We are gmteful to a number of organizations for providing the fmancial assistance that made the Workshop possible. Foremost is the NATO Scientific Affairs Division, which provided the major contribution for the Workshop. In addition, the following Por tuguese sources made contributions: Instituto Nacional de Investiga~iio Cientifica, Junta Nacional de Investiga~iio Cientifica e Tecnologica, Centro de Electrodinamica da Univer sidade Tecnica de Lisboa, Instituto Superior Tecnico, Banco Nacional Ultmmarino, and Regiiio de Turismo do Oeste |
Beschreibung: | 1 Online-Ressource (IX, 564 p) |
ISBN: | 9781489911308 9781489911322 |
DOI: | 10.1007/978-1-4899-1130-8 |
Internformat
MARC
LEADER | 00000nmm a2200000zcb4500 | ||
---|---|---|---|
001 | BV042412509 | ||
003 | DE-604 | ||
005 | 20210903 | ||
006 | a |||| 10||| | ||
007 | cr|uuu---uuuuu | ||
008 | 150316s1993 |||| o||u| ||||||eng d | ||
020 | |a 9781489911308 |c Online |9 978-1-4899-1130-8 | ||
020 | |a 9781489911322 |c Print |9 978-1-4899-1132-2 | ||
024 | 7 | |a 10.1007/978-1-4899-1130-8 |2 doi | |
035 | |a (OCoLC)860184521 | ||
035 | |a (DE-599)BVBBV042412509 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-91 |a DE-83 | ||
082 | 0 | |a 541 |2 23 | |
084 | |a UR 8200 |0 (DE-625)146643: |2 rvk | ||
084 | |a PHY 000 |2 stub | ||
245 | 1 | 0 | |a Microwave discharges |b Fundamentals and Applications |c edited by Carlos M. Ferreira, Michel Moisan |
246 | 1 | 3 | |a Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992 |
264 | 1 | |a Boston, MA |b Springer US |c 1993 | |
300 | |a 1 Online-Ressource (IX, 564 p) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 1 | |a NATO: [NATO ASI series / B] |v 302 | |
500 | |a This book is the result of a NATO Advanced Research Workshop held in Vimeiro, Portugal, in May 1992. The objectives of this Workshop were: i) to promote exchange of knowledge between experts in various fields of discharge modeling, plasma diagnostics and microwave plasma applications; ii) to assess the state-of-the-art in this field from a multidisciplinary viewpoint; iii) to identify basic points needing clarification and to estab lish basic guidelines for future research; iv) to compare the properties of microwave dis charges to those of RF discharges, as plasma sources for specific applications. Most of the contributors to this book are well known scientists in the field of mi crowave discharge sources, modeling, diagnostics and applications. The book provides an up-to-date review in this field which should be useful for both the fundamentalists and those using these systems in applications such as surface treatment and elemental analysis. We are gmteful to a number of organizations for providing the fmancial assistance that made the Workshop possible. Foremost is the NATO Scientific Affairs Division, which provided the major contribution for the Workshop. In addition, the following Por tuguese sources made contributions: Instituto Nacional de Investiga~iio Cientifica, Junta Nacional de Investiga~iio Cientifica e Tecnologica, Centro de Electrodinamica da Univer sidade Tecnica de Lisboa, Instituto Superior Tecnico, Banco Nacional Ultmmarino, and Regiiio de Turismo do Oeste | ||
650 | 4 | |a Chemistry | |
650 | 4 | |a Chemistry, Physical organic | |
650 | 4 | |a Nuclear physics | |
650 | 4 | |a Physical Chemistry | |
650 | 4 | |a Atomic, Molecular, Optical and Plasma Physics | |
650 | 4 | |a Nuclear Physics, Heavy Ions, Hadrons | |
650 | 4 | |a Classical Continuum Physics | |
650 | 4 | |a Chemie | |
650 | 0 | 7 | |a Entladung |0 (DE-588)4188289-1 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Hochfrequenzentladung |0 (DE-588)4298594-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Plasmadiagnostik |0 (DE-588)4260997-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Mikrowelle |0 (DE-588)4039246-6 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1992 |z Vimeiro |2 gnd-content | |
689 | 0 | 0 | |a Mikrowelle |0 (DE-588)4039246-6 |D s |
689 | 0 | 1 | |a Entladung |0 (DE-588)4188289-1 |D s |
