APA (7th ed.) Citation

Chen, F. F. (2003). Lecture Notes on Principles of Plasma Processing. Springer US. https://doi.org/10.1007/978-1-4615-0181-7

Chicago Style (17th ed.) Citation

Chen, Francis F. Lecture Notes on Principles of Plasma Processing. Boston, MA: Springer US, 2003. https://doi.org/10.1007/978-1-4615-0181-7.

MLA (9th ed.) Citation

Chen, Francis F. Lecture Notes on Principles of Plasma Processing. Springer US, 2003. https://doi.org/10.1007/978-1-4615-0181-7.