Silicon photonics design: from devices to systems
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Cambridge
Cambridge Univ. Press
2015
|
| Edition: | 1. publ. |
| Subjects: | |
| Online Access: | Klappentext Inhaltsverzeichnis |
| Item Description: | Includes bibliographical references and index Hier auch später erschienene, unveränderte Nachdrucke |
| Physical Description: | XIX, 418 S. zahlr. Ill., graph. Darst. |
| ISBN: | 9781107085459 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV042404030 | ||
| 003 | DE-604 | ||
| 005 | 20230331 | ||
| 007 | t | ||
| 008 | 150312s2015 ad|| |||| 00||| eng d | ||
| 020 | |a 9781107085459 |c hbk. |9 9781107085459 | ||
| 020 | |z 9781107085459 |9 978-1-107-08545-9 | ||
| 035 | |a (OCoLC)910514971 | ||
| 035 | |a (DE-599)BVBBV042404030 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 |a DE-703 |a DE-29T |a DE-526 |a DE-19 | ||
| 082 | 0 | |a 621.36 | |
| 084 | |a UH 7500 |0 (DE-625)145776: |2 rvk | ||
| 084 | |a ZN 5000 |0 (DE-625)157430: |2 rvk | ||
| 100 | 1 | |a Chrostowski, Lukas |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Silicon photonics design |b from devices to systems |c Lukas Chrostowski ; Michael Hochberg |
| 250 | |a 1. publ. | ||
| 264 | 1 | |a Cambridge |b Cambridge Univ. Press |c 2015 | |
| 300 | |a XIX, 418 S. |b zahlr. Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 500 | |a Hier auch später erschienene, unveränderte Nachdrucke | ||
| 650 | 4 | |a Silicon / Optical properties | |
| 650 | 4 | |a Photonics | |
| 650 | 4 | |a Microwave integrated circuits / Design and construction | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics |2 bisacsh | |
| 650 | 7 | |a Microwave integrated circuits / Design and construction |2 fast | |
| 650 | 7 | |a Photonics |2 fast | |
| 650 | 7 | |a Silicon / Optical properties |2 fast | |
| 650 | 0 | 7 | |a Photonik |0 (DE-588)4243979-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Photonik |0 (DE-588)4243979-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Hochberg, Michael |e Verfasser |4 aut | |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027839662&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Klappentext |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027839662&sequence=000002&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-027839662 | ||
Record in the Search Index
| _version_ | 1804153060927209472 |
|---|---|
| adam_text | This book provides a complete guide, from physical principles of device operation through
fabrication and testing, using real system examples. It gives non-specialists access to what may
be the most important next step in information technology.
Carver Mead, California Institute of Technology
The book covers everything one would need to design, lay out, simulate, and fabricate an actual
silicon chip for processing, detecting, and modulating light signals. The book s focus on the
practical side of chip implementation means that it is quite different, and frankly more useful,
for chip designers than other photonics books.
R. Jacob Baker, University of Nevada
“Silicon Photonics Design is an essential text for anyone with an interest in the application of
silicon-based optical circuits [...] the inclusion of so many worked examples mixed with detailed
fundamental physical descriptions is an approach that must be applauded.
A. P. Knights, McMaster University
From design and simulation through to fabrication and testing, this hands-on introduction to
silicon photonics engineering equips students with everything they need to begin creating
foundry-ready designs.
Acquire practical understanding and experience
In-depth discussion of real-world issues and fabrication challenges ensures that students are
fully equipped for future careers in industry, designing complex integrated systems-on-chip.
Cut design time and development cost
Step-by-step tutorials, straightforward examples, and illustrative source code fragments guide
students through every aspect of the design process, and provide a practical framework for
developing and refining key skills.
Industry-ready expertise
Providing both guidance on how a process design kit (PDK) is constructed and how to best utilize
the types of PDKs currently available, this text will enable students to understand the design process
for building even very complex photonic systems-on-chip.
Accompanied by additional online resources to support students, this is the perfect learning package
for senior undergraduate and graduate students studying silicon photonics design, and academic and
industrial researchers involved in the development and manufacture of new silicon photonics systems.
