EUV lithography:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Hoboken, NJ [u.a.]
Wiley, SPIE Press
2009
|
| Schriftenreihe: | SPIE Press monograph
178 |
| Schlagworte: | |
| Beschreibung: | XXVII, 673 S. Ill., graph. Darst. |
| ISBN: | 9780819469649 9780470471555 |
Internformat
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| 300 | |a XXVII, 673 S. |b Ill., graph. Darst. | ||
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| 689 | 0 | |5 DE-604 | |
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Datensatz im Suchindex
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV042332492 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:18:40Z |
| institution | BVB |
| isbn | 9780819469649 9780470471555 |
| language | English |
| lccn | 2008018045 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027769204 |
| oclc_num | 636273899 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XXVII, 673 S. Ill., graph. Darst. |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
| publisher | Wiley, SPIE Press |
| record_format | marc |
| series | SPIE Press monograph |
| series2 | SPIE Press monograph |
| spelling | EUV lithography Vivek Bakshi, ed. Hoboken, NJ [u.a.] Wiley, SPIE Press 2009 XXVII, 673 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier SPIE Press monograph 178 Fotolithografie (DE-588)4274823-9 gnd rswk-swf Fotolithografie (DE-588)4274823-9 s DE-604 Bakshi, Vivek Sonstige oth SPIE Press monograph 178 (DE-604)BV011462585 178 |
| spellingShingle | EUV lithography SPIE Press monograph Fotolithografie (DE-588)4274823-9 gnd |
| subject_GND | (DE-588)4274823-9 |
| title | EUV lithography |
| title_auth | EUV lithography |
| title_exact_search | EUV lithography |
| title_full | EUV lithography Vivek Bakshi, ed. |
| title_fullStr | EUV lithography Vivek Bakshi, ed. |
| title_full_unstemmed | EUV lithography Vivek Bakshi, ed. |
| title_short | EUV lithography |
| title_sort | euv lithography |
| topic | Fotolithografie (DE-588)4274823-9 gnd |
| topic_facet | Fotolithografie |
| volume_link | (DE-604)BV011462585 |
| work_keys_str_mv | AT bakshivivek euvlithography |