689 | 0 | 2 | |a Plasmadiagnostik |0 (DE-588)4260997-5 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Hochfrequenzentladung |0 (DE-588)4298594-8 |D s |
689 | 1 | |5 DE-604 | |
700 | 1 | |a Ferreira, Carlos M. |4 edt | |
700 | 1 | |a Moisan, Michel |4 edt | |
776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 0-306-44355-4 |
810 | 2 | |a B] |t NATO: [NATO ASI series |v 302 |w (DE-604)BV005876464 |9 302 | |
856 | 4 | 0 | |u https://doi.org/10.1007/978-1-4899-1130-8 |x Verlag |3 Volltext |
912 | |a ZDB-2-PHA |a ZDB-2-BAE | ||
940 | 1 | |q ZDB-2-PHA_Archive | |
999 | |a oai:aleph.bib-bvb.de:BVB01-027848002 |
Datensatz im Suchindex
_version_ | 1804153075394412544 |
---|---|
any_adam_object | |
author2 | Ferreira, Carlos M. Moisan, Michel |
author2_role | edt edt |
author2_variant | c m f cm cmf m m mm |
author_facet | Ferreira, Carlos M. Moisan, Michel |
building | Verbundindex |
bvnumber | BV042412509 |
classification_rvk | UR 8200 |
classification_tum | PHY 000 |
collection | ZDB-2-PHA ZDB-2-BAE |
ctrlnum | (OCoLC)860184521 (DE-599)BVBBV042412509 |
dewey-full | 541 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 541 - Physical chemistry |
dewey-raw | 541 |
dewey-search | 541 |
dewey-sort | 3541 |
dewey-tens | 540 - Chemistry and allied sciences |
discipline | Chemie / Pharmazie Physik |
doi_str_mv | 10.1007/978-1-4899-1130-8 |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03915nmm a2200661zcb4500</leader><controlfield tag="001">BV042412509</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20210903 </controlfield><controlfield tag="006">a |||| 10||| </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150316s1993 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781489911308</subfield><subfield code="c">Online</subfield><subfield code="9">978-1-4899-1130-8</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781489911322</subfield><subfield code="c">Print</subfield><subfield code="9">978-1-4899-1132-2</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-1-4899-1130-8</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)860184521</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042412509</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">541</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UR 8200</subfield><subfield code="0">(DE-625)146643:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microwave discharges</subfield><subfield code="b">Fundamentals and Applications</subfield><subfield code="c">edited by Carlos M. Ferreira, Michel Moisan</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boston, MA</subfield><subfield code="b">Springer US</subfield><subfield code="c">1993</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (IX, 564 p)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">NATO: [NATO ASI series / B]</subfield><subfield code="v">302</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">This book is the result of a NATO Advanced Research Workshop held in Vimeiro, Portugal, in May 1992. The objectives of this Workshop were: i) to promote exchange of knowledge between experts in various fields of discharge modeling, plasma diagnostics and microwave plasma applications; ii) to assess the state-of-the-art in this field from a multidisciplinary viewpoint; iii) to identify basic points needing clarification and to estab lish basic guidelines for future research; iv) to compare the properties of microwave dis charges to those of RF discharges, as plasma sources for specific applications. Most of the contributors to this book are well known scientists in the field of mi crowave discharge sources, modeling, diagnostics and applications. The book provides an up-to-date review in this field which should be useful for both the fundamentalists and those using these systems in applications such as surface treatment and elemental analysis. We are gmteful to a number of organizations for providing the fmancial assistance that made the Workshop possible. Foremost is the NATO Scientific Affairs Division, which provided the major contribution for the Workshop. In addition, the following Por tuguese sources made contributions: Instituto