Lukas Chrostowski is Associate Professor of Electrical and Computer Engineering at the University
of British Columbia. He is the Program Director of the NSERC CREATE Silicon Electronic-Photonic
Integrated Circuits (Si-EPIC) training program, has been teaching silicon photonics courses and
workshops since 2008, and has been awarded the Killiam Teaching Prize (2014).
Michael Hochberg is Director of Architecture and Strategy for Coriant Advanced Technology Group,
based in Manhattan, NY, where he holds a visiting appointment at Columbia University. He has held
faculty positions at the University of Washington, University of Delaware, and National University of
Singapore, and was Director of the OpSIS foundry-access service. He has co-founded several startups,
including Simulant and Luxtera and received a Presidential Early Career Award in Science and
Engineering (2009).
Online Resources
www.cambridge.org/chrostowski
Source code examples and tutorials
Generic Process Design Kit (PDK)
^ Software and parts lists for automated probe
station implementation
Cover design: Andrew Ward
Cambridge
UNIVERSITY PRESS
www.cambridge.org
Contents q
List of contributors page xiu
Preface xv
Part I Introduction l
1 Fabless silicon photonics 3
1.1 Introduction 3
1.2 Silicon photonics: the next fabless semiconductor industry 5
1.2.1 Historical context - Photonics 6
1.3 Applications 7
1.3.1 Data communication 8
1.4 Technical challenges and the state of the art 10
1.4.1 Waveguides and passive components 10
1.4.2 Modulators 12
1.4.3 Photodetectors 13
1.4.4 Light sources 14
1.4.5 Approaches to photonic-electronic integration 15
Monolithic integration 15
Multi-chip integration 16
1.5 Opportunities 17
1.5.1 Device engineering 17
1.5.2 Photonic system engineering 17
A transition from devices to systems 18
1.5.3 Tools and support infrastructure 19
Electronic-photonic co-design 19
DFM and yield management 20
1.5.4 Basic science 20
1.5.5 Process standardization and a history of MPW services 20
ePIXfab and Europractice 21
IME 21
OpSIS 21
CMC Microsystems 22
Other organizations 22
22
References
vi Contents
2 Modelling and design approaches 28
2.1 Optical waveguide mode solver 28
2.2 Wave propagation 31
2.2.1 3DFDTD 31
FDTD modelling procedure 32
2.2.2 2D FDTD 35
2.2.3 Additional propagation methods 36
2D FDTD with Effective Index Method 36
Beam Propagation Method (BPM) 37
Eigenmode Expansion Method (EME) 37
Coupled Mode Theory (CMT) 38
Transfer Matrix Method (TMM) 38
2.2.4 Passive optical components 38
2.3 Optoelectronic models 39
2.4 Microwave modelling 39
2.5 Thermal modelling 40
2.6 Photonic circuit modelling 40
2.7 Physical layout 41
2.8 Software tools integration 42
References 43
Part II Passive components 47
3 Optical materials and waveguides 49
3.1 Silicon-on-insulator 49
3.1.1 Silicon 49
Silicon - wavelength dependence 50
Silicon - temperature dependence 50
3.1.2 Silicon dioxide 51
3.2 Waveguides 51
3.2.1 Waveguide design 53
3.2.2 1D slab waveguide - analytic method 53
3.2.3 Numerical modelling of waveguides 53
3.2.4 ID slab - numerical 54
Convergence tests 55
Parameter sweep - slab thickness 57
3.2.5 Effective Index Method 57
3.2.6 Effective Index Method - analytic 59
3.2.7 Waveguide mode profiles - 2D calculations 60
3.2.8 Waveguide width - effective index 63
3.2.9 Wavelength dependence 65
Contents vi i
3.2.10 Compact models for waveguides 66
3.2.11 Waveguide loss 69
3.3 Bent waveguides 69
3.3.1 3D FDTD bend simulations 70
3.3.2 Eigenmode bend simulations 73
3.4 Problems 75
3.5 Codelistings 77
References 89
4 Fundamental building blocks 92
4.1 Directional couplers 92
4.1.1 Waveguide mode solver approach 93
Coupler-gap dependence 94
Coupler-length dependence 95
Wavelength dependence 95
4.1.2 Phase 96
4.1.3 Experimental data 99
4.1.4 FDTD modelling 102
FDTD versus mode solver 102
4.1.5 Sensitivity to fabrication 103
4.1.6 Strip waveguide directional couplers 105
4.1.7 Parasitic coupling 106
Delta beta coupling 108
4.2 Y-branch 110
4.3 Mach-Zehnder interferometer 113
4.4 Ring resonators 115
4.4.1 Optical transfer function 115
4.4.2 Ring resonator experimental results 117
4.5 Waveguide Bragg grating filters 117
4.5.1 Theory 117
