Fundamentals of Semiconductor Processing Technology:
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Boston, MA
Springer US
1995
|
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufacturing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabilities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modern technologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semiconductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and circuits, their electrical parameters, reliability, and yield |
Beschreibung: | 1 Online-Ressource (XIII, 602 p) |
ISBN: | 9781461522096 9781461359272 |
DOI: | 10.1007/978-1-4615-2209-6 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV042411557 | ||
003 | DE-604 | ||
005 | 20180319 | ||
007 | cr|uuu---uuuuu | ||
008 | 150316s1995 |||| o||u| ||||||eng d | ||
020 | |a 9781461522096 |c Online |9 978-1-4615-2209-6 | ||
020 | |a 9781461359272 |c Print |9 978-1-4613-5927-2 | ||
024 | 7 | |a 10.1007/978-1-4615-2209-6 |2 doi | |
035 | |a (OCoLC)863734440 | ||
035 | |a (DE-599)BVBBV042411557 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-91 |a DE-83 | ||
082 | 0 | |a 537.622 |2 23 | |
084 | |a PHY 000 |2 stub | ||
100 | 1 | |a El-Kareh, Badih |e Verfasser |4 aut | |
245 | 1 | 0 | |a Fundamentals of Semiconductor Processing Technology |c by Badih El-Kareh |
264 | 1 | |a Boston, MA |b Springer US |c 1995 | |
300 | |a 1 Online-Ressource (XIII, 602 p) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufacturing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabilities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modern technologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semiconductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and circuits, their electrical parameters, reliability, and yield | ||
650 | 4 | |a Physics | |
650 | 4 | |a Computer engineering | |
650 | 4 | |a Electronics | |
650 | 4 | |a Systems engineering | |
650 | 4 | |a Semiconductors | |
650 | 4 | |a Electronics and Microelectronics, Instrumentation | |
650 | 4 | |a Circuits and Systems | |
650 | 4 | |a Electrical Engineering | |
856 | 4 | 0 | |u https://doi.org/10.1007/978-1-4615-2209-6 |x Verlag |3 Volltext |
912 | |a ZDB-2-PHA |a ZDB-2-BAE | ||
940 | 1 | |q ZDB-2-PHA_Archive | |
999 | |a oai:aleph.bib-bvb.de:BVB01-027847049 |
Datensatz im Suchindex
_version_ | 1804153073114808320 |
---|---|
any_adam_object | |
author | El-Kareh, Badih |
author_facet | El-Kareh, Badih |
author_role | aut |
author_sort | El-Kareh, Badih |
author_variant | b e k bek |
building | Verbundindex |
bvnumber | BV042411557 |
classification_tum | PHY 000 |
collection | ZDB-2-PHA ZDB-2-BAE |
ctrlnum | (OCoLC)863734440 (DE-599)BVBBV042411557 |
dewey-full | 537.622 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 537 - Electricity and electronics |
dewey-raw | 537.622 |
dewey-search | 537.622 |
dewey-sort | 3537.622 |
dewey-tens | 530 - Physics |
discipline | Physik |
doi_str_mv | 10.1007/978-1-4615-2209-6 |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02926nmm a2200445zc 4500</leader><controlfield tag="001">BV042411557</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20180319 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150316s1995 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781461522096</subfield><subfield code="c">Online</subfield><subfield code="9">978-1-4615-2209-6</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781461359272</subfield><subfield code="c">Print</subfield><subfield code="9">978-1-4613-5927-2</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-1-4615-2209-6</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)863734440</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042411557</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">537.622</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">El-Kareh, Badih</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Fundamentals of Semiconductor Processing Technology</subfield><subfield code="c">by Badih El-Kareh</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boston, MA</subfield><subfield code="b">Springer US</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XIII, 602 p)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufacturing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabilities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modern technologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semiconductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and circuits, their electrical parameters, reliability, and yield</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Physics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Computer engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Systems engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics and Microelectronics, Instrumentation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Circuits and Systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electrical Engineering</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-1-4615-2209-6</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-PHA</subfield><subfield code="a">ZDB-2-BAE</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-PHA_Archive</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027847049</subfield></datafield></record></collection> |
id | DE-604.BV042411557 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:20:48Z |
institution | BVB |
isbn | 9781461522096 9781461359272 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027847049 |
oclc_num | 863734440 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM DE-83 |
owner_facet | DE-91 DE-BY-TUM DE-83 |
physical | 1 Online-Ressource (XIII, 602 p) |
psigel | ZDB-2-PHA ZDB-2-BAE ZDB-2-PHA_Archive |
publishDate | 1995 |
publishDateSearch | 1995 |
publishDateSort | 1995 |
publisher | Springer US |
record_format | marc |
spelling | El-Kareh, Badih Verfasser aut Fundamentals of Semiconductor Processing Technology by Badih El-Kareh Boston, MA Springer US 1995 1 Online-Ressource (XIII, 602 p) txt rdacontent c rdamedia cr rdacarrier The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufacturing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabilities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modern technologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semiconductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and circuits, their electrical parameters, reliability, and yield Physics Computer engineering Electronics Systems engineering Semiconductors Electronics and Microelectronics, Instrumentation Circuits and Systems Electrical Engineering https://doi.org/10.1007/978-1-4615-2209-6 Verlag Volltext |
spellingShingle | El-Kareh, Badih Fundamentals of Semiconductor Processing Technology Physics Computer engineering Electronics Systems engineering Semiconductors Electronics and Microelectronics, Instrumentation Circuits and Systems Electrical Engineering |
title | Fundamentals of Semiconductor Processing Technology |
title_auth | Fundamentals of Semiconductor Processing Technology |
title_exact_search | Fundamentals of Semiconductor Processing Technology |
title_full | Fundamentals of Semiconductor Processing Technology by Badih El-Kareh |
title_fullStr | Fundamentals of Semiconductor Processing Technology by Badih El-Kareh |
title_full_unstemmed | Fundamentals of Semiconductor Processing Technology by Badih El-Kareh |
title_short | Fundamentals of Semiconductor Processing Technology |
title_sort | fundamentals of semiconductor processing technology |
topic | Physics Computer engineering Electronics Systems engineering Semiconductors Electronics and Microelectronics, Instrumentation Circuits and Systems Electrical Engineering |
topic_facet | Physics Computer engineering Electronics Systems engineering Semiconductors Electronics and Microelectronics, Instrumentation Circuits and Systems Electrical Engineering |
url | https://doi.org/10.1007/978-1-4615-2209-6 |
work_keys_str_mv | AT elkarehbadih fundamentalsofsemiconductorprocessingtechnology |