Nacional de Investiga~iio Cientifica, Junta Nacional de Investiga~iio Cientifica e Tecnologica, Centro de Electrodinamica da Univer sidade Tecnica de Lisboa, Instituto Superior Tecnico, Banco Nacional Ultmmarino, and Regiiio de Turismo do Oeste</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Chemistry</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Chemistry, Physical organic</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nuclear physics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Physical Chemistry</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Atomic, Molecular, Optical and Plasma Physics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nuclear Physics, Heavy Ions, Hadrons</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Classical Continuum Physics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Chemie</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Entladung</subfield><subfield code="0">(DE-588)4188289-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Hochfrequenzentladung</subfield><subfield code="0">(DE-588)4298594-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmadiagnostik</subfield><subfield code="0">(DE-588)4260997-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrowelle</subfield><subfield code="0">(DE-588)4039246-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1992</subfield><subfield code="z">Vimeiro</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrowelle</subfield><subfield code="0">(DE-588)4039246-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Entladung</subfield><subfield code="0">(DE-588)4188289-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Plasmadiagnostik</subfield><subfield code="0">(DE-588)4260997-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Hochfrequenzentladung</subfield><subfield code="0">(DE-588)4298594-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ferreira, Carlos M.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Moisan, Michel</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">0-306-44355-4</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">B]</subfield><subfield code="t">NATO: [NATO ASI series</subfield><subfield code="v">302</subfield><subfield code="w">(DE-604)BV005876464</subfield><subfield code="9">302</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-1-4899-1130-8</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-PHA</subfield><subfield code="a">ZDB-2-BAE</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-PHA_Archive</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027848002</subfield></datafield></record></collection> |
genre | (DE-588)1071861417 Konferenzschrift 1992 Vimeiro gnd-content |
genre_facet | Konferenzschrift 1992 Vimeiro |
id | DE-604.BV042412509 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:20:50Z |
institution | BVB |
isbn | 9781489911308 9781489911322 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027848002 |
oclc_num | 860184521 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM DE-83 |
owner_facet | DE-91 DE-BY-TUM DE-83 |
physical | 1 Online-Ressource (IX, 564 p) |
psigel | ZDB-2-PHA ZDB-2-BAE ZDB-2-PHA_Archive |
publishDate | 1993 |
publishDateSearch | 1993 |
publishDateSort | 1993 |
publisher | Springer US |
record_format | marc |
series2 | NATO: [NATO ASI series / B] |
spelling | Microwave discharges Fundamentals and Applications edited by Carlos M. Ferreira, Michel Moisan Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992 Boston, MA Springer US 1993 1 Online-Ressource (IX, 564 p) txt rdacontent c rdamedia cr rdacarrier NATO: [NATO ASI series / B] 302 This book is the result of a NATO Advanced Research Workshop held in Vimeiro, Portugal, in May 1992. The objectives of this Workshop were: i) to promote exchange of knowledge between experts in various fields of discharge modeling, plasma diagnostics and microwave plasma applications; ii) to assess the state-of-the-art in this field from a multidisciplinary viewpoint; iii) to identify basic points needing clarification and to estab lish basic guidelines for future research; iv) to