Grating coupling coefficient 120
4.5.2 Design 120
Transfer Matrix Method 121
Grating physical structure design 123
Modelling gratings using FDTD 125
4.5.3 Experimental Bragg gratings 126
Strip waveguide gratings 127
Rib waveguide gratings 128
Grating period 129
4.5.4 Empirical models for fabricated gratings 130
Computation lithography models 134
Additional fabrication considerations 136
viii Contents
4.5.5 Spiral Bragg gratings 137
Thermal sensitivity 138
4.5.6 Phase-shifted Bragg gratings 138
4.5.7 Multi-period Bragg gratings 140
4.5.8 Grating-assisted contra-directional couplers 141
4.6 Problems 143
4.7 Code listings 144
References 159
5 Optical I/O 162
5.1 The challenge of optical coupling to silicon photonic chips 162
5.2 Grating coupler 163
5.2.1 Performance 164
5.2.2 Theory 165
5.2.3 Design methodology 168
Analytic grating coupler design 169
Design using 2D FDTD simulations 170
Results 172
Design parameters 173
Cladding and buried oxide 177
Compact design - focusing 179
Mask layout 180
3D simulation 181
5.2.4 Experimental results 181
5.3 Edge coupler 182
5.3.1 Nano-taper edge coupler 183
Mode overlap calculation approach 183
FDTD approach 187
5.3.2 Edge coupler with overlay waveguide 189
Eigenmode expansion method 189
5.4 Polarization 190
5.5 Problems 193
5.6 Codelistings 193
References 211
Partlll Active components 215
6 Modulators 217
6.1 Plasma dispersion effect 217
6.1.1 Silicon, carrier density dependence 217
6.2 pn-Junction phase shifter 218
6.2.1 pn-Junction carrier distribution 218
6.2.2 Optical phase response 221
Contents ix
6.2.3 Small-signal response 223
6.2.4 Numerical TCAD modelling of pn-junctions 224
6.3 Micro-ring modulators 226
6.3.1 Ring tuneability 227
6.3.2 Small-signal modulation response 228
6.3.3 Ring modulator design 231
6.4 Forward-biased PIN junction 232
6.4.1 Variable optical attenuator 232
6.5 Active tuning 234
6.5.1 PIN phase shifter 235
6.5.2 Thermal phase shifter 236
6.6 Thermo-optic switch 240
6.7 Problems 241
6.8 Code listings 242
References 257
Detectors 259
7.1 Performance parameters 259
7.1.1 Responsivity 259
7.1.2 Bandwidth 260
Transit time 260
RC response 261
Dark current 262
7.2 Fabrication 264
7.3 Types of detectors 266
7.3.1 Photoconductive detector 266
7.3.2 PIN detector 267
7.3.3 Avalanche detector 268
Charge region design 270
7.4 Design considerations 271
7.4.1 PIN junction orientation 271
7.4.2 Detector geometry 272
Detector length 272
Detector width 272
Detector height 272
7.4.3 Contacts 273
Contact material 273
Contact geometry 274
7.4.4 External load on the detector 275
7.5 Detector modelling 275
7.5.1 3D FDTD optical simulations 276
7.5.2 Electronic simulations 279
7.6 Problems 282
X
8
Part IV
g
10
Contents
7.7 Code listings 283
References 292
Lasers 295
8.1 External lasers 295
8.2 Laser modelling 296
8.3 Co-packaging 299
8.3.1 Pre-made laser 299
8.3.2 External cavity lasers 300
8.3.3 Etched-pit embedded epitaxy 301
8.4 Hybrid silicon lasers 301
8.5 Monolithic lasers 303
8.5.1 III--V Monolithic growth 303
8.5.2 Germanium lasers 304
8.6 Alternative light sources 306
8.7 Problem 307
References 307
System design 311
Photonic circuit modelling 313
9.1 Need for photonic circuit modelling 313
9.2 Components for system design 314
9.3 Compact models 314
9.3.1 Empirical or equivalent circuit models 316
9.3.2 S-parameters 317
9.4 Directional coupler - compact model 318
9.4.1 FDTD simulations 318
9.4.2 FDTD S-parameters 320
Directional coupler S-parameters 321
9.4.3 Empirical model ֊ polynomial 323
9.4.4 S-parameter model passivity 324
Passivity assessment 324
Passivity enforcement 325
9.5 Ring modulator - circuit model 330
9.6 Grating coupler - S-parameters 330
9.6.1 Grating coupler circuits 333
9.7 Code listings 333
References 348
Tools and techniques 349
10.1 Process design kit (PDK) 349
·■ ■.■· : ·· ■ - .... ·· . ™··. Contents xi
10.1.1 Fabrication process parameters 352
Silicon thickness and etch 352
GDS layer map 352
Design rules 352
10.1.2 Library 352
10.1.3 Schematic capture 353
10.1.4 Circuit export 355
10.1.5 Schematic-driven layout 356
10.1.6 Design rule checking 360
10.1.7 Layout versus schematic 361
10.2 Mask layout 362
10.2.1 Components 362
10.2.2 Layout for electrical and optical testing 362
10.2.3 Approaches for fast GDS layout 364
10.2.4 Approaches for space-efficient GDS layout 364
References 366
Fabrication 368
11.1 Fabrication non-uniformity 368
11.1.1 Lithography process contours 369
11.1.2 Corner analysis 370
11.1.3 On-chip non-uniformity, experimental results 372
Ring resonators 373
Grating couplers 377
11.2 Problems 379
References 380
Testing and packaging 381
12.1 Electrical and optical interfacing 381
12.1.1 Optical interfaces 381
Grating couplers 381
Edge couplers 382
Individual fibres 382
Spot-size converter 383
Fibre array 384
Free-space coupling 385
Fibre taper coupling 386
12.1.2 Electrical interfaces 386
Bond pads 386
Probing 387
Wire bonding 388
Flip-chip bonding 388
12.2 Automated optical probe stations 389
xii Contents
12.2.1 Parts 391
Sample stage 391
Fibre array probe 392
Electrical probes 393
Microscopes 393
12.2.2 Software 393
12.2.3 Operation 394
Loading and aligning a chip/wafer 395
Aligning the fibre array 395
Chip registration 396
Automated device testing 396
12.2.4 Optical test equipment 397
12.3 Design for test 398
12.3.1 Optical power budgets 400
12.3.2 Layout considerations 401
12.3.3 Design review and checklist 402
References 404
13 Silicon photonic system example 406
13.1 Wavelength division multiplexed transmitter 406
13.1.1 Ring-based WDM transmitter architectures 406
13.1.2 Common-bus WDM transmitter 408
13.1.3 Mod-Mux WDM transmitter 410
13.1.4 Conclusion 411
References 412
Index
414
|
| any_adam_object | 1 |
| author | Chrostowski, Lukas Hochberg, Michael |
| author_facet | Chrostowski, Lukas Hochberg, Michael |
| author_role | aut aut |
| author_sort | Chrostowski, Lukas |
| author_variant | l c lc m h mh |
| building | Verbundindex |
| bvnumber | BV042404030 |
| classification_rvk | UH 7500 ZN 5000 |
| ctrlnum | (OCoLC)910514971 (DE-599)BVBBV042404030 |
| dewey-full | 621.36 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.36 |
| dewey-search | 621.36 |
| dewey-sort | 3621.36 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. publ. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02357nam a2200517 c 4500</leader><controlfield tag="001">BV042404030</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20230331 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">150312s2015 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781107085459</subfield><subfield code="c">hbk.</subfield><subfield code="9">9781107085459</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">9781107085459</subfield><subfield code="9">978-1-107-08545-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)910514971</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042404030</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-526</subfield><subfield code="a">DE-19</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.36</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 7500</subfield><subfield code="0">(DE-625)145776:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 5000</subfield><subfield code="0">(DE-625)157430:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Chrostowski, Lukas</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Silicon photonics design</subfield><subfield code="b">from devices to systems</subfield><subfield code="c">Lukas Chrostowski ; Michael Hochberg</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. publ.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Cambridge</subfield><subfield code="b">Cambridge Univ. Press</subfield><subfield code="c">2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIX, 418 S.</subfield><subfield code="b">zahlr. Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Hier auch später erschienene, unveränderte Nachdrucke</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon / Optical properties</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Photonics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microwave integrated circuits / Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microwave integrated circuits / Design and construction</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Photonics</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Silicon / Optical properties</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Photonik</subfield><subfield code="0">(DE-588)4243979-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Photonik</subfield><subfield code="0">(DE-588)4243979-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hochberg, Michael</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027839662&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Klappentext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027839662&sequence=000002&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027839662</subfield></datafield></record></collection> |
| id | DE-604.BV042404030 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:20:37Z |
| institution | BVB |
| isbn | 9781107085459 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027839662 |
| oclc_num | 910514971 |
| open_access_boolean | |
| owner | DE-83 DE-703 DE-29T DE-526 DE-19 DE-BY-UBM |
| owner_facet | DE-83 DE-703 DE-29T DE-526 DE-19 DE-BY-UBM |
| physical | XIX, 418 S. zahlr. Ill., graph. Darst. |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | Cambridge Univ. Press |
| record_format | marc |
| spelling | Chrostowski, Lukas Verfasser aut Silicon photonics design from devices to systems Lukas Chrostowski ; Michael Hochberg 1. publ. Cambridge Cambridge Univ. Press 2015 XIX, 418 S. zahlr. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Hier auch später erschienene, unveränderte Nachdrucke Silicon / Optical properties Photonics Microwave integrated circuits / Design and construction TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics bisacsh Microwave integrated circuits / Design and construction fast Photonics fast Silicon / Optical properties fast Photonik (DE-588)4243979-6 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Silicium (DE-588)4077445-4 s Photonik (DE-588)4243979-6 s DE-604 Hochberg, Michael Verfasser aut Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027839662&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Klappentext Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027839662&sequence=000002&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Chrostowski, Lukas Hochberg, Michael Silicon photonics design from devices to systems Silicon / Optical properties Photonics Microwave integrated circuits / Design and construction TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics bisacsh Microwave integrated circuits / Design and construction fast Photonics fast Silicon / Optical properties fast Photonik (DE-588)4243979-6 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4243979-6 (DE-588)4077445-4 |
| title | Silicon photonics design from devices to systems |
| title_auth | Silicon photonics design from devices to systems |
| title_exact_search | Silicon photonics design from devices to systems |
| title_full | Silicon photonics design from devices to systems Lukas Chrostowski ; Michael Hochberg |
| title_fullStr | Silicon photonics design from devices to systems Lukas Chrostowski ; Michael Hochberg |
| title_full_unstemmed | Silicon photonics design from devices to systems Lukas Chrostowski ; Michael Hochberg |
| title_short | Silicon photonics design |
| title_sort | silicon photonics design from devices to systems |
| title_sub | from devices to systems |
| topic | Silicon / Optical properties Photonics Microwave integrated circuits / Design and construction TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics bisacsh Microwave integrated circuits / Design and construction fast Photonics fast Silicon / Optical properties fast Photonik (DE-588)4243979-6 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Silicon / Optical properties Photonics Microwave integrated circuits / Design and construction TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics Photonik Silicium |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027839662&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027839662&sequence=000002&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT chrostowskilukas siliconphotonicsdesignfromdevicestosystems AT hochbergmichael siliconphotonicsdesignfromdevicestosystems |