APA (7th ed.) Citation

Namba, S. (1975). Ion Implantation in Semiconductors: Science and Technology. Springer US. https://doi.org/10.1007/978-1-4684-2151-4

Chicago Style (17th ed.) Citation

Namba, Susumu. Ion Implantation in Semiconductors: Science and Technology. Boston, MA: Springer US, 1975. https://doi.org/10.1007/978-1-4684-2151-4.

MLA (9th ed.) Citation

Namba, Susumu. Ion Implantation in Semiconductors: Science and Technology. Springer US, 1975. https://doi.org/10.1007/978-1-4684-2151-4.