compare the properties of microwave dis charges to those of RF discharges, as plasma sources for specific applications. Most of the contributors to this book are well known scientists in the field of mi crowave discharge sources, modeling, diagnostics and applications. The book provides an up-to-date review in this field which should be useful for both the fundamentalists and those using these systems in applications such as surface treatment and elemental analysis. We are gmteful to a number of organizations for providing the fmancial assistance that made the Workshop possible. Foremost is the NATO Scientific Affairs Division, which provided the major contribution for the Workshop. In addition, the following Por tuguese sources made contributions: Instituto Nacional de Investiga~iio Cientifica, Junta Nacional de Investiga~iio Cientifica e Tecnologica, Centro de Electrodinamica da Univer sidade Tecnica de Lisboa, Instituto Superior Tecnico, Banco Nacional Ultmmarino, and Regiiio de Turismo do Oeste Chemistry Chemistry, Physical organic Nuclear physics Physical Chemistry Atomic, Molecular, Optical and Plasma Physics Nuclear Physics, Heavy Ions, Hadrons Classical Continuum Physics Chemie Entladung (DE-588)4188289-1 gnd rswk-swf Hochfrequenzentladung (DE-588)4298594-8 gnd rswk-swf Plasmadiagnostik (DE-588)4260997-5 gnd rswk-swf Mikrowelle (DE-588)4039246-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1992 Vimeiro gnd-content Mikrowelle (DE-588)4039246-6 s Entladung (DE-588)4188289-1 s Plasmadiagnostik (DE-588)4260997-5 s DE-604 Hochfrequenzentladung (DE-588)4298594-8 s Ferreira, Carlos M. edt Moisan, Michel edt Erscheint auch als Druck-Ausgabe 0-306-44355-4 B] NATO: [NATO ASI series 302 (DE-604)BV005876464 302 https://doi.org/10.1007/978-1-4899-1130-8 Verlag Volltext |
spellingShingle | Microwave discharges Fundamentals and Applications Chemistry Chemistry, Physical organic Nuclear physics Physical Chemistry Atomic, Molecular, Optical and Plasma Physics Nuclear Physics, Heavy Ions, Hadrons Classical Continuum Physics Chemie Entladung (DE-588)4188289-1 gnd Hochfrequenzentladung (DE-588)4298594-8 gnd Plasmadiagnostik (DE-588)4260997-5 gnd Mikrowelle (DE-588)4039246-6 gnd |
subject_GND | (DE-588)4188289-1 (DE-588)4298594-8 (DE-588)4260997-5 (DE-588)4039246-6 (DE-588)1071861417 |
title | Microwave discharges Fundamentals and Applications |
title_alt | Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992 |
title_auth | Microwave discharges Fundamentals and Applications |
title_exact_search | Microwave discharges Fundamentals and Applications |
title_full | Microwave discharges Fundamentals and Applications edited by Carlos M. Ferreira, Michel Moisan |
title_fullStr | Microwave discharges Fundamentals and Applications edited by Carlos M. Ferreira, Michel Moisan |
title_full_unstemmed | Microwave discharges Fundamentals and Applications edited by Carlos M. Ferreira, Michel Moisan |
title_short | Microwave discharges |
title_sort | microwave discharges fundamentals and applications |
title_sub | Fundamentals and Applications |
topic | Chemistry Chemistry, Physical organic Nuclear physics Physical Chemistry Atomic, Molecular, Optical and Plasma Physics Nuclear Physics, Heavy Ions, Hadrons Classical Continuum Physics Chemie Entladung (DE-588)4188289-1 gnd Hochfrequenzentladung (DE-588)4298594-8 gnd Plasmadiagnostik (DE-588)4260997-5 gnd Mikrowelle (DE-588)4039246-6 gnd |
topic_facet | Chemistry Chemistry, Physical organic Nuclear physics Physical Chemistry Atomic, Molecular, Optical and Plasma Physics Nuclear Physics, Heavy Ions, Hadrons Classical Continuum Physics Chemie Entladung Hochfrequenzentladung Plasmadiagnostik Mikrowelle Konferenzschrift 1992 Vimeiro |
url | https://doi.org/10.1007/978-1-4899-1130-8 |
volume_link | (DE-604)BV005876464 |
work_keys_str_mv | AT ferreiracarlosm microwavedischargesfundamentalsandapplications AT moisanmichel microwavedischargesfundamentalsandapplications AT ferreiracarlosm proceedingsofanatoarwheldinvimeiroportugalmay11151992 AT moisanmichel proceedingsofanatoarwheldinvimeiroportugalmay